Optics and Laser Technology最新文献_第4页

A MEMS fiber-optic Fabry-Perot accelerometer with spectral-phase demodulation 光谱相位解调的MEMS光纤法布里-珀罗加速度计

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-13 DOI: 10.1016/j.optlastec.2025.113371

Changquan Zhuang , Tao Jin , Jingya Zhang , Heming Wei , Mengshi Zhu , Liang Zhang , Fufei Pang , Shijie Zheng , Dengwei Zhang , Kok-Sing Lim , Carlos Marques

{"title":"A MEMS fiber-optic Fabry-Perot accelerometer with spectral-phase demodulation","authors":"Changquan Zhuang , Tao Jin , Jingya Zhang , Heming Wei , Mengshi Zhu , Liang Zhang , Fufei Pang , Shijie Zheng , Dengwei Zhang , Kok-Sing Lim , Carlos Marques","doi":"10.1016/j.optlastec.2025.113371","DOIUrl":"10.1016/j.optlastec.2025.113371","url":null,"abstract":"<div><div>In this work, a wideband Fabry-Perot accelerometer based on MEMS diagram was proposed and designed. The central mass block was elastically connected to a 2.8 mm outer frame through four curved beams to construct a single degree of freedom vibration system. Based on finite element simulation, the structural parameters of the four-arm bending beam diaphragm are optimized to broaden the operating frequency band while improving sensitivity. The structural stability of the sensor is ensured by leveraging MEMS processing technology, and miniaturized packaging is realized through the application of ceramic brackets. Moreover, a spectral-phase demodulation algorithm is employed to enable high-resolution measurement with a large vibration range. Through the in-depth analysis of experimental data, it is concluded that the designed accelerometer has an intrinsic frequency of 6624 Hz, an axial sensitivity of 12.397 nm/g at 200 Hz, and a lateral crosstalk of approximately 6.91 %. The working range of the accelerometer is 0 ∼ 2000 Hz, with a resolution of 14.358 mg and a measurement range of ± 287 g. The accelerometer exhibits sensitive response capability, large dynamic range and high stability, demonstrating great potential for application in diverse fields such as aerospace, mechanical and civil engineering.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113371"},"PeriodicalIF":4.6,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144280318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Research progress on endoscopic multimodal optical imaging 内窥镜多模态光学成像研究进展

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-13 DOI: 10.1016/j.optlastec.2025.113355

Jiali Chen , Shuai Liu , Tianxin Gao , Xiaoying Tang , Hongen Liao , Yingwei Fan

{"title":"Research progress on endoscopic multimodal optical imaging","authors":"Jiali Chen , Shuai Liu , Tianxin Gao , Xiaoying Tang , Hongen Liao , Yingwei Fan","doi":"10.1016/j.optlastec.2025.113355","DOIUrl":"10.1016/j.optlastec.2025.113355","url":null,"abstract":"<div><div>Endoscopic imaging, a minimally invasive and nondestructive biomedical imaging technology, has shown great potential in the diagnosis and treatment of natural cavity diseases. Endoscopic multimodal optical imaging combines the advantages of minimally invasive intervention via endoscopic systems with the high resolution, high contrast, and high imaging depth of multimodal optical imaging, providing a powerful means for precise imaging of deep tissues in the body. In recent years, with the deepening of research on endoscopic multimodal optical imaging systems and the expansion of biomedical application scenarios, this technology has shown excellent potential in both basic research and clinical applications. This article provides a comprehensive review of endoscopic multimodal optical imaging technology and research progress, aiming to provide direction for subsequent research on endoscopic multimodal optical imaging. This article first introduces endoscopic optical imaging technology; then, it reviews the research progress and corresponding clinical applications of endoscopic dual-mode, three-mode and four-mode optical imaging; and finally, it discusses the challenges and prospects of the future development of endoscopic multimodal optical imaging technology.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113355"},"PeriodicalIF":4.6,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144271071","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

In situ characterization of keyhole behavior and spatter formation in full penetration laser beam welding with local gas flow using high-speed synchrotron X-ray imaging 利用高速同步x射线成像技术原位表征局部气流下全熔透激光束焊接的小孔行为和飞溅形成

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-12 DOI: 10.1016/j.optlastec.2025.113367

Christian Diegel , Klaus Schricker , Leander Schmidt , Marc Seibold , Hannes Friedmann , Peter Hellwig , Fabian Fröhlich , Falk Nagel , Peter Kallage , Alexander Rack , Herwig Requardt , Yunhui Chen , Jean Pierre Bergmann

{"title":"In situ characterization of keyhole behavior and spatter formation in full penetration laser beam welding with local gas flow using high-speed synchrotron X-ray imaging","authors":"Christian Diegel , Klaus Schricker , Leander Schmidt , Marc Seibold , Hannes Friedmann , Peter Hellwig , Fabian Fröhlich , Falk Nagel , Peter Kallage , Alexander Rack , Herwig Requardt , Yunhui Chen , Jean Pierre Bergmann","doi":"10.1016/j.optlastec.2025.113367","DOIUrl":"10.1016/j.optlastec.2025.113367","url":null,"abstract":"<div><div>Spatter formation is a major issue at welding speeds above 8 m/min for full penetration laser beam welding of high-alloyed steels. In experiments using a local gas flow directed at the keyhole rear wall, a reduction in spatter formation on the specimen top side was observed for welding of AISI 304. However, the interaction between gas flow and keyhole behavior with respect to the mechanisms and locations of spatter detachment, especially on the bottom side, is not yet fully understood. High-speed synchrotron X-ray imaging enables detailed insights into the keyhole behavior and the spatter formation to obtain a deeper understanding of the underlying mechanisms.</div><div>During the reference experiments welding without shielding gas flow, the spatter detach from a melt pool swelling behind the keyhole aperture on both sides of the sheet. A gas flow with a low flow rate of 4.8 L/min reduces the spatter formation on the top side and the keyhole length due to the absence of oxygen affecting the surface tension. A swelling also forms on the keyhole front on the bottom side and small spatter detach undirected. Increasing the flow rate to 12.8 L/min elongates the keyhole, particularly on the specimen top side. The increased momentum transfer of the gas flow results in a periodic keyhole oscillation on the specimen top side. In combination with an elongated melt pool, the oscillation is directly correlated with the hump formation, caused by melt being pushed over the already solidified weld seam. In addition, spatter does not detach from the top side due to the changed melt flow and only detach from the keyhole front on the bottom side.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113367"},"PeriodicalIF":4.6,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144261642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

DGTF: A framework utilizing textual semantics for detail-aware and global fusion with a multi-degradation scenarios dataset DGTF：一个框架，利用文本语义与多退化场景数据集进行细节感知和全局融合

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-12 DOI: 10.1016/j.optlastec.2025.113319

Mingxin Yu , Zhenyang Liang , Ning Li , Mingwei Lin

{"title":"DGTF: A framework utilizing textual semantics for detail-aware and global fusion with a multi-degradation scenarios dataset","authors":"Mingxin Yu , Zhenyang Liang , Ning Li , Mingwei Lin","doi":"10.1016/j.optlastec.2025.113319","DOIUrl":"10.1016/j.optlastec.2025.113319","url":null,"abstract":"<div><div>Infrared and visible light fusion aims to integrate information from both modalities to generate high-quality fused images. However, existing methods do not perform well in multiple degraded scenarios. In these scenarios, the source images face quality degradation and information loss. Fusion combined with degradation processing often damages the detailed target information in the images. To address this limitation, this paper proposes a novel Degradation-Text Fusion framework, named DGTF, which leverages cascaded degradation text, object text, and target masks for detail-aware degradation regulation. The framework adjusts the details based on the object text specified in the given input, ensuring that global degradation processing does not compromise the quality of detail fusion. This approach overcomes the limitations of previous methods constrained by global degradation processing. To train and evaluate DGTF, we constructed a new infrared and visible light dataset, Multi-degraded scene text target infrared and visible datasets (MTS), which encompasses seven extreme scenarios, including rain, snow, fog, low light, exposure, infrared noise, and low contrast. Extensive experimental results demonstrate that our method significantly outperforms existing techniques in fusion performance, even without text guidance. Furthermore, tests conducted on the MTS dataset reveal that the detail-regulated fusion results achieved by DGTF far surpass traditional degradation-based fusion methods, effectively enhancing the performance of advanced vision tasks. These findings validate the effectiveness of the proposed detail regulation framework. Our code is available at <span><span>https://github.com/linshenj/DGTF</span><svg><path></path></svg></span>.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113319"},"PeriodicalIF":4.6,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144271070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

An ionization wave detection system for long air gap discharges 一种用于长气隙放电的电离波探测系统

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-12 DOI: 10.1016/j.optlastec.2025.113357

Xiangen Zhao , Xiankang Wang , Yang Liu , Yaping Du , Junjia He

{"title":"An ionization wave detection system for long air gap discharges","authors":"Xiangen Zhao , Xiankang Wang , Yang Liu , Yaping Du , Junjia He","doi":"10.1016/j.optlastec.2025.113357","DOIUrl":"10.1016/j.optlastec.2025.113357","url":null,"abstract":"<div><div>Understanding the ionization process is essential for elucidating the mechanisms of long air gap discharges. However, existing commercial camera and photodetectors face significant challenges in capturing ionization and propagation dynamics in long air gap discharges due to the rapid evolution (10<sup>6</sup> ∼ 10<sup>7</sup> m/s) of ionization waves, the wide dynamic range of emission intensities, and the requirement for precise spatial calibration. To address these limitations, this study presents an Ionization Wave Detection System (IWDS), designed based on a 16-channel photomultiplier tube (PMT) assembly. By adopting single-lens catadioptric optical imaging design, the IWDS is equipped with a viewfinder window for synchronized spatial calibration and provides a spatial resolution of at least 6 mm per channel, ensuring precise observation of discharge evolution. Additionally, the subsequent analogue signal processing and acquisition units provide the IWDS with a wide range of adjustable gain (up to 1 × 10<sup>6</sup>) and a sampling rate of 200 MSa/s, enabling continuous recording for up to 32 ms, in which the bandwidth of the electrical module is 45 MHz. The system was successfully employed to investigate the rapid evolution of ionization wave across various discharge stages, including initial streamer discharge, re-illumination phenomena, and dark periods. A comparative analysis with existing experimental and simulation data underscores the IWDS’s significant potential for spatio-temporal diagnostics of ionization wave in long air gap discharges.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113357"},"PeriodicalIF":4.6,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144261363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Phase retrieval by designed Hadamard complementary coded apertures 采用设计的Hadamard互补编码孔径进行相位恢复

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-12 DOI: 10.1016/j.optlastec.2025.113311

Bastián Romero , Pablo Scherz , Nelson Díaz , Jorge Tapia , Aarón Cofré , Eduardo Peters , Esteban Vera , Darío G. Pérez

{"title":"Phase retrieval by designed Hadamard complementary coded apertures","authors":"Bastián Romero , Pablo Scherz , Nelson Díaz , Jorge Tapia , Aarón Cofré , Eduardo Peters , Esteban Vera , Darío G. Pérez","doi":"10.1016/j.optlastec.2025.113311","DOIUrl":"10.1016/j.optlastec.2025.113311","url":null,"abstract":"<div><div>Phase retrieval is a challenging inverse problem where amplitude and phase are estimated from diffracted intensities, with applications ranging from microscopy to astronomy. Current computational imaging techniques employ random complementary coded apertures to recover complex optical fields, but require at least 20 masks for effective reconstruction, limiting real-time applications. We propose a novel approach using eight binary Hadamard complementary coded apertures designed to minimize the condition number, thereby ensuring a well-conditioned inverse problem. Our method significantly reduces acquisition time while enhancing reconstruction quality. Using the Fresnel propagation regime and the hybrid input-output algorithm, we validate our approach through extensive simulations with 23 Kodak dataset images across various noise levels. Results demonstrate that our Hadamard approach outperforms conventional random coded methods in reducing the required number of masks. Furthermore, experimental results confirm our technique successfully recovers both simple phase objects like lenses and complex arbitrary phases displayed on spatial light modulators, achieving superior visual quality measured by naturalness image quality evaluation metrics compared to conventional patterns.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113311"},"PeriodicalIF":4.6,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144261619","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Imaging-based lidar for atmospheric remote sensing: A review 基于成像的大气遥感激光雷达研究进展

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-12 DOI: 10.1016/j.optlastec.2025.113354

Zheng Kong , Ruonan Fei , Yuan Cheng , Xinhong Wang , Ning Xu , Zheng Wang , Kexin Zheng , Chunsheng Zhao , Dong Liu , Dengxin Hua , Zhenfeng Gong , Wei Peng , Liang Mei

{"title":"Imaging-based lidar for atmospheric remote sensing: A review","authors":"Zheng Kong , Ruonan Fei , Yuan Cheng , Xinhong Wang , Ning Xu , Zheng Wang , Kexin Zheng , Chunsheng Zhao , Dong Liu , Dengxin Hua , Zhenfeng Gong , Wei Peng , Liang Mei","doi":"10.1016/j.optlastec.2025.113354","DOIUrl":"10.1016/j.optlastec.2025.113354","url":null,"abstract":"<div><div>Lidar, an active optical remote sensing technique with high spatiotemporal resolution and large detection range, is capable of profiling a variety of atmospheric parameters such as aerosols, trace gases, temperature, pressure, etc., from the ground to the upper atmosphere, providing a crucial tool for air pollution monitoring, regional and global climate change studies and environmental management. In spite that the pulsed lidar technique based on the time-of-flight (TOF) principle has been widely used in atmospheric remote sensing nowadays, the first atmospheric lidar system, dating back to pre-laser times, was based on photography. In recent years, promoted by rapid developments in semiconductor and laser technologies, the imaging-based lidar technique, often utilizing laser diodes as light sources and image sensors as detectors, has also been rapidly developed and found numerous applications in atmospheric remote sensing, e.g., atmospheric aerosol extinction coefficient or optical depth measurements, pollution source tracking, aerosol polarization or size studies, aerosol scattering phase function studies, calibration of the geometrical form factor for pulsed lidar systems, atmospheric gas sensing. This paper elaborates on the fundamental principles, nomenclature, and theoretical descriptions of imaging-based lidar, discusses the system design and summarizes typical system architectures. Furthermore, this article also reviews recent advancements of the imaging-based lidar in atmospheric remote sensing and outlines its future prospect.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113354"},"PeriodicalIF":4.6,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144261620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A generalized model for predicting the optimal overlap rate and height of successive single-layer involved in laser metal deposition process based on the aspect ratio 基于纵横比的激光金属沉积过程中连续单层最优重叠率和最优重叠高度的广义预测模型

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-12 DOI: 10.1016/j.optlastec.2025.113364

Enjie Dong , Tingyu Chang , Gan Li , Ze Liu , Liming Xia , Linjie Zhao , Junwen Lu , Jiaxuan Chen , Mingjun Chen , Jian Cheng

{"title":"A generalized model for predicting the optimal overlap rate and height of successive single-layer involved in laser metal deposition process based on the aspect ratio","authors":"Enjie Dong , Tingyu Chang , Gan Li , Ze Liu , Liming Xia , Linjie Zhao , Junwen Lu , Jiaxuan Chen , Mingjun Chen , Jian Cheng","doi":"10.1016/j.optlastec.2025.113364","DOIUrl":"10.1016/j.optlastec.2025.113364","url":null,"abstract":"<div><div>The surface flatness of single-layer islands deposition is essential for high-quality multi-layer component deposition and the stability of the Laser metal deposition (LMD) manufacturing process. The aspect ratio of single-track deposition and the overlap rate are critical factors influencing the flatness of single-layer island deposition. Existing methods for determining the optimal overlap rate, whether through experimental approaches or simplified recursive overlap models, still suffer from long development cycles and limited accuracy. In this study, a generalized, efficient and reliable model for predicting the optimal overlap rate only using the aspect ratio of the single-track deposition as the input parameter was developed after fully understanding the influence of the aspect ratio and overlap rate on the morphology, stacking effect and flatness of single-layer islands. Besides, a prediction model for the height of the single-layer island, based on the input parameters of the aspect ratio and the overlap rate has also been developed. Further, verification datasets from different experimental batches and materials were used to validate the accuracy and generalizability of the island height prediction model. The validation results indicated that the relative error between the predicted and actual values was less than 10%. The single-track aspect ratio can be directly used to guide the LMD multi-layer component deposition, regardless of the combination of powder and substrate materials, using these reliable and generalized prediction models for the optimal overlap rate and the island height developed in current study. The single-layer island deposition stage was completely eliminated, thereby significantly shorten the development cycle and reduce the cost of LMD process parameter development.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113364"},"PeriodicalIF":4.6,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144262094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Trajectory planning and experimental research on robot-assisted laser machining of face gear surface microstructure 机器人辅助面齿轮表面微结构激光加工轨迹规划及实验研究

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-12 DOI: 10.1016/j.optlastec.2025.113378

Guijian Xiao , Zhengyu Yang , Yi He , Xiaoyu Zhao , Shuai Liu

{"title":"Trajectory planning and experimental research on robot-assisted laser machining of face gear surface microstructure","authors":"Guijian Xiao , Zhengyu Yang , Yi He , Xiaoyu Zhao , Shuai Liu","doi":"10.1016/j.optlastec.2025.113378","DOIUrl":"10.1016/j.optlastec.2025.113378","url":null,"abstract":"<div><div>Face gears play a crucial role in power transmission, making their service performance a key area of research in manufacturing. One approach to improving performance is machining microstructures onto the gear surface. This study proposes a robot-assisted laser machining method based on the surface microstructure of face gears. Considering the characteristics of laser defocus, a trajectory planning method based on defocus control is presented and verified. The influence of different process parameters on the surface morphology, residual stress, and wettability of the machined tooth surface is analyzed. Results demonstrate that the ablation width and depth increased with laser power. As the laser frequency increased, the ablation width and depth decreased. Additionally, the surface residual compressive stress caused by mechanical stress was greater than the residual tensile stress induced by thermal stress, resulting in a compressive stress state on the sample surface. Under the optimal processing parameters, the contact angle of the machined surface was 3.332°, indicating super-oleophilicity. These findings confirm that the robot-assisted laser machining microstructure method can achieve microstructural processing of the face gear surface, improve its wettability, and provide a reliable processing method to improve the service performance.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113378"},"PeriodicalIF":4.6,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144262096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Extended axial response range of non-patterned wafer dark-field inspection systems via dual-tailed extended-axial point spread functions 利用双尾扩展轴向点扩展函数扩展非图像化晶圆暗场检测系统的轴向响应范围

IF 4.6 2区物理与天体物理

Optics and Laser Technology Pub Date : 2025-06-12 DOI: 10.1016/j.optlastec.2025.113153

Zhenzhen Ding, Xinlan Tang, Zhen Zhang, Han Su, Lingbao Kong, Min Xu

{"title":"Extended axial response range of non-patterned wafer dark-field inspection systems via dual-tailed extended-axial point spread functions","authors":"Zhenzhen Ding, Xinlan Tang, Zhen Zhang, Han Su, Lingbao Kong, Min Xu","doi":"10.1016/j.optlastec.2025.113153","DOIUrl":"10.1016/j.optlastec.2025.113153","url":null,"abstract":"<div><div>Dark-field imaging systems offer the advantages of non-contact, high sensitivity, and high throughput in non-patterned wafer inspection during semiconductor front-end processes. However, the application of high numerical aperture (NA) objectives with deep ultraviolet (DUV) light sources increases their sensitivity to defocusing caused by micrometer-scale irregularities on wafer surface, leading to false positives and false negatives. In this paper, we propose a family of point spread functions (PSFs), dual-tailed extended-axial PSFs (DTE-PSFs), to enhance the system’s defocus tolerance, improve the signal-to-noise ratio (SNR) under defocused conditions, and extend its axial response range. In this scheme, a custom phase plate, created by optimizing the variance of the PSF intensity gradient across various sampling planes, is placed in the spectral plane of a 4f system integrated behind the objective to manipulate the optical system’s PSF. Experimental results demonstrate that well-designed DTE-PSF can extend the axial response range of the systems by a factor of 2–3 compared to conventional setups, while also offering superior localization performance. The proposed method is efficient, requiring neither post-processing nor additional inspection time, and offers a novel approach to addressing the defocusing issue in dark-field wafer inspection systems.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"191 ","pages":"Article 113153"},"PeriodicalIF":4.6,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144261364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0