Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits最新文献

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Analysis of HBM and MM ESD failures in nMOS devices nMOS器件中HBM和MM ESD失效分析
M. Beh, C. Kang, M. Natarajan, M. Radhakrishnan
{"title":"Analysis of HBM and MM ESD failures in nMOS devices","authors":"M. Beh, C. Kang, M. Natarajan, M. Radhakrishnan","doi":"10.1109/IPFA.1995.487606","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487606","url":null,"abstract":"The response and failure mechanisms of typical protection networks used in nMOS technology under simulated HBM and MM ESD stressing conditions are presented in this paper. The HBM stressing resulted in failures which are predominantly cumulative in nature, whereas MM stress caused abrupt and catastrophic failures. Under HBM stressing the failure modes are found to be increase in leakage current, resistive short and open circuit. The failures induced by MM stressing are mostly resistive short or open circuit. The failure analysis revealed the failure mechanisms to be contact spiking and electrothermomigration for those devices which do not have polysilicon strap in the protection circuit. Isolation oxide degradation and junction burn out following parasitic transistor turn-on are the failure mechanisms observed in those devices with the poly strap.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129851130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Monitoring partially-cured epoxy adhesives in disk-drive sub-assembly by thermal analysis (TA) techniques 用热分析(TA)技术监测磁盘驱动器组件中部分固化环氧胶粘剂
S. Chew, A. Sim
{"title":"Monitoring partially-cured epoxy adhesives in disk-drive sub-assembly by thermal analysis (TA) techniques","authors":"S. Chew, A. Sim","doi":"10.1109/IPFA.1995.487620","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487620","url":null,"abstract":"This paper outlines the technique and applications of using differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA) to monitor the degree of cure of process-cured epoxy adhesives with poor adhesion strength. Thermal events, such as residual cure and glass transition, detected by DSC analysis can be used to monitor insufficiently-cured thermal-curing adhesives. Both heat of residual cure and glass transition is directly proportional to the degree of cure or conversion from unreacted to reacted. Glass transition also governs the maximum operating temperature of the sub-assembly. The absence of residual cure of improperly-cured photo-curing epoxy adhesives during further exposure to heat makes it difficult to monitor these grade of adhesives by DSC. The weight loss profile of selected photo-curing adhesives by TGA can be used to qualify a photo-curing adhesive.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"1152 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127052485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Design for and the control of the channel and 1/f noise in GaAs MESFET's GaAs MESFET中通道和1/f噪声的设计与控制
K. T. Yan, L. Forbes
{"title":"Design for and the control of the channel and 1/f noise in GaAs MESFET's","authors":"K. T. Yan, L. Forbes","doi":"10.1109/IPFA.1995.487617","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487617","url":null,"abstract":"A model is given for the channel noise coefficient of FETs operating in the saturation region. Some approximations are made for hot electron effects which can be incorporated into the derivation and accounted for by a simple numerical technique. These are then compared to experimental results. We have also developed a formula for the 1/f noise corner frequency for GaAs MESFETs. The formula is based on a new theory where the 1/f noise is a bulk phenomena with localized high frequency variations and long range low frequency fluctuations of carrier concentrations in the substrate with the lowest frequency constrained only by the thickness of the material. Comprehensive and new models with matching experimental data for both channel noise and 1/f noise of the GaAs MESFETs are presented. These can provide both design and testing guidelines for devices in GaAs integrated circuits which are required to meet noise and reliability specifications.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"125 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114478390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A new type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon 砷注入p型硅上极薄二氧化硅薄膜的一种新型局部缺陷
W. S. Lau, K. Pey, W. Ng, V. Sane, J.M.C. Heng, J. Phang, D. Chan, C. Chua, B. Cronquist, B. Lee
{"title":"A new type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon","authors":"W. S. Lau, K. Pey, W. Ng, V. Sane, J.M.C. Heng, J. Phang, D. Chan, C. Chua, B. Cronquist, B. Lee","doi":"10.1109/IPFA.1995.487611","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487611","url":null,"abstract":"Local oxide defects in thin silicon dioxide films thermally grown on arsenic-implanted n/sup +/ layer on a p-type Si substrate as well as on a plain p-type substrate were studied with the EBIC/TCM (Electron Beam Induced Current/Tunneling Current Microscopy) technique. We have captured the EBIC micrographs and the EBIC linescans for the defects. A new type of local oxide defect was observed with the property that the TOEBIC (True Oxide EBIC) contrast and the TCM contrast are of the same polarity. This is not the same as the more usual type of oxide defects, which have opposite TOEBIC and TCM contrast. The more usual type of local oxide defects can be found in silicon dioxide films thermally grown on p-type Si substrate with or without the n/sup +/ implanted layer. However, the new type of local oxide defects can be found only in thin silicon dioxide films thermally grown on arsenic-implanted n/sup +/ layer on a p-type Si substrate. A tentative explanation was proposed to explain our experimental observations.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114543926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Power-on contention: a reliability issue for logic devices 上电争用:逻辑设备的可靠性问题
R. Muniandy, S. Miller, Lim Yew Tee, R. Boylan
{"title":"Power-on contention: a reliability issue for logic devices","authors":"R. Muniandy, S. Miller, Lim Yew Tee, R. Boylan","doi":"10.1109/IPFA.1995.487589","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487589","url":null,"abstract":"Power-on contention has emerged as a new reliability concern for logic devices. A description of what power-on contention is, the reliability risk it poses (especially with shrinking device geometry) and the need to design away from this phenomenon, is given. A case study of real failure due to power-on contention will make up a large part of this presentation.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"277 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116452661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
MOS transistor gate oxide breakdown stress dependence and their related models MOS晶体管栅极氧化物击穿应力依赖性及其相关模型
T. Yeoh, R. Nair, Shze-Jer Hu
{"title":"MOS transistor gate oxide breakdown stress dependence and their related models","authors":"T. Yeoh, R. Nair, Shze-Jer Hu","doi":"10.1109/IPFA.1995.487609","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487609","url":null,"abstract":"MOS transistor gate oxide breakdown is a common failure mechanism seen in the semiconductor industry. This paper deals with the various factors which affect gate oxide breakdown, i.e. influence of frequency, duty cycle and voltage on the transistor gate. Gate oxide breakdown models are also presented.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"194 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126156762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Fault isolation on mixed signal device 混合信号装置的故障隔离
K. Tan, S. H. Ong, C.T. Yong
{"title":"Fault isolation on mixed signal device","authors":"K. Tan, S. H. Ong, C.T. Yong","doi":"10.1109/IPFA.1995.487598","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487598","url":null,"abstract":"This paper determines the failure mechanism of the mixed signal device by using the fault isolation technique. Fault isolation techniques like micro-probing liquid crystal, EMMI and OBIC allow us to pinpoint the defective location. The mixed signal device analysis in this paper is the COMBO I, TP3054N, consisting of a /spl mu/-law monolithic PCM CODEC/filters utilizing the A/D and D/A conversion architecture and a serial PCM interface. Various failure mechanisms have been analyzed using the fault isolation technique. Poly-fuse defects as well as FAB related defects were determined during the course of analysis. Successfully finding the failure mechanism allows short term corrective action to be taken as well as long term redesigns to be implemented. This in turn improves product performance and assures a more reliable design for the COMBO I device as well as the other devices in this area.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130663403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Designing and building-in reliability in advanced microelectronic assemblies and structures 设计和建立在可靠性的先进微电子组件和结构
John W. Evans, J. Y. Evans, Byung Kil Yu
{"title":"Designing and building-in reliability in advanced microelectronic assemblies and structures","authors":"John W. Evans, J. Y. Evans, Byung Kil Yu","doi":"10.1109/IPFA.1995.487588","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487588","url":null,"abstract":"New technologies in electronics require that product development embrace the paradigms of design for reliability and built-in reliability. These paradigms require effective measures to create robust designs and manufacturing processes. This objective must be achieved through modeling failure processes and taking proactive steps early in the development. Following an assessment of material properties, finite element models are built of key structures in the system. A statistical experimental design is then developed. This statistically designed \"virtual experiment\" will include the geometrical and materials variables comprising the system and a damage model such as a fatigue prediction model. Information for process development or improvement is derived from the virtual experiment. The statistical model is then embedded in a Monte Carlo simulation to assess the impact of uncertainty and variability. This process of stochastic physics of failure is the subject of this paper. The process will be described and an application of this systems engineering based approach to micro-via interconnect reliability, in a complex multi-chip module, will be presented.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126454705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
A comparative study on the channel hot-carrier degradation of N- and P-MOSFETs with CVD tungsten polycide gate 用CVD聚钨栅极对N-和p - mosfet的沟道热载子降解进行了比较研究
C. Lou, W. Chim, D. Chan, Y. Pan
{"title":"A comparative study on the channel hot-carrier degradation of N- and P-MOSFETs with CVD tungsten polycide gate","authors":"C. Lou, W. Chim, D. Chan, Y. Pan","doi":"10.1109/IPFA.1995.487604","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487604","url":null,"abstract":"The channel hot-carrier induced degradation of polysilicon (PolySi) and tungsten polycide (WSi/sub x/) gate nMOSFETs and pMOSFETs are studied using the charge-pumping (CP) technique. WSi/sub x/ nMOSFETs under maximum substrate current (I/sub sub,max/) stress (V/sub g//spl sime/V/sub d//2) are degraded to a smaller extent when compared to the PolySi nMOSFETs. From the CP measurements, it is confirmed that fewer interface traps (N/sub it/) are generated for the WSi/sub x/ devices. However, under maximum gate current (I/sub g,max/) stress (V/sub g/=V/sub d/), the WSi/sub x/ nMOSFETs showed higher degradation than the PolySi devices. In contrast, WSi/sub x/ pMOSFETs showed higher degradation when compared to the PolySi devices under both the I/sub g,max/ and I/sub sub,max/ stresses. The CP results showed that more N/sub it/ and N/sub ox/ (negative oxide trapped charges) are present in the WSi/sub x/ pMOSFETs when compared with the PolySi devices. Finally, the operation of WSi/sub x/ CMOS transistors is found to be limited by the hot-carrier lifetime of WSi/sub x/ pMOSFETs.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121574052","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability assessment of EPROM memory retention for wafer level sort programming 用于晶片级排序编程的EPROM存储器保留可靠性评估
T. Yeoh, Shze-Jer Hu
{"title":"Reliability assessment of EPROM memory retention for wafer level sort programming","authors":"T. Yeoh, Shze-Jer Hu","doi":"10.1109/IPFA.1995.487625","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487625","url":null,"abstract":"The feasibility of programming microcontroller EPROM memory in the wafer sort operation instead of the backend test operation is studied. The major concern is EPROM charge loss due to heat treatments during the assembly processing. Theoretical and experimental evaluations as discussed in this paper have shown that wafer level sort programming is a viable option with no impact to quality and reliability.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122942638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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