Microsystem Technologies最新文献

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Predicting frequency deviation of a crystal oscillator based on long short-term memory network and transfer learning technique 基于长短期记忆网络和迁移学习技术预测晶体振荡器的频率偏差
Microsystem Technologies Pub Date : 2024-05-27 DOI: 10.1007/s00542-024-05691-2
Bo-Chen Su, Duc Huy Nguyen, Paul C.-P. Chao
{"title":"Predicting frequency deviation of a crystal oscillator based on long short-term memory network and transfer learning technique","authors":"Bo-Chen Su, Duc Huy Nguyen, Paul C.-P. Chao","doi":"10.1007/s00542-024-05691-2","DOIUrl":"https://doi.org/10.1007/s00542-024-05691-2","url":null,"abstract":"<p>Crystal oscillators are fundamental to an extensive range of electronic systems, spanning computers, mobile phones, and automotive electronics. Their significance is accentuated in high-precision applications such as global positioning systems (GPS) and aerospace systems where the frequency-temperature characteristics and thermal hysteresis phenomena are of paramount importance. This study introduces a groundbreaking approach for predicting frequency deviations arising from thermal hysteresis using Long Short-Term Memory (LSTM) networks. Contrary to prior research which predominantly utilized cubic functions to model frequency-temperature characteristics and frequently overlooked thermal hysteresis, this investigation distinguishes itself by leveraging LSTM. The proposed methodology is aptly designed to model both time-dependent and temperature-dependent variations, consequently offering a heightened precision in predicting frequency deviations. By integrating transfer learning techniques, the model's adaptability to diverse databases is augmented, broadening its utility. Experimental evaluations with real-world data underscore the preeminence of the introduced method, registering a root mean square error (RMSE) of less than 0.05 ppm, more favorable than that by the traditional cubic functions and all the prior arts.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"47 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141167478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of micropump with piezoelectric actuators 设计带压电致动器的微型泵
Microsystem Technologies Pub Date : 2024-05-25 DOI: 10.1007/s00542-024-05682-3
Girija Sravani Kondavitee, Ramakrishna Desala
{"title":"Design of micropump with piezoelectric actuators","authors":"Girija Sravani Kondavitee, Ramakrishna Desala","doi":"10.1007/s00542-024-05682-3","DOIUrl":"https://doi.org/10.1007/s00542-024-05682-3","url":null,"abstract":"<p>This paper focuses on the design of a micropump specifically tailored for drug delivery applications. The micropump is an essential component in microfluidics systems that require precise handling of small volumes of fluids. Its main objective is to achieve a high flow rate while operating at a low voltage of 90 V<sub>P-P</sub>. To meet this goal, the micropump utilizes two stacked ring-type piezoelectric actuators (SPZT). The adoption of the ring-type actuators offers several advantages. Firstly, it reduces the contact area between the actuator and the membrane, minimizing the need for gluing. This enhances the overall reliability and robustness of the micropump. Additionally, the stacked configuration of the actuators allows for greater strain generation at lower applied voltages. This leads to improved performance and efficiency of the micropump. The paper includes a comprehensive study of membrane displacement by varying the inner radius of the ring-type SPZT actuator. This parametric analysis is conducted using finite element method (FEM) numerical analysis, providing insights into the optimal design parameters for achieving the desired flow rate. Through the proposed design and analysis, the micropump demonstrates a flow rate of 800 μl/min, making it suitable for drug delivery applications. The findings of this study contribute to the advancement of micropump technology and its potential use in various fields, including healthcare systems, microelectronic cooling devices, and more. Overall, this paper presents a detailed investigation into the design, performance, and optimization of a micropump specifically tailored for drug delivery applications. The utilization of stacked ring-type SPZT actuators and the achieved high flow rate highlight the potential of this micropump design in enhancing the efficiency and effectiveness of drug delivery systems.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"56 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141149222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A framework for leaf disease analysis and estimation using MAML with DeepLabV3 利用 MAML 和 DeepLabV3 进行叶片病害分析和估计的框架
Microsystem Technologies Pub Date : 2024-05-24 DOI: 10.1007/s00542-024-05686-z
Arunangshu Pal, Vinay Kumar, Khondekar Lutful Hassan, Binod Kumar Singh
{"title":"A framework for leaf disease analysis and estimation using MAML with DeepLabV3","authors":"Arunangshu Pal, Vinay Kumar, Khondekar Lutful Hassan, Binod Kumar Singh","doi":"10.1007/s00542-024-05686-z","DOIUrl":"https://doi.org/10.1007/s00542-024-05686-z","url":null,"abstract":"<p>In the dynamic field of agriculture, the prompt and accurate identification of plant diseases plays a crucial role in ensuring strong crop yields. To address this need, we present an innovative framework that combines Model Agnostic Meta-Learning (MAML) with DeepLabV3 to identify plant diseases precisely and assess their severity. Deep Plant Guard utilizes the outstanding segmentation capabilities of DeepLabV3 to pinpoint areas of diseased plants while simultaneously determining the specific type of disease and its severity level. The framework is enhanced by Bayesian task augmentation-MAML with multi-scale spatial attention, allowing for swift fine-tuning even with limited data. During training, a composite loss function harmonizes segmentation and classification efforts. Following meta-training excels in adapting to new tasks, providing detailed segmentation masks, and offering valuable insights into disease type and severity. Evaluation results, based on datasets such as Plant Village, Plant Doc, and a newly introduced plant disease dataset, showcase impressive results, including a 99.1% accuracy rate, 99.5% sensitivity, and 98.7% specificity. These results highlight the framework's effectiveness in addressing disease types and severity assessments.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"22 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141149206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication and characterization of controllable micro wavy pattern on cylindrical surface using ultra-precision diamond turning system 利用超精密金刚石车削系统制作圆柱表面可控微波浪形图案并确定其特性
Microsystem Technologies Pub Date : 2024-05-24 DOI: 10.1007/s00542-024-05626-x
Ji-Young Jeong, Dong-Hyun Seo, Eun-Ji Gwak, Doo-Sun Choi, J. Han, T. Je
{"title":"Fabrication and characterization of controllable micro wavy pattern on cylindrical surface using ultra-precision diamond turning system","authors":"Ji-Young Jeong, Dong-Hyun Seo, Eun-Ji Gwak, Doo-Sun Choi, J. Han, T. Je","doi":"10.1007/s00542-024-05626-x","DOIUrl":"https://doi.org/10.1007/s00542-024-05626-x","url":null,"abstract":"","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"2 9","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141099397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and analysis of photo-electrical characteristics of graphene/Si-nanowire photo-detector: a potential photo-detector for applications in IR detection 石墨烯/硅纳米线光电探测器的光电特性设计与分析:一种可应用于红外探测的光电探测器
Microsystem Technologies Pub Date : 2024-05-24 DOI: 10.1007/s00542-024-05687-y
Saunak Bhattacharya, A. Kundu, Shajith D. Nair, Anna Chakraborty, Angsuman Sarkar, Moumita Mukherjee
{"title":"Design and analysis of photo-electrical characteristics of graphene/Si-nanowire photo-detector: a potential photo-detector for applications in IR detection","authors":"Saunak Bhattacharya, A. Kundu, Shajith D. Nair, Anna Chakraborty, Angsuman Sarkar, Moumita Mukherjee","doi":"10.1007/s00542-024-05687-y","DOIUrl":"https://doi.org/10.1007/s00542-024-05687-y","url":null,"abstract":"","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"2 9","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141101036","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preface of ESDA2022 ESDA2022 前言
Microsystem Technologies Pub Date : 2024-05-24 DOI: 10.1007/s00542-024-05695-y
P. Sadhu, P. Mondal, Dulal Acharjee
{"title":"Preface of ESDA2022","authors":"P. Sadhu, P. Mondal, Dulal Acharjee","doi":"10.1007/s00542-024-05695-y","DOIUrl":"https://doi.org/10.1007/s00542-024-05695-y","url":null,"abstract":"","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"12 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141100063","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and fabrication of a novel microswitch made in LTCC-PDMS technology applicable to micro total analysis systems 设计和制造适用于微型总体分析系统的 LTCC-PDMS 技术新型微开关
Microsystem Technologies Pub Date : 2024-05-23 DOI: 10.1007/s00542-024-05660-9
Reinaldo Lucas dos Santos Rosa, Pierre Andre Barroca, A. Seabra
{"title":"Design and fabrication of a novel microswitch made in LTCC-PDMS technology applicable to micro total analysis systems","authors":"Reinaldo Lucas dos Santos Rosa, Pierre Andre Barroca, A. Seabra","doi":"10.1007/s00542-024-05660-9","DOIUrl":"https://doi.org/10.1007/s00542-024-05660-9","url":null,"abstract":"","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"102 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141106002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and analysis of novel MEMS cantilever biosensor with special focus on SCR for tuberculosis detection 设计和分析新型 MEMS 悬臂生物传感器,特别关注用于肺结核检测的 SCR
Microsystem Technologies Pub Date : 2024-05-22 DOI: 10.1007/s00542-024-05689-w
Laipang Brahma, Koushik Guha, S. Karumuri
{"title":"Design and analysis of novel MEMS cantilever biosensor with special focus on SCR for tuberculosis detection","authors":"Laipang Brahma, Koushik Guha, S. Karumuri","doi":"10.1007/s00542-024-05689-w","DOIUrl":"https://doi.org/10.1007/s00542-024-05689-w","url":null,"abstract":"","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"63 10","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141111305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators 利用柔性膜和电磁致动器设计 2-DOF 扫描镜
Microsystem Technologies Pub Date : 2024-05-20 DOI: 10.1007/s00542-024-05693-0
Shuaiby Mohamed, Ejaz Ahmad, Youngwoo Im, Wan-Chin Kim, Youngshik Kim, B. Shin
{"title":"Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators","authors":"Shuaiby Mohamed, Ejaz Ahmad, Youngwoo Im, Wan-Chin Kim, Youngshik Kim, B. Shin","doi":"10.1007/s00542-024-05693-0","DOIUrl":"https://doi.org/10.1007/s00542-024-05693-0","url":null,"abstract":"","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"2 14","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141120491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impact of ambient temperature on CombFET for sub-5-nm technology nodes: An RF performance perspective 环境温度对 5 纳米以下技术节点 CombFET 的影响:射频性能视角
Microsystem Technologies Pub Date : 2024-05-18 DOI: 10.1007/s00542-024-05692-1
P. S. T. N. Srinivas, N. Aruna Kumari, Arun Kumar, P. K. Tiwari, K. Girija Sravani
{"title":"Impact of ambient temperature on CombFET for sub-5-nm technology nodes: An RF performance perspective","authors":"P. S. T. N. Srinivas, N. Aruna Kumari, Arun Kumar, P. K. Tiwari, K. Girija Sravani","doi":"10.1007/s00542-024-05692-1","DOIUrl":"https://doi.org/10.1007/s00542-024-05692-1","url":null,"abstract":"<p>This paper explores the impact of ambient temperature on the RF performance parameters of CombFET device. The CombFET has been considered one of the most realistic alternatives for investigating high frequency applications at sub-10-nm technology nodes. CombFET offers a higher drive current than existing gate-all-around (GAA) nanosheet FET (NSFET) under the same footprint. By taking into account the temperature range of military applications (280 to 400 K), the effect of ambient temperature on the device’s electrical performance is addressed. Further, the RF performance of the device is demonstrated at various ambient temperatures as well as various crucial metrics like transconductance (g<sub>m</sub>), TGF, h<sub>21</sub>, <i>f</i><sub>T,</sub> and TFP are analyzed. Moreover, the zero temperature coefficient (ZTC) operating points are identified from the well calibrated simulation results. The ZTC drain drive current is observed at a gate biasing of 0.77 V, for an applied drain biasing (<i>V</i><sub>DS</sub>) of 1 V. The observed drain drive current for different ambient temperatures is observed to be 28μA (<i>V</i><sub>DS</sub> = 1 V). Also, at the ZTC point, the observed g<sub>m</sub> value is 0.094mS (<i>V</i><sub>DS</sub> = 1 V). These findings will therefore provide performance insights into the CombFET device's response to thermal changes.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"20 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141062693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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