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Quantitative evaluation of the reliability of hybrid corrosion inspection and monitoring approaches 混合腐蚀检测与监测方法可靠性的定量评价
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-25 DOI: 10.1016/j.ndteint.2025.103527
Yifeng Zhang, Frederic Cegla
{"title":"Quantitative evaluation of the reliability of hybrid corrosion inspection and monitoring approaches","authors":"Yifeng Zhang,&nbsp;Frederic Cegla","doi":"10.1016/j.ndteint.2025.103527","DOIUrl":"10.1016/j.ndteint.2025.103527","url":null,"abstract":"<div><div>Conventional ultrasonic approaches for corrosion surveillance such as large-scale C-scans and continuous localised monitoring face inherent limitations in either temporal resolution or spatial coverage. Recent advances in sensor technology and low-cost autonomous robotics enables a hybrid approach that combine their strengths. However, critical questions remain about optimising such approaches, including determining the optimal inspection intervals, spatial coverage, and number of sensors. This study presents a multi-stage framework that addresses these challenges through integrated modelling: degradation simulation for spatiotemporal evolution of component surfaces, physics-based surrogate models for ultrasonic thickness measurements, data subsampling to replicate inspection and monitoring procedures, and reliability assessments against surveillance targets. Through Monte Carlo simulations on synthesised data calibrated to field measurements, we demonstrate the potential benefits of the hybrid strategy. Results show that strategic sensor placement and periodic repositioning can enhance reliability while reducing coverage requirements and extending inspection intervals. Importantly, this framework provides quantitative guidance for corrosion surveillance planning and can be adapted to different degradation phenomena across various asset types.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"158 ","pages":"Article 103527"},"PeriodicalIF":4.5,"publicationDate":"2025-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145048524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Synthetic beamforming and dynamic source plane wave imaging of concrete 混凝土合成波束形成与动力源平面波成像
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-25 DOI: 10.1016/j.ndteint.2025.103491
Suhaib Ul Reyaz, Surendra Beniwal
{"title":"Synthetic beamforming and dynamic source plane wave imaging of concrete","authors":"Suhaib Ul Reyaz,&nbsp;Surendra Beniwal","doi":"10.1016/j.ndteint.2025.103491","DOIUrl":"10.1016/j.ndteint.2025.103491","url":null,"abstract":"<div><div>A novel imaging algorithm using dynamic source beaming and plane wave imaging (DSPWI) is proposed for concrete inspection. Phased array data are synthetically derived from full matrix capture (FMC) data during post-processing. The method dynamically adjusts the source to investigate each pixel with a steering angle normal to its position. This minimizes incoherent energy, enhancing contrast and feature mapping. The technique is validated through simulations and experiments on concrete specimens with continuous cracks. Compared to TFM and conventional plane wave imaging, the proposed method achieved a minimum average enhancement of 44% in SNR, 120% in CNR and 10% in AC values in experiments, resulting in less noise and a more accurate reflector pattern. It accurately resolves curved reflectors that may appear fragmented in TFM images. Furthermore, volumetric imaging of a concrete slab with slanted reflectors demonstrated precise in-plan reflector mapping and reduced noise, surpassing conventional techniques in accuracy and clarity. The computation time of the method is comparable to that of TFM, which can be implemented for near-real-time array imaging.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103491"},"PeriodicalIF":4.5,"publicationDate":"2025-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144913350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nondestructive study on σ phase precipitation in duplex stainless steel using the multi-frequency electromagnetic characterization 利用多频电磁表征对双相不锈钢中σ相析出的无损研究
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-23 DOI: 10.1016/j.ndteint.2025.103533
Xi Liu , Jialong Shen , Yufeng Chen , Jianing Zhao , Shuaishuai Xiao , Siyu Liang , Zhihua Dong , Lei Zhou
{"title":"Nondestructive study on σ phase precipitation in duplex stainless steel using the multi-frequency electromagnetic characterization","authors":"Xi Liu ,&nbsp;Jialong Shen ,&nbsp;Yufeng Chen ,&nbsp;Jianing Zhao ,&nbsp;Shuaishuai Xiao ,&nbsp;Siyu Liang ,&nbsp;Zhihua Dong ,&nbsp;Lei Zhou","doi":"10.1016/j.ndteint.2025.103533","DOIUrl":"10.1016/j.ndteint.2025.103533","url":null,"abstract":"<div><div>During high-temperature processes, σ phase precipitation in duplex stainless steel (DSS) leads to the degradation of mechanical properties and corrosion resistance. Therefore, it is of great significance to measure the microstructural changes (σ phase precipitation) online during the DSS production process, as this can enable real - time monitoring and adjustment of the production process, helping to optimize product quality and performance, and ultimately reducing the risk of product failure caused by σ phase precipitation. Traditional microstructure inspecting methods suffer from destructiveness and insufficient real-time monitoring capabilities. This study proposes a non-destructive characterization method based on the multi-frequency electromagnetic technology. The correlation mechanisms of electromagnetic responses, microstructures and mechanical properties were systematically analyzed through experimental measurements and finite element modeling. The multi-frequency electromagnetic sensor can effectively distinguish specimens with different σ phase contents within a specific lift-off distance range. The low-frequency characteristic signals showing a strong correlation with microstructural states and mechanical properties. The developed macro-micro coupled model confirms that electromagnetic responses can achieve real-time mapping of microstructural changes and property degradation induced by σ phase precipitation, providing a non-destructive solution for online monitoring and quality control of σ phase precipitation in DSS during industrial production.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103533"},"PeriodicalIF":4.5,"publicationDate":"2025-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144896670","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A transfer learning approach to the prediction of porosity in additively manufactured metallic components 增材制造金属零件孔隙率预测的迁移学习方法
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-23 DOI: 10.1016/j.ndteint.2025.103531
Michail Skiadopoulos , Daniel Kifer , Parisa Shokouhi
{"title":"A transfer learning approach to the prediction of porosity in additively manufactured metallic components","authors":"Michail Skiadopoulos ,&nbsp;Daniel Kifer ,&nbsp;Parisa Shokouhi","doi":"10.1016/j.ndteint.2025.103531","DOIUrl":"10.1016/j.ndteint.2025.103531","url":null,"abstract":"<div><div>We implement a physics-informed neural network (PINN) pretrained on a synthetic dataset to quantify distributed porosity in additively manufactured AlSi10Mg components using experimental ultrasonic pulse-echo data. The proposed PINN framework directly processes raw ultrasonic data to estimate volumetric porosity and average pore size. Due to the significant data requirements of neural network (NN) models, training is initially conducted on a dataset generated through finite element simulations. Then the pretrained PINN is transferred to the experimental data after using a portion of them for retraining. The PINN integrates physics constraints based on Sayers scattering model, which relates wave speed to porosity and pore radius. Notably, the two material-dependent constants in the model are treated as learnable parameters, which converge to their true values during the training process. Results indicate that the PINN achieves superb prediction accuracy, reflected in high r2-scores and low RMSEs. Additionally, a performance evaluation study is conducted by varying training set sizes; the PINN consistently outperforms the corresponding data-driven model (without physics constraint) across all training set sizes, with its advantage becoming more pronounced as the training set size decreases. Our findings suggest that a feed-forward neural network informed by wave physics can accurately quantify the porosity and pore radius within our samples from their raw ultrasonic responses even when the amount of labelled data for training is limited.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103531"},"PeriodicalIF":4.5,"publicationDate":"2025-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144896671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Advanced real-time rail monitoring system based on directional eddy current probe 基于定向涡流探头的先进轨道实时监测系统
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-23 DOI: 10.1016/j.ndteint.2025.103532
Meirbek Mussatayev , Mohammad Ali Fakih , Mark Fitzgerald , Roger Lewis , Abay Beisenbekov , Gulsim Rysbayeva , Berik Rysbayev
{"title":"Advanced real-time rail monitoring system based on directional eddy current probe","authors":"Meirbek Mussatayev ,&nbsp;Mohammad Ali Fakih ,&nbsp;Mark Fitzgerald ,&nbsp;Roger Lewis ,&nbsp;Abay Beisenbekov ,&nbsp;Gulsim Rysbayeva ,&nbsp;Berik Rysbayev","doi":"10.1016/j.ndteint.2025.103532","DOIUrl":"10.1016/j.ndteint.2025.103532","url":null,"abstract":"<div><div>Increased train speeds and freight loads have contributed to the development of Rolling Contact Fatigue (RCF) and localized damage, such as studs and squats, at wheel-rail contact points. If left undetected, these defects can progress into shelling, where fluid penetration into fatigue cracks accelerates crack propagation and material separation or rail breaks. To address this issue and preserve rail integrity, a non-contact, high-speed, real-time directional eddy current probe for defect inspection has been developed. Initial laboratory testing of the portable prototype, conducted with studs exhibiting RCF-type defects, demonstrated successful detection at increasing speeds. The obtained eddy current results were further validated by ultrasonic testing (UT) to determine the depth profile. Finally, the signal-to-noise ratio (SNR) of the proposed system was estimated for a quantitative evaluation of inspection performance. Subsequent field tests were performed by integrating the technology with a Geismar TC Track Screwdriver on a section of R50 rail on track in the Almaty region of southern Kazakhstan. The system effectively identified spalling, indentations, and shelling defects, with a signal-to-noise ratio exceeding 4.5, showcasing its potential for reliable rail-defect inspection.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103532"},"PeriodicalIF":4.5,"publicationDate":"2025-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144913351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thickness measurement of thermal barrier coating using varactor tuned resonant probe 用变容管调谐谐振探头测量热障涂层厚度
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-21 DOI: 10.1016/j.ndteint.2025.103525
Ademola Akeem Mustapha, Omar S. Hassan, Shayma Alteneiji, Mohamed A. Abou-Khousa
{"title":"Thickness measurement of thermal barrier coating using varactor tuned resonant probe","authors":"Ademola Akeem Mustapha,&nbsp;Omar S. Hassan,&nbsp;Shayma Alteneiji,&nbsp;Mohamed A. Abou-Khousa","doi":"10.1016/j.ndteint.2025.103525","DOIUrl":"10.1016/j.ndteint.2025.103525","url":null,"abstract":"<div><div>Thermal barrier coatings (TBCs) are critical in aerospace and energy applications for protecting components from extreme temperatures. Accurate and reliable evaluation of TBC thickness is essential for ensuring the structural integrity and performance of coated components. This study introduces an innovative method for TBC thickness evaluation using a varactor-tuned resonant probe. By leveraging the probe's tunable resonant frequency and a portable reflectometer, the system offers precise single-frequency measurements without the need for bulky vector network analyzers or frequency sweeping. This innovation addresses a key limitation of previous microwave TBC thickness measurement methods, significantly enhancing their practicality and efficiency. The proposed approach demonstrates enhanced accuracy, ease of use, and potential for in-situ evaluations compared to existing non-destructive testing (NDT) methods. Experimental results validate the system's ability to achieve high accuracy in TBC thickness estimation, achieving a 95 % confidence interval of ±22.4 μm (2σ) for TBC thickness range of 100–550 μm.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103525"},"PeriodicalIF":4.5,"publicationDate":"2025-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144890271","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
In-situ non-contact monitoring of photoresist thickness and degree of cure using terahertz time-domain spectroscopy 利用太赫兹时域光谱对光刻胶厚度和固化程度进行现场非接触监测
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-20 DOI: 10.1016/j.ndteint.2025.103530
Sang-Il Kim , Hak-Sung Kim
{"title":"In-situ non-contact monitoring of photoresist thickness and degree of cure using terahertz time-domain spectroscopy","authors":"Sang-Il Kim ,&nbsp;Hak-Sung Kim","doi":"10.1016/j.ndteint.2025.103530","DOIUrl":"10.1016/j.ndteint.2025.103530","url":null,"abstract":"<div><div>In this work, a terahertz time-domain spectroscopy (THz-TDS) system was used to measure the thickness and refractive index of the photoresist during the photolithography process. The THz-TDS system was configured in a reflection mode to inspect the photoresist. The time-domain THz waves reflected from the photoresist were analyzed in the frequency-domain using a Fourier transform. The amplitude and phase information of the frequency-domain THz waves were expressed as functions of the photoresist's thickness and refractive index using Fresnel equations. Numerical analysis was used to simultaneously determine the thickness and refractive index of the photoresist. The measurements obtained by the THz-TDS system were compared with spectroscopic ellipsometry, white light reflectance spectroscopy (WLRS), and scanning electron microscopy (SEM). The thickness and degree of curing of the photoresist were monitored in real time without contact, with a final-stage thickness difference of 12.3 % and a Pearson correlation coefficient up to 0.72 between THz monitoring and conventional methods.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103530"},"PeriodicalIF":4.5,"publicationDate":"2025-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144890270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A shear horizontal wave EMAT by using encoded Halbach magnets for improving both SNR and spatial resolution and its applications in defect detection of aluminum plates 利用编码Halbach磁体提高信噪比和空间分辨率的剪切水平波EMAT及其在铝板缺陷检测中的应用
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-20 DOI: 10.1016/j.ndteint.2025.103528
Zenghua Liu , Xiaosai Wang , Xin Zhao , Yanhong Guo , Jinjie Cheng , Mengqi Su , Yiyi Liu , Cunfu He
{"title":"A shear horizontal wave EMAT by using encoded Halbach magnets for improving both SNR and spatial resolution and its applications in defect detection of aluminum plates","authors":"Zenghua Liu ,&nbsp;Xiaosai Wang ,&nbsp;Xin Zhao ,&nbsp;Yanhong Guo ,&nbsp;Jinjie Cheng ,&nbsp;Mengqi Su ,&nbsp;Yiyi Liu ,&nbsp;Cunfu He","doi":"10.1016/j.ndteint.2025.103528","DOIUrl":"10.1016/j.ndteint.2025.103528","url":null,"abstract":"<div><div>In industrial production, metal plates are widely used in various equipment and structures. Regular non-destructive testing of metal plates is essential for ensuring long-term operational safety and product quality. The electromagnetic acoustic transducer (EMAT) holds great potential due to its capability for non-contact detection, low surface roughness requirements, and ability to detect internal material defects. However, EMATs often face challenges such as low energy conversion efficiency, low signal-to-noise ratio (SNR) in echo signals, and limited spatial resolution. To address these challenges, this research proposes an encoded periodic permanent magnet shear horizontal wave EMAT (PPM SH EMAT) that incorporates pulse compression technology to simultaneously encode the excitation signal and the magnet configuration of the conventional PPM EMAT. Matched filtering and sidelobe suppression techniques are employed to enhance the SNR and spatial resolution of the transducer. Furthermore, by leveraging the magnetic field enhancement properties of Halbach array, the amplitude of defect signals is further boosted. Experimental results from defect detection of adjacent grooves in aluminum plates show that the proposed encoded Halbach shear horizontal wave EMAT demonstrates significant improvements in both SNR and spatial resolution.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103528"},"PeriodicalIF":4.5,"publicationDate":"2025-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144890266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Noncontact steel pipeline corrosion detection method with harmonic magnetic field excitation and an integrated sensor probe 采用谐波磁场激励和集成传感器探头的非接触式钢管管道腐蚀检测方法
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-18 DOI: 10.1016/j.ndteint.2025.103526
Lin Yang , Xinhua Wang , Tao Sun , Ming Sun , Junfeng Gao , Zisheng Guo , Naixiang Hu
{"title":"Noncontact steel pipeline corrosion detection method with harmonic magnetic field excitation and an integrated sensor probe","authors":"Lin Yang ,&nbsp;Xinhua Wang ,&nbsp;Tao Sun ,&nbsp;Ming Sun ,&nbsp;Junfeng Gao ,&nbsp;Zisheng Guo ,&nbsp;Naixiang Hu","doi":"10.1016/j.ndteint.2025.103526","DOIUrl":"10.1016/j.ndteint.2025.103526","url":null,"abstract":"<div><div>Rapid and reliable defect detection for concealed pipelines is critical for maintaining industrial safety. However, the lift-off distance required for detecting such pipeline defects results in diminished responses from the receiving array elements, decreasing the sensitivity of the detection and complicating defect identification and evaluation. To address this issue, a novel high-sensitivity probe that uses harmonic magnetic field excitation (HMFE) and integrated sensors consisting of a modified pickup coil and an improved tunnelling magnetoresistive (TMR) bridge (as a receiver) is used to measure magnetic fields. The HMFE technology amalgamates carrier and alternating magnetic fields, which mitigates the eddy current (EC) attenuation by modulating the magnetic permeability of steel conductors, thereby increasing the detectability of pipeline defects. The modified pickup coil has favourable stability and immunity to interference, and the improved TMR bridge circuit has high sensitivity (4.787 V/[email protected] V) and low noise density (150 pT/√Hz@1 Hz) to capture minor magnetic field variations. The receivers are arranged in a cross-shaped array, and a numerical model based on the magnetic dipole moment outputs the optimal measurement direction. A prototype probe was developed and tested for weld seam location and defect detection in single and parallel pipelines. The experimental results demonstrate that the probe has favourable sensitivity and can locate weld seams and recognize corrosion defects with a high signal-to-noise ratio of 19.82 dB at a 0.7 m lift-off distance via the output of the data fusion model.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103526"},"PeriodicalIF":4.5,"publicationDate":"2025-08-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144885366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A comparative study of principal component analysis and machine learning for semiconductor micro-defect detection using scanning acoustic microscopy 主成分分析与机器学习在扫描声学显微镜半导体微缺陷检测中的比较研究
IF 4.5 2区 材料科学
Ndt & E International Pub Date : 2025-08-16 DOI: 10.1016/j.ndteint.2025.103523
Hyeong Geun Jo , Hyun Su Kim , Sejong Ghang , Min Seok Kim , Min Ho Kim , Gi Ho Jeong , Seokkyu Lee , Kwan Kyu Park
{"title":"A comparative study of principal component analysis and machine learning for semiconductor micro-defect detection using scanning acoustic microscopy","authors":"Hyeong Geun Jo ,&nbsp;Hyun Su Kim ,&nbsp;Sejong Ghang ,&nbsp;Min Seok Kim ,&nbsp;Min Ho Kim ,&nbsp;Gi Ho Jeong ,&nbsp;Seokkyu Lee ,&nbsp;Kwan Kyu Park","doi":"10.1016/j.ndteint.2025.103523","DOIUrl":"10.1016/j.ndteint.2025.103523","url":null,"abstract":"<div><div>Accurate detection of microscopic defects in semiconductor structures is essential to ensure the reliability of next-generation electronic devices. This study presents a comparative evaluation of principal component analysis (PCA) and residual neural network (ResNet) methods for non-destructive defect detection using scanning acoustic microscopy (SAM). Artificial defects ranging from 10 μm to 500 μm were embedded in bonded silicon wafers, and ultrasonic A-scan signals were collected at multiple focal depths. Three types of input data (raw waveforms, frequency-domain signals, and merged multi-depth waveforms) were analyzed using C-mode imaging, PCA, and ResNet-based classification. PCA demonstrated stable performance across varying focal depths, especially for defects ≥20 μm, capturing dominant signal variations with minimal preprocessing. However, its sensitivity to sub-resolution defects (≤10 μm) was limited. In contrast, ResNet showed superior performance in detecting fine-scale defects under well-aligned focus conditions. However, the model performance tended to degrade under focal misalignment conditions.</div></div>","PeriodicalId":18868,"journal":{"name":"Ndt & E International","volume":"157 ","pages":"Article 103523"},"PeriodicalIF":4.5,"publicationDate":"2025-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144864837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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