2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)最新文献
{"title":"Programming structural color and magnetic anisotropy in polymer composite micrustructure for novel biosystems","authors":"J. Kim, H. Lee, H. Kim, S. Kwon","doi":"10.1109/TRANSDUCERS.2013.6627076","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627076","url":null,"abstract":"In this paper, we introduce a new material called `M-ink', whose reflective color and magnetic anisotropy are tunable by magnetically changing the periodicity of the nanostructure and fixable by photochemically immobilizing those structures in a polymer network. With this material system, we created vivid, free-floating structural colored microparticles with magnetic rotational control for multiplexed bioassays. Also we developed polymeric nanocomposite microactuators undergoing predesigned and complex motions capable of utilizing in various microsystems, by programming heterogeneous magnetic anisotropy. We envision that confining self-assembled nanparticles in polymer provides a new methodology to program advanced properties for the development of functional polymeric microstructure.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"423 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122725321","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N. Torras, K. Zinoviev, C. Camargo, E. Campo, H. Campanella, J. Esteve, J. Marshal, E. Terentjev, M. Omastová, I. Krupa, P. Teplický, B. Mamojka, P. Burns, B. Roder, M. Vallribera, R. Malet, S. Zuffanelli, V. Soler, J. Roig, N. Walker, D. Wenn, F. Vossen, F. Crompvoets
{"title":"Nematic opto-mechanical actuators for the fabrication of refreshable tactile systems","authors":"N. Torras, K. Zinoviev, C. Camargo, E. Campo, H. Campanella, J. Esteve, J. Marshal, E. Terentjev, M. Omastová, I. Krupa, P. Teplický, B. Mamojka, P. Burns, B. Roder, M. Vallribera, R. Malet, S. Zuffanelli, V. Soler, J. Roig, N. Walker, D. Wenn, F. Vossen, F. Crompvoets","doi":"10.1109/TRANSDUCERS.2013.6627111","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627111","url":null,"abstract":"Nematic elastomers are promising materials for the fabrication of actuators due to their ability to reversibly contract and expand during phase transitions triggered by external stimuli. We present a refreshable tactile system based on the opto-mechanical properties of liquid-crystalline elastomers (LCE) composites, with the capability to represent Braille characters and graphic information. The actuators designed are based on the stress gradient generated in the elastomer under illumination to exert a force on movable components. Hardware implementation and communication software interface were developed too to provide end users with a complete solution. First tests prove not only the viability of the device, but also the potential applications of this type of actuators.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122104547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Mutschler, L. Tanguy, N. Weber, A. Ernst, R. Zengerle, P. Koltay
{"title":"Characterization of liquid jet injection into tissue based on optical coherence tomography","authors":"K. Mutschler, L. Tanguy, N. Weber, A. Ernst, R. Zengerle, P. Koltay","doi":"10.1109/TRANSDUCERS.2013.6627107","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627107","url":null,"abstract":"We present the combination of high speed video monitoring, force measurement and Optical Coherence Tomography (OCT) as a new method for the characterization of liquid jets for needle-free tissue injection applications. It is well known that physical parameters, such as jet velocity and jet diameter determine the penetration characteristics of liquid micro-jets into a specific tissue [1]. The optimum injection parameters vary significantly for different types of tissues. Therefore, we have used high speed video monitoring and force sensor measurements to characterize the liquid jet. The penetration into the tissue is then analyzed by Optical Coherence Tomography (OCT) [2]. This enables the general description of the specific jet's physical properties as well as the penetration characteristics with respect to a specific tissue. In the experimental study, jets with diameters of 100 μm and jet lengths from 6 to 18 ms (~ 2 to 9 μl) have been injected into colon tissue from pigs.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122217174","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Vásquez Quintero, F. Molina‐Lopez, G. Mattana, D. Briand, N. D. de Rooij
{"title":"Self-standing printed humidity sensor with thermo-calibration and integrated heater","authors":"A. Vásquez Quintero, F. Molina‐Lopez, G. Mattana, D. Briand, N. D. de Rooij","doi":"10.1109/TRANSDUCERS.2013.6626897","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626897","url":null,"abstract":"In this work we report on a self-standing parallel-plate capacitive humidity sensor on a thin dry photoresist film with integrated resistive temperature sensor and heater on each electrode, respectively. The simple concept proposes dry photoresist film as substrate but also as dielectric humidity sensing layer. The characteristics of the temperature sensor (TCR ~900 ppmK-1), resistive heater (0.65 °C/mW) and humidity sensor (response time ~230 seconds, sensitivity ~23 fF / 1%R.H) were measured and are reported. FEM simulations were used to visualize the temperature distribution generated by the integrated heater.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129787008","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Large frequency tuning of Lithium Niobate laterally vibrating MEMS resonators via electric boundary reconfiguration","authors":"S. Gong, G. Piazza","doi":"10.1109/TRANSDUCERS.2013.6627305","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627305","url":null,"abstract":"The paper presents a method for tuning the center frequency of Lithium Niobate (LN) laterally vibrating MEMS resonators (LVRs). This technique can be used to address the need for low-cost and miniature frequency-agile components of future programmable RF front-ends. The resonator center frequency is modified by changing the electrical boundary conditions imposed by the excitation electrodes. The underlying theory for the tuning mechanism is discussed and verified by experiments. The experimentally shown tuning range is 3%, which surpasses any demonstration of tuning for MEMS resonators. The predicted tuning range can be as high as 7%.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129875974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. A. Muntjes, J. Hafner, M. Görtz, Wilfried Mokwa
{"title":"Studies on thinned flexible integrated capacitive pressure sensors in tactile sensor arrays for the use in robotics and prosthetics","authors":"J. A. Muntjes, J. Hafner, M. Görtz, Wilfried Mokwa","doi":"10.1109/TRANSDUCERS.2013.6627055","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627055","url":null,"abstract":"This paper examines the behavior of thinned and thereby flexible integrated silicon pressure sensors embedded in an array for tactile sensing in robotics and prosthetics. The aim of this sensor array is the detection of tactile sensations with high resolution. As a further requirement it should be possible to mount the sensor array onto an irregular surface, e.g. a prosthetic or robotic hand. For this the sensor array needs to be flexible which has an influence on the silicon components integrated in the tactile sensor. In this paper the effects of flexibilization and bending on the pressure sensor signals are studied.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128557905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments","authors":"S. Pal, S. Samuelson, X. Zhang, Huikai Xie","doi":"10.1109/TRANSDUCERS.2013.6627086","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627086","url":null,"abstract":"A mechanism for achieving large in-plane displacement is proposed, fabricated and tested. A key distinguishing feature of this mechanism is that it employs bimorph actuator beams, which have traditionally been used for achieving out-of-plane displacements only. A combination of rigid beams and bimorphs amplifies in-plane displacements and minimizes out-of-plane displacements produced by the bimorphs. A test structure with thermal bimorphs and an embedded resistive heater is fabricated; a maximum displacement of 135 μm is measured at just 3.8 V dc. The mechanism may also be implemented using bimorphs and multimorphs based on piezoelectric effect, electroactive polymers, shape memory alloys, magnetostriction, and electrostriction. Possible applications include movable MEMS stages, integrated Michelson interferometers, temperature sensors, and movable microneedles.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128716455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Fabrication of 3D structures using self-assembly at an air-water interface","authors":"K. Park, Cagdac Varel, R. Baskaran, K. Bohringer","doi":"10.1109/TRANSDUCERS.2013.6627168","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627168","url":null,"abstract":"This paper presents a novel self-assembly method for 3D structures with orthogonal or tilted surfaces. The assembly is achieved in a two-step process: part delivery using fluidic self-assembly and part folding to assemble the 3D structure. A magnetic field is employed for both processes. The folding angle is controlled by adjusting the direction of the magnetic field. The parts are fixed with solder reflow once they are assembled. As a proof of concept, millimeter-scale pyramid and rectangular shaped structures with different folding angles are fabricated.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129154774","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Gaughran, N. Dimov, E. Clancy, T. Barry, T. J. Smith, J. Ducrée
{"title":"Multi-stage, solvent-controlled routing for automated on-disc extraction of total RNA from breast cancer cell line homogenate","authors":"J. Gaughran, N. Dimov, E. Clancy, T. Barry, T. J. Smith, J. Ducrée","doi":"10.1109/TRANSDUCERS.2013.6626763","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626763","url":null,"abstract":"We report for the first time rotationally controlled extraction of total RNA from cell homogenate through novel, solvent-dependent routing on a centrifugal micro-fluidic platform. This system allows for sample preparation and integrated analysis to be incorporated on a single microfluidic device. Also reported here for the first time is a solvent-triggered valving mechanism and the performance of on-disc extraction of purified total RNA.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129535060","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
R. Gueye, S. W. Lee, W. Vitale, S. Truax, T. Akiyama, C. Roman, A. Ionescu, C. Hierold, D. Briand, N. D. de Rooij
{"title":"RF-TSVs compatible with harsh-environment post-processing for “via-first” 3D integration","authors":"R. Gueye, S. W. Lee, W. Vitale, S. Truax, T. Akiyama, C. Roman, A. Ionescu, C. Hierold, D. Briand, N. D. de Rooij","doi":"10.1109/TRANSDUCERS.2013.6626895","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626895","url":null,"abstract":"Platinum TSVs compatible with harsh-environment post-processing were fabricated on an SOI wafer. This study was part of a larger project for the development of a SWCNT resonator, 3D-integrated, in a “via-first” approach, with its driving electronics. After their passivation, they are compatible with the harsh-environment post-processes necessary for the fabrication of the SWCNT resonator: the growth of CNT at a high temperature of 850 °C in an oxidizing environment, and their release in concentrated HF solution. The TSV metallization formed a stable ohmic contact with the silicon device layer on which the CNT resonator will be standing. We present RF (radio frequency) simulations correlated with RF measurements of the Pt-TSVs from 0.3 to 5 GHz. A reflection coefficient of -20 dB and transmission coefficient of -4 dB were measured at 5 GHz.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130410217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}