2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)最新文献_第6页

A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation 一种0.5MHz模式匹配的俯仰或滚转环陀螺仪，带有纳米间隙倾斜电极，用于正交抵消

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994104

H. Wen, A. Daruwalla, F. Ayazi

{"title":"A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation","authors":"H. Wen, A. Daruwalla, F. Ayazi","doi":"10.1109/TRANSDUCERS.2017.7994104","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994104","url":null,"abstract":"This paper presents, for the first time, the effective quadrature cancellation in a high-frequency pitch or roll bulk acoustic wave (BAW) gyroscope to enable perfect mode-matching for sensitivity improvement and noise reduction. The presented gyroscope has a high operation frequency of 0.5MHz and high translational stiffness for shock and vibration robustness. Quadrature cancellation, which is the biggest challenge in high-performance pitch or roll gyroscopes, is achieved by incorporating nano-gap slanted electrodes through the new HARPSS+ fabrication process, which combines anisotropic wet-etching of silicon with conventional DRIE-based HARPSS process. The HARPSS+ process enables precision capacitive transduction and tuning in all desired orientations, providing tuning coverage over typical process corners and significantly improving the yield of pitch or roll gyroscopes. Quadrature cancellation is verified on fabricated devices, allowing a perfectly mode-matched operation with a scale factor of 95.2pA/(°/s) and an open-loop bandwidth of 15Hz. The HARPS S+ process also enables simultaneous fabrication of single-chip tri-axial BAW gyroscopes: high-frequency (0.5–5MHz) gyroscopic modes with high quality factors (10,000s–100,000s) are measured on both yaw and pitch/roll BAW gyroscopes on the same wafer.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126092282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7

A high FoM lithium niobate resonant transformer for passive voltage amplification 一种用于无源电压放大的高FoM铌酸锂谐振变压器

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994169

T. Manzaneque, Ruochen Lu, Yansong Yang, S. Gong

引用次数: 20

Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven 外延封装谐振加速度计与片上微型烤箱

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994119

D. D. Shin, Yunhan Chen, I. Flader, T. Kenny

引用次数: 20

Resistive pressure sensors integrated with a coriolis mass flow sensor 电阻式压力传感器集成了科里奥利质量流量传感器

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994261

D. Alveringh, T. Schut, R. Wiegerink, W. Sparreboom, J. C. Lotters

引用次数: 10

Photo-tunable molecular recognizing smart material for gas sensing 用于气体传感的光可调分子识别智能材料

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994313

Keigo Nakanishi, F. Sassa, K. Hayashi

引用次数: 1

Toward the analysis of mitochondria isolated from leukemic cells with electrochemically instrumented microwell arrays 用电化学仪器微孔阵列分析白血病细胞线粒体

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994374

G. Lemercier, F. Sekli-Belaïdi, V. Vajrala, E. Descamps, N. Sojic, S. Arbault, J. Sarry, P. Temple-Boyer, J. Launay

引用次数: 1

High-density CMOS neural probe implementing a hierarchical addressing scheme for 1600 recording sites and 32 output channels 高密度CMOS神经探针实现了1600个记录点和32个输出通道的分层寻址方案

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7993977

A. S. Herbawi, L. Kiessner, O. Paul, P. Ruther

{"title":"High-density CMOS neural probe implementing a hierarchical addressing scheme for 1600 recording sites and 32 output channels","authors":"A. S. Herbawi, L. Kiessner, O. Paul, P. Ruther","doi":"10.1109/TRANSDUCERS.2017.7993977","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993977","url":null,"abstract":"This paper presents the design, fabrication and characterization of CMOS-based neural probes with a densely-packed electrode array. A hierarchical addressing scheme is implemented in the system which allows to integrate up to 1600 recording sites (17×17 μm2) arranged in 50 blocks of 32 electrodes each along a 100-μm-wide and 10-mm-long probe shaft. The electrodes within each block have a vertical and horizontal pitch of 20 μm resulting in an electrode-to-electrode separation of 3 μm. Single recording sites as well as combinations of 2×2 adjacent electrodes forming a virtually larger recording site of reduced impedance can be read out via 32 parallel analog output channels. The system was designed and fabricated in a 0.18 μm CMOS technology followed by an in-house post-CMOS process used to realize the electrode metallization and define the probe geometry. System functionality for electrode selection was verified by activating individual blocks along the shaft and switching recording sites to specific output channels. Impedance characterization of the electrodes revealed absolute values of 2.2±0.3 MΩ and 550±50 kΩ at 1 kHz for individual Pt electrodes and 2×2 electrode combinations, respectively.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129696262","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 13

A minimally invasive in vivo electroporation method utilizing flexile electrode and microneedle roller 一种利用柔性电极和微针滚轮的微创体内电穿孔方法

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994389

D. Huang, Deyao Zhao, Jinhui Li, Lili Du, Zewen Wei, Zicai Liang, Zhihong Li

引用次数: 6

In-situ, real-time monitoring of nutrient uptake on plant chip integrated with nutrient sensor 在植物芯片上集成养分传感器，实时监测养分吸收

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994045

Huawei Jiang, Md. Azahar Ali, Yueyi Jiao, Bing Yang, Liang Dong

引用次数: 17

Cantilever array for measuring traction forces of cells in a confined space 用于测量密闭空间中细胞牵引力的悬臂阵列

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI: 10.1109/TRANSDUCERS.2017.7994020

K. H. Shoji, Kenei Matsudaira, T. Tsukagoshi, Thanh-Vinh Nguyen, K. Noda, I. Shimoyama

引用次数: 0