Shuaiby Mohamed, Ejaz Ahmad, Youngwoo Im, Wan-Chin Kim, Youngshik Kim, B. Shin
{"title":"Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators","authors":"Shuaiby Mohamed, Ejaz Ahmad, Youngwoo Im, Wan-Chin Kim, Youngshik Kim, B. Shin","doi":"10.1007/s00542-024-05693-0","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"2 14","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystem Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s00542-024-05693-0","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}