{"title":"Structure measurement of phase grating on post-magnification digital micro-holography","authors":"Wenjing Zhou, Yingjie Yu, A. Asundi","doi":"10.1117/12.814508","DOIUrl":"https://doi.org/10.1117/12.814508","url":null,"abstract":"It develops a digital micro-holographic optical system to record the magnified hologram (named post-magnification digital micro-holography in this paper), which can suppress the quadratic phase aberration introduced by micro-objective (MO) and the wave-front difference between the object wave and reference wave. In order to show its remarkable trait, post-magnification micro-holography is compared with the traditional digital micro-holography (DMH) (named pre-magnification DMH) from the view of digital processing and aberration eliminating. Their differences are also analyzed by the measurement results of a phase grating with period 30lines/mm and depth 0.3 μm. Fresnel approximation algorithm is used to reconstruct the phase-contrast one of this phase grating. The results show that the presented system is greatly helpful to restrain the quadratic phase error.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116926263","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The effects of post-annealing on pulse laser deposition of Zr0.8Sn0.2TiO4thin film on Si(100)","authors":"C. Chuang, M. Shih, M. Weng","doi":"10.1117/12.814587","DOIUrl":"https://doi.org/10.1117/12.814587","url":null,"abstract":"We demonstrate the pulse laser deposition (PLD) of zirconium tin titanium oxide (Zr0.8,Sn0.2)TiO4 (ZST) thin film on p-type Si (100)substrate by KrF excimer laser at room temperature, and the study of the effects of post-annealing to the optical and dielectric properties of the deposited ZST thin films. Deposition rate of ZST thin film at 0.3 Angstrom/pulse has been achieved with laser fluences of 1500 mJ/cm2. Raman spectroscopy, X-ray diffraction (XRD), and scanning electron microscopy (SEM) are used to study the effect of the crystalline properties of the deposited films on process parameters; such as laser fluence and annealing temperature. In addition, UV-Vis spectroscopy is used to characterize the optical properties of the deposited ZST films.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"77 4 Pt 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121915256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Fei Zhang, Zhuangde Jiang, Jianjun Ding, Bing Li, Lei Chen
{"title":"A path planning method for large-scale blade profile measurement based on neutral network","authors":"Fei Zhang, Zhuangde Jiang, Jianjun Ding, Bing Li, Lei Chen","doi":"10.1117/12.814566","DOIUrl":"https://doi.org/10.1117/12.814566","url":null,"abstract":"For solving the problem of programming measurement path when inspecting Blade Profile, and improving the efficiency and precision, the self-adaptive dynamic path planning model of blade profile measurement is proposed, using Back Propagation Neutral Network, based on the blade measuring characteristic and non-contact measurement system of blade profile detecting in laser triangular principle. For the feature of blade profile measuring, with the factors affecting the Probe precision and efficiency (the range of depth of field, incident angle), we plan the probe position of next measurement point by selecting 3 layer BP networks of , using practically measured blade profile as Training Sample, and regarding probe coordinates of corresponding profile measuring point as networks input. This paper discusses and explains the factors affecting measurement path planning, the creating and training of the BP networks profile measurement path planning in details. Because of the use of Neural Network learning the ability of approximating nonlinear mapping in any precision and the application of regarding blade profile data as BP network training sample, measuring movement path can combine with the blade curvature variation closely. Then, practically measuring precision and efficiency are improved, and the Path Planning problem is solved, brought by curvature varying greatly of blade profile in large blade profile measurement. At last, a group of experimental data is given, and the results of experiment are analyzed in detail.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126821511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
R. K., Vernon Jialiang Shen, Amitava Talukdar, A. Asundi
{"title":"Adaptive confocal system for 3-D profiling","authors":"R. K., Vernon Jialiang Shen, Amitava Talukdar, A. Asundi","doi":"10.1117/12.814569","DOIUrl":"https://doi.org/10.1117/12.814569","url":null,"abstract":"Optical profilometers for micrometer resolutions are getting increasingly popular for non-contact measurement of surface profiles. Confocal profilometer is one such optical technique which can pick up sub-micron height variations of the object surface. Though the system is a single point measurement scanning in the X-Y directions enables one to plot the 3-D profile of the surface. However, the Z-scanning range is limited to ±1mm. In this work we report a system which can adapt itself to widen the scanning range in the Z-direction. For increasing the scan range we have added another translation stage in the Z axis which adapts itself when the system profiles a surface with step heights more than its original range. The X-Y-Z translation stage is connected to the computer and is controlled using a LabVIEW program. The 3-D plot is obtained by plotting the Z-values from the confocal system to the corresponding X-Y position of the translation stage. When ever the system goes out of range the Z translation stage is increased or decreased thus adapting itself to plot a 3D profile of the specimen.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122162489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Liu, A. Malcolm, X. M. Yin, S. J. Liew, T. Prawiradiraja
{"title":"A hybrid x-ray and microscopy method for diametrical profile measurement of internal holes in steel components","authors":"T. Liu, A. Malcolm, X. M. Yin, S. J. Liew, T. Prawiradiraja","doi":"10.1117/12.814550","DOIUrl":"https://doi.org/10.1117/12.814550","url":null,"abstract":"High-resolution X-ray is now an essential tool for internal defect and structure inspection in electronics and advanced materials industry. However, it is always a challenge to use it for accurate dimensional measurement due to the nature of the fan-beam X-ray source, particularly for cylindrical objects. This paper presents a novel hybrid X-ray and microscopy method for the profile measurement of the internal hole of a cylinder-shaped steel component. The part to be measured has a beer bottle shape but is open at the bottom side. The objective is to measure the diametrical profile of the internal hole with an accuracy of about 10μm. Traditionally this is measured with using a microscope after cutting and polishing the specimen. This is not only a tedious work, but is also inaccurate due to the uncertainty in cutting and polishing. This report demonstrates that the two edge-profiles of the internal hole can be obtained with X-ray inspection by sequentially placing each of them at the central of the X-ray beam so that the fan-beam effect can be minimized. The resolution of the X-ray inspection is about 6µm under a 20x magnification. Subsequently, the diameter of the hole is measured at two positions through the open end using a microscope with a 20x and a 10x objectives respectively. The results obtained with the two methods are then combined to generate the whole diametrical profile of the internal hole.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130112349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jun Han, Xiao-yan Shang, Yu-ying An, Xu Jiang, F. Wang
{"title":"Application research of spectrum measurement technology in thin-film thickness wideband monitoring system","authors":"Jun Han, Xiao-yan Shang, Yu-ying An, Xu Jiang, F. Wang","doi":"10.1117/12.814620","DOIUrl":"https://doi.org/10.1117/12.814620","url":null,"abstract":"The correct monitoring of thin-film thickness is one of the main problems during the course of optical thin-film component manufacture, in recent years, the method which is spectrum intensity measurement of thin-film component for controlling thin-film thickness has been one of the most effective methods. When this method is used Chow spectrum intensity is real-time, correctly measured is critical. Compared with the conventional method which is mechanical scanning by stepper motor driving the grating of monochromator and receiving by photoelectrical multiplier tube, in structure, the author combines the grating spectrometer with the linear CCD, which makes the problem of spectrum intensity real-time measurement better solved, the result is satisfied. In this paper, the structure of system affecting the spectrum intensity measurement accuracy is analyzed, By experiment, the relative parameters are determined, the spectrum wavelength is calibrated, root-mean-square error is 0.234nm, which is up to the requirement of monitoring wavelength resolution in the course of thin-film deposition; The algorithm is used for the real-time compensation of spectrum intensity measurement data, which make the effect of CCD photoelectrical response non-uniformity and nonlinear less; By changing the integral time magnitude, the rate of signal to noise of the spectrum signal is improved, it satisfies the requirement of real-time thin film thickness control.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131517607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Study on measurement method for projectile location based on light screen","authors":"F. Han, Qunhua Liu, Guobin Sun","doi":"10.1117/12.814594","DOIUrl":"https://doi.org/10.1117/12.814594","url":null,"abstract":"In weapon-ammunition system, firing accuracy of projectile is major characteristic parameter weighing fire effect and capability of weapon-ammunition system for target. At present, firing accuracy of projectile is obtained by measuring the two-dimensional coordinates of projectile for target. In order to measure the parameters of two-dimensional coordinates of projectile for target, a new type of measurement system is proposed. The measurement system is composed of four high sensitivity light screens (known as target) with special geometrical frame. Light source of the screens is formed by special infrared LED array. The PIN infrared photodiodes array is used as the sensors. The longest effective distance between light source and sensors is 4m. It is impossible to achieve using traditional methods. Four light screens and high-precision timers are combined in order to acquire the value of time when the projectile flies across the position of four light screens. The real-time data acquirement and processing and display of two-dimensional coordinates and the projectile velocity can be realized. The principle of measurement system and the design of high sensitivity light screen are introduced emphatically. The measurement system was verified by using five kinds of small caliber pellets. As compared with the paper target sheet, the measurement system designed can meet the demand of check-up test of gun, bullet and ammunition. The firing testing in the target field has proved that the measurement system has the advantages of simple construction, easy operation and high precision and high sensitivity.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133936740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Development of a multi-resolution measurement system based on light sectioning method","authors":"Weiguang Zhang, Hong Zhao, Xiang Zhou, Lu Zhang","doi":"10.1117/12.814618","DOIUrl":"https://doi.org/10.1117/12.814618","url":null,"abstract":"With the rapid development of shape measurement technique, multi-resolution approach becomes one of valid way to enhance the accuracy. There are, however, still some key techniques such as simultaneous calibration and data fusion of several sensors being further studied. A multi-resolution system, which use light sectioning method, is developed and has been successful in many application areas for blade of aviation engine example. It can measure the shape of blade at high speed and high accuracy. The system is composed of four laser linear light sources, four or five cameras and three highprecision mechanical movement devices. Two cameras have relatively low amplifying ratios, and focus on the basin or back of blade where the radius of curvature is large. Other cameras have high amplifying ratios, and fix on the entering or ending edge of blade where the radius of curvature is small. So the system has 3600 measurement range and can carry out multi-resolution 3-D shape measurement with greatly different amplifying ratios of cameras. One measurement process has been finished when the blade mounted on mechanical movement device move up or down one time. Also the model building and principle of the measurement system, an algorithm of calibration and data fusion of several cameras are presented that calculate 3-D coordinates of one section of blade. The result shows that the accuracy of the system is about 0.05mm for the sectional circumradius approximately 50 mm measurement range, and also proves the system is feasible and efficient.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127409408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Rao, R. Samuel, A. Ananthan, S. Dasgupta, P. Nair
{"title":"Electronics speckle interferometry applications for NDE of spacecraft structural components","authors":"M. Rao, R. Samuel, A. Ananthan, S. Dasgupta, P. Nair","doi":"10.1117/12.814580","DOIUrl":"https://doi.org/10.1117/12.814580","url":null,"abstract":"The spacecraft components viz., central cylinder, deck plates, solar panel substrates, antenna reflectors are made of aluminium/composite honeycomb sandwich construction. Detection of these defects spacecraft structural components is important to assess the integrity of the spacecraft structure. Electronic Speckle Interferometry (ESI) techniques identify the defects as anomalous regions in the interferometric fringe patterns of the specklegram while the component is suitably stressed to give rise to differential displacement/strain around the defective region. Calibration studies, different phase shifting methods associated with ESI and the development of a prototype Twin Head ESSI System (THESSIS) and its use for the NDE of a typical satellite structural component are presented.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126929810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Lu Zhang, Hong Zhao, Xiaoping Wang, Weiguang Zhang
{"title":"The study of sheath flow dark zone phenomenon in dynamic individual cells scattering measurement","authors":"Lu Zhang, Hong Zhao, Xiaoping Wang, Weiguang Zhang","doi":"10.1117/12.814604","DOIUrl":"https://doi.org/10.1117/12.814604","url":null,"abstract":"Dynamic cells scattering is one of the most efficient approaches exploring in measurements of cells size, morphology and growth states. This technique can be widely applied in real-time detection for pharmaceutical industry, food industry, liquor industry and other biological fields. A novel method named dynamic individual cells scattering measurement is designed in this paper, which can make cells pass through quartz glass measurement zone one by one with sheath flow driving force. During the experiments, an obvious phenomenon has been found which is called sheath flow dark zone phenomenon (SFDZ). Under the influence of SFDZ, sheath flow forming detection becomes very difficult. In this paper, the causes giving rise to SFDZ have been analyzed. And an improved method is put forward, in which the orifice inside the measurement zone is set as an optical system. Then the illuminating system is redesigned. In this way, almost all the illuminating light can enter orifice so that the total reflection energy decreases substantially. A comparison experiments have been done, which proves the efficiency of this redesigned optical system and its sound effects on SFDZ avoiding.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130274281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}