Microsystem Technologies最新文献

{"title":"Effect of the initial viscosity and substrate corner geometry on edge beading of photoresist films","authors":"David E. Weidner, Soroosh Mahmoodi","doi":"10.1007/s00542-024-05770-4","DOIUrl":"https://doi.org/10.1007/s00542-024-05770-4","url":null,"abstract":"<p>This paper explores the effect of viscosity and corner geometry on the width of the edge bead region for axisymmetric substrates. Specifically we model the edge of the substrate as a part of a circle with different subtended angles and various radii, in combination with straight segments of given length. We employ the physiochemical properties of a typical SU-8 3000 photoresist with different concentrations of solvent, and therefor a large range of initial viscosities. Using the lubrication approximations, we derive the governing equations for a photoresist on such a substrate that includes rotation in the initial phase and the evaporation of solvent in the drying stage, with a subsequent increase in viscosity. The resulting equations are solved numerically using an efficient implicit finite difference algorithm. The results indicate that high initial viscosities lead to a more uniform film thickness near the edge of the substrate, but require a significantly greater rotation time. Larger corner radii reduce edge beading, but require a larger substrate, and consequently the absolute width of the bead region is actually larger for higher values of the corner radius. Using a substrate with a chamfered corner region can reduce edge beading on the horizontal region of the substrate. However, this leads to a larger substrate and consequently the width of the region affected by edge beading is actually greater. Consequently we conclude that a corner region with a small radius of curvature may produce the smallest edge bead width in industrial applications.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"12 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142265885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An investigation on static, vibration and stability analyses of elastically restrained FG porous Timoshenko nanobeams","authors":"Büşra Uzun, Mustafa Özgür Yaylı, Ömer Civalek","doi":"10.1007/s00542-024-05753-5","DOIUrl":"https://doi.org/10.1007/s00542-024-05753-5","url":null,"abstract":"<p>This manuscript develops for the first time a combined mathematical procedure of the static, dynamical and stability responses of functionally graded porous Timoshenko nanobeam using a higher-order elasticity theory. Fourier sine and cosine series with Stokes’ transformation is used to transform ordinary differential equations into a system of algebraic equations for buckling and dynamic responses. In the buckling, vibration and static problems, Fourier cosine and sine series are used in the region, while fixed constants are selected at the boundaries and modelled separately. By discretizing the constant values at the boundaries, eigenvalue problems independent of the supporting conditions are established. The validity of the presented model is assessed through comparison with available results calculated from rigid boundary conditions by giving proper values to elastic springs. Parametric studies are performed to research the effects of the different parameters on the functionally graded porous Timoshenko nanobeams.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"50 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142265886","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Flexible capacitive humidity sensor based on potassium ion-doped PVA/CAB double-layer sensing film","authors":"Yonghua Zhang, Ling Kang, Songping Yao, Sreejith Karthikeyan, Chaolun Wang, Jian Zhang","doi":"10.1007/s00542-024-05761-5","DOIUrl":"https://doi.org/10.1007/s00542-024-05761-5","url":null,"abstract":"<p>Humidity measurement plays an essential role in industrial and agricultural production, meteorological monitoring, medical services, and people’s comfortable life. Polymer materials-based humidity sensors have gained much research focus due to the good dielectric properties and the compatibility with a variety of coating and pattern processes of polymer materials. In this paper, for the first time, a flexible capacitive humidity sensor is presented based on doped polyvinyl alcohol (PVA)/ cellulose acetate butyrate (CAB) double-layer sensing film and polyimide (PI) substrate. Potassium ions (K⁺) are introduced into PVA for high effective capacitance, and CAB is used as protective film for preventing the hydrolysis of the doped PVA layer in high humidity environment. The fabricated novel sensor with a size of 20 × 20mm² has a capacitance of 61.84pF at 10% relative humidity (% RH) and 188.42pF at 90% RH. The average sensitivity is 1.414 pF/% RH. The maximum humidity hysteresis is about 5.83% RH at 50% RH. The response and recovery times from room humidity to 75% RH were likewise measured to be 78.71s and 6.19s, respectively. In addition, the long-time measurements for 7 days and bending tests for 5000 cycles demonstrated a good long-time humidity detecting stability and high mechanical flexibility for the capacitive humidity sensor based on potassium ion-doped PVA/CAB double-layer sensing film.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"99 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142265887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Modelling and optimization of compound lever-based displacement amplifier in a MEMS accelerometer","authors":"Nikul Jani, Rakesh Tirupathi, P. Krishna Menon, Ashok Kumar Pandey","doi":"10.1007/s00542-024-05757-1","DOIUrl":"https://doi.org/10.1007/s00542-024-05757-1","url":null,"abstract":"<p>Compliant mechanisms have been realized as a potential tool to enhance the sensitivity of MEMS accelerometers through displacement amplification. In this article, optimization of a compound lever-based compliant mechanism has been carried out for the inclusion in MEMS accelerometer. The compliant displacement amplifier has been studied using the pseudo-rigid body approach and expressions for the displacement and fundamental natural frequency have been derived for the MEMS accelerometer. Further, for a range of values of the selected parameters, a detailed comparison has been made between the outcomes of the considered pseudo-rigid body-based approach and FEA simulations. Based on the derived mathematical model, optimization has been carried out for the best performance of the MEMS accelerometer. Using switched capacitor-based signal conditioning, output voltage has been calculated for the given input signal. Performance of displacement amplifier based MEMS accelerometer has been compared with the conventional one for sensitivity and nonlinearity. In this work, using a comparatively smaller size of proof mass, the higher figure of merits has been achieved in terms of natural frequency and amplified displacement of sense comb fingers.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"26 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142184167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research on SMA motor modelling and control algorithm for optical image stabilization","authors":"Chen Li, Yingmin Qu, Zhengxun Song, Xinliang Liu, Weiwen Liu","doi":"10.1007/s00542-024-05768-y","DOIUrl":"https://doi.org/10.1007/s00542-024-05768-y","url":null,"abstract":"&lt;p&gt;Cameras play an increasingly important role in mobile devices and intelligent systems. With the development of technology, the resolution of the camera continues to improve and the images become much clearer. However, image quality is easily affected by lens shake. Optical stabilization technology improves the shooting stability as well as image quality of mobile devices by overcoming image blur which is caused by lens shake. In the current camera modules of smart devices, the voice coil motor (VCM) drives the lens movement. However, the traditional VCMs contain permanent magnets, thus generating stray magnetic fields and affecting the quality of captured images. Compared with VCM technology, shape memory alloy (SMA) motors driven by shape memory alloys have the advantages, such as lighter weight, higher accuracy, greater thrust, and lower energy consumption. But there are still some issues with the current SMA motors. To begin with, there is a control problem of SMA wire, and the current control algorithms are difficult to achieve high-precision control of SMA wire. What’s more, the strain range of SMA wires used in current SMA motors is limited, so their application in certain fields are restricted. A SMA motor with a larger shrinkage of SMA wire was designed, which could be used in larger lenses and whose application range was extended. Given the hysteresis effect of SMA, a Hammerstein-like model was established to describe the dynamic hysteresis characteristics of SMA. The Prandtl Ishlinskii model was used to describe the static hysteresis model of SMA, and the Nonlinear AutoRegressive network with eXogenous inputs (NARX) model was used to describe the dynamic model of SMA and predict its properties. A composite control scheme based on inverse compensation was designed to eliminate the dynamic hysteresis phenomenon of SMA, using the PI inverse model as the feed-forward controller and BP-FOPID as the feedback controller. In a gesture to address the problem of multiple fractional-order PID parameters and the difficulty of parameter tuning, the BP neural network and fractional-order PID controller were combined, and the BP neural network was used to rectify the five parameters of the fractional-order PID, which makes up the BP-FOPID. The performance and stability of the SMA motor control system were improved by integrating the feed-forward and feedback control strategy. And in the final experiment, the SMA motor experimental setup designed, the experimental platform built, the composite controller used to achieve the precise control of the SMA motor, the precise control of the SMA wire could be realized by controlling the duty cycle of the PWM wave, so that the SMA motor could effectively reduce the lens shake and improve the clarity and stability of the image. Through studying the structure and control method of the SMA motor, an SMA motor is designed and a corresponding control scheme is formulated, which makes the motor have a good anti-sh","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"17 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142184165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A new mixed order reduction method using bonobo optimizer and stability equation","authors":"Priyajit Dash, M. L. Meena, Girish Parmar, Afzal Sikander","doi":"10.1007/s00542-024-05767-z","DOIUrl":"https://doi.org/10.1007/s00542-024-05767-z","url":null,"abstract":"<p>This paper proposes a mixed method of Order Reduction of High Order System (HOS) for both Multi-Input and Multi-Output (MIMO) and Single Input and Single Output (SISO) systems. The combination of a Conventional method of Order Reduction using the Stability Equation Method (SEM) and an optimization-based Order Reduction method using the Bonobo Optimizer Algorithm (BOA) have been utilized. Since an Order Reduction with the least amount of error is always preferred, Integral Square Error (ISE) has been taken into consideration as an Objective Function in this study. The Reduced Order Model (ROM) uses BOA to calculate the numerator coefficients and SEM to estimate the denominator coefficients. A comparison has been made between several performance indices using the well-known previous existing methods and the Proposed mixed method. Step response and Frequency response of the Proposed mixed method and existing methods comparison have been also made. It can be visible from the result that the proposed mixed method outperforms with Prior existing methods.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"24 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142184198","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Biologically inspired tonic and bursting LIF neuron model for spiking neural network: a CMOS implementation","authors":"M. A. Seenivasan, Adarsh V. Parekkattil, Rekib Uddin Ahmed, Prabir Saha","doi":"10.1007/s00542-024-05755-3","DOIUrl":"https://doi.org/10.1007/s00542-024-05755-3","url":null,"abstract":"<p>The human brain has been encompassed by neurons and synapses, where the signal is propagated as a spike. This perception seeks to create hardware systems called neural cores that are comprised of artificial bio-neurons and synapses; these systems resemble the brain’s functions and emulate the different spiking patterns to operate the neuromorphic processors. Through this motivation, the paper presents a low-power Schmitt trigger-based Leaky Integrate and Fire (LIF) neuron model that offers significantly less energy per spike and showcases the dynamic spike frequency and refractory periods that are regulated by the membrane and reset capacitance in addition to refractory circuitry. The incorporation of a hysteresis comparator, e.g., the Schmitt trigger, enhances noise immunity and facilitates dynamic threshold adjustments, enabling faster switching and reducing energy consumption. The neuron models are simulated in Cadence Virtuoso GPDK 45 nm Technology to obtain dynamic tonic and burst spiking patterns; subsequently, the significantly smaller spike pulse width of the proposed model is measured from the dynamic pattern as 1<i>.</i>867<i> ns</i>, and the refractory period is measured as 0<i>.</i>2<i> ns</i> respectively. This proposed model consumes less energy, 524<i>.</i>415<i>aJ</i> per spike, under the 1 V power supply and 1 ms step pulse. Typically, the spike pulses have different shapes and magnitudes based on the functions of membrane potential, which are applicable to realize the spiking behavior of SNNs.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"67 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142184166","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"DFT study of MoSe2 monolayers for cohesive adsorption of harmful gases CO, CO2, SO2, and NF3","authors":"Suman Sarkar, Papiya Debnath, Debashis De, Manash Chanda","doi":"10.1007/s00542-024-05759-z","DOIUrl":"https://doi.org/10.1007/s00542-024-05759-z","url":null,"abstract":"<p>According to the World Health Organization, contact with atmospheric airborne pollutants (CO, CO₂, SO₂, and NF₃) causes 4.2 million deaths annually. Globally, there is a well-established demand for highly sensitive, inexpensive, tiny, and energy-efficient gas sensors that are able to recognize and steer clear of high pollution hotspots. Density functional theory (DFT) is utilized to analyze the electronic properties of CO, CO₂, SO₂, and NF₃ gases in the MoSe₂ monolayer for gas sensing mechanism. On MoSe₂, calculations and discussions are made on the adsorption energies and configurations that are most stable. A detailed analysis is conducted on the adsorption distance (<i>d</i> (Å)), charge transfer (<i>Q</i>_<i>T</i>), adsorption energy (<i>E</i>_<i>ads</i>), band gap (<i>E</i>_<i>g</i>), density of states (DOS), electron difference density (EDD), and Recovery time <span>(left( tau right))</span>. The outcomes attained demonstrate that the adsorption of CO, CO₂, SO₂, and NF₃ gases significantly alters the electrical characteristics as well as the adsorption of MoSe₂ monolayer. However, in comparison to CO, CO₂, and SO₂, the MoSe₂ monolayer system shows larger adsorption energy towards NF₃ and a higher sensitivity. The transport characteristics employing the non-equilibrium Green's function (NEGF) method validate the efficiency of the MoSe₂ monolayer in terms of considerable current–voltage (I–V) response for enhanced CO, CO₂, SO_2, and NF₃ gas sensing. Compared to CO, CO₂, and SO₂, MoSe₂ has a much higher sensitivity to NF₃.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"10 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142184199","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigating flow induced mechanics of strain-engineered microcantilevers integrated in a flow-through system","authors":"Mohammad Shafquatul Islam, Sushmita Challa, Danming Wei, Jasmin Beharic, Dan O. Popa, Cindy K. Harnett","doi":"10.1007/s00542-024-05754-4","DOIUrl":"https://doi.org/10.1007/s00542-024-05754-4","url":null,"abstract":"<p>In this work we report the fabrication of stress-driven curled-up microcantilevers based on a metal-oxide bilayer design and their mechanical characterization in a flow-through system. Microcantilever arrays are realized by using conventional micromachining techniques involving optical lithography and etching processes. Due to the geometry of the out-of-plane curled cantilever, the load applied by the fluid flow is distributed along its body. These cantilevers demonstrated mechanical robustness at flow velocities of 0.48–5.7 mm/s and drag forces of 0.35–4.23 µN when tested with glycerol. This fluid-driven approach enables us to measure multiple structures at once and get statistics on their mechanical performance, durability, and applicability in different devices.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"1486 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142184201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An extensive analysis of source engineered tunnel FET for low power biosensing application","authors":"Avtar Singh, Arzoo Shakya, Adarsh Kumar Mishra, Amandeep Kaur","doi":"10.1007/s00542-024-05760-6","DOIUrl":"https://doi.org/10.1007/s00542-024-05760-6","url":null,"abstract":"<p>In this work, the source-engineered tunnel field effect transistor is studied and optimized for low-power applications. To achieve this, a double-gate TFET structure is employed with extended-source. Further, the gate on source underlap (DG-TFET-ES_UDL) and gate on source overlap (DG-TFET-ES_OVL) are analyzed, but to decrease the ambipolar current, a dielectric pocket near the channel and drain junction is assessed. To observe the electrical characteristics of the proposed device, the drain current versus gate voltage characteristic (transfer characteristic), energy band diagram, which provides valuable information about the charge distribution and energy levels within the device, subthreshold slope, electric field, and other parameters of the source engineered TFET with different device level techniques are explored. Furthermore, the tunneling device is utilized as a FET-based dielectric-modulated biosensor to understand the behaviour of the device when exposed to different biomolecules in a low-power scenario. Moreover, the study investigates the variation in drain current in response to changes in the dielectric constant of the biomolecules. This analysis helps in understanding the sensitivity of the device to different biomolecules and provides insights into its potential applications in biosensing. Silvaco Atlas TCAD, a widely used simulation tool, is employed to conduct comprehensive simulations.</p>","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"11 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142184202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}