Design of micropump with piezoelectric actuators

Abstract

This paper focuses on the design of a micropump specifically tailored for drug delivery applications. The micropump is an essential component in microfluidics systems that require precise handling of small volumes of fluids. Its main objective is to achieve a high flow rate while operating at a low voltage of 90 V_P-P. To meet this goal, the micropump utilizes two stacked ring-type piezoelectric actuators (SPZT). The adoption of the ring-type actuators offers several advantages. Firstly, it reduces the contact area between the actuator and the membrane, minimizing the need for gluing. This enhances the overall reliability and robustness of the micropump. Additionally, the stacked configuration of the actuators allows for greater strain generation at lower applied voltages. This leads to improved performance and efficiency of the micropump. The paper includes a comprehensive study of membrane displacement by varying the inner radius of the ring-type SPZT actuator. This parametric analysis is conducted using finite element method (FEM) numerical analysis, providing insights into the optimal design parameters for achieving the desired flow rate. Through the proposed design and analysis, the micropump demonstrates a flow rate of 800 μl/min, making it suitable for drug delivery applications. The findings of this study contribute to the advancement of micropump technology and its potential use in various fields, including healthcare systems, microelectronic cooling devices, and more. Overall, this paper presents a detailed investigation into the design, performance, and optimization of a micropump specifically tailored for drug delivery applications. The utilization of stacked ring-type SPZT actuators and the achieved high flow rate highlight the potential of this micropump design in enhancing the efficiency and effectiveness of drug delivery systems.