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Journal of The Vacuum Society of Japan最新文献

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“Review on New Developments of Ultrahigh Vacuum Technology” by Nagamitsu Yoshimura “超高真空技术新发展综述”，作者Nagamitsu Yoshimura
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.412
K. Nakayama
{"title":"“Review on New Developments of Ultrahigh Vacuum Technology” by Nagamitsu Yoshimura","authors":"K. Nakayama","doi":"10.3131/JVSJ2.60.412","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.412","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"65 1","pages":"412-413"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76858954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
International Vacuum Congress (IVC-20)の会議報告 真空科学技術(VST)/Pohang Accelerator Laboratory 見学 International Vacuum Congress (IVC-20)の会议报告 真空科学技术(VST)/Pohang Accelerator Laboratory 见学
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.27
将博 山本
{"title":"International Vacuum Congress (IVC-20)の会議報告 真空科学技術(VST)/Pohang Accelerator Laboratory 見学","authors":"将博 山本","doi":"10.3131/JVSJ2.60.27","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.27","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"98 1","pages":"27-28"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77234025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spin-Polarized STM Overview and Issues for Next Developments 自旋极化STM概述和下一步发展的问题
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/jvsj2.60.159
T. Yamada
{"title":"Spin-Polarized STM Overview and Issues for Next Developments","authors":"T. Yamada","doi":"10.3131/jvsj2.60.159","DOIUrl":"https://doi.org/10.3131/jvsj2.60.159","url":null,"abstract":"Spinpolarized STM (SPSTM) is a powerful tool to visualize sample spinpolarization vectors at an atomic scale. A di‹culty of SPSTM measurement is how to fabricate a tip with a stable spinpolarization vector. In 1990's, ˆrst, many eŠorts were payed for a GaAs tip with optically pumping, but ˆnally the GaAs tip did not detect sample spin polarization due to quenching of the spinpolarization at the GaAs tip apex. However, in 2000, a W tip coated by a magnetic thin ˆlm detected the spinpolarized tunneling current, and spin polarization images of magnetic atoms were successfully obtained. In 2016, more than 15 groups in the world can perform SP STM measurements. History and issues for further development of SPSTM measurements are discussed.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"111 1","pages":"159-164"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79295359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
水晶振動子プリアンプの恒温化と圧力センサ出力の安定性との相関;水晶振動子プリアンプの恒温化と圧力センサ出力の安定性との相関;Correlation between Constant Temperature at the Preamp for a Quartz Oscillator and Stability of Pressure Sensor Output Using a Quartz Oscillator 晶振前置放大器的恒温化与压力传感器输出的稳定性的关系;晶振前置放大器的恒温化与压力传感器输出的稳定性的关系;Correlation between Constant Temperature at the Preamp for a Quartz Oscillator and Stability ofPressure Sensor Output Using a Quartz Oscillator
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.499
Atsushi Suzuki
{"title":"水晶振動子プリアンプの恒温化と圧力センサ出力の安定性との相関;水晶振動子プリアンプの恒温化と圧力センサ出力の安定性との相関;Correlation between Constant Temperature at the Preamp for a Quartz Oscillator and Stability of Pressure Sensor Output Using a Quartz Oscillator","authors":"Atsushi Suzuki","doi":"10.3131/JVSJ2.60.499","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.499","url":null,"abstract":"Correlation between Constant Temperature at the Preamp for a Quartz Oscillator and Stability of Pressure Sensor Output Using a Quartz Oscillator Atsushi SUZUKI1 1Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology AIST, Tsukuba Central 2, 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"208 1","pages":"499-501"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80506295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
真空浸炭における雰囲気制御の実際;真空浸炭における雰囲気制御の実際;Atmosphere Control during Low-Pressure Carburizing 真空渗碳的气氛控制实际;真空渗碳的气氛控制实际;Atmosphere Control during Low-Pressure Carburizing
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/jvsj2.60.96
K. Kawata
{"title":"真空浸炭における雰囲気制御の実際;真空浸炭における雰囲気制御の実際;Atmosphere Control during Low-Pressure Carburizing","authors":"K. Kawata","doi":"10.3131/jvsj2.60.96","DOIUrl":"https://doi.org/10.3131/jvsj2.60.96","url":null,"abstract":"Atmosphere control during low-pressure carburizing is important from a quality assurance viewpoint. We have developed a lowpressure carburizing furnace that can be used for mass production, which has an atmosphere control system comprising a thermal conductivity hydrogen sensor and an oxygen sensor. The hydrogen sensor is used for providing an atmosphere control necessary for carrying out both low-pressure carburizing and carbonitriding processes. The oxygen sensor detects air leaks and sooting in the furnace. In this paper, we demonstrate that when the atmosphere during the low-pressure carburizing and carbonitriding processes is controlled using the hydrogen sensor, the amount of carbon and nitrogen inˆltrated into the steel parts can be controlled, even if the parameters such as the ‰ow rate of gases, temperature, and the surface area of the parts change.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"35 1","pages":"96-101"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80920835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
水晶振動子圧力センサ出力の安定性改善のためのプリアンプへの温度の影響低減;水晶振動子圧力センサ出力の安定性改善のためのプリアンプへの温度の影響低減;Reduction of Influence of Temperature on a Preamp to Improve Stability of Output from a Pressure Sensor Using a Temperature-Stable Quartz Oscillator 降低温度对前置放大器的影响，改善晶振压力传感器输出的稳定性;降低温度对前置放大器的影响，改善晶振压力传感器输出的稳定性;Reduction of Influence of Temperature on a Preamp to Improve Stability of Output from a PressureSensor Using a Temperature-Stable Quartz Oscillator
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.131
Atsushi Suzuki
{"title":"水晶振動子圧力センサ出力の安定性改善のためのプリアンプへの温度の影響低減;水晶振動子圧力センサ出力の安定性改善のためのプリアンプへの温度の影響低減;Reduction of Influence of Temperature on a Preamp to Improve Stability of Output from a Pressure Sensor Using a Temperature-Stable Quartz Oscillator","authors":"Atsushi Suzuki","doi":"10.3131/JVSJ2.60.131","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.131","url":null,"abstract":"Reduction of In‰uence of Temperature on a Preamp to Improve Stability of Output from a Pressure Sensor Using a Temperature-Stable Quartz Oscillator Atsushi SUZUKI1 1Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology AIST, Tsukuba Central 2, 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"100 1","pages":"131-134"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74333718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Atmospheric Pressure Linear Microwave Plasma for Surface Treatment of Materials 常压线性微波等离子体材料表面处理
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.105
H. Shindo, H. Kuwahata, M. Isomura
{"title":"Atmospheric Pressure Linear Microwave Plasma for Surface Treatment of Materials","authors":"H. Shindo, H. Kuwahata, M. Isomura","doi":"10.3131/JVSJ2.60.105","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.105","url":null,"abstract":"Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"124 1","pages":"105-111"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87820536","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process 溅射过程中稳态压力分布和动态压力波动的测量
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.220
Shuichi Tajiri, T. Onishi, Yukiko Okano, S. Ogawa, H. Mima
{"title":"Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process","authors":"Shuichi Tajiri, T. Onishi, Yukiko Okano, S. Ogawa, H. Mima","doi":"10.3131/JVSJ2.60.220","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.220","url":null,"abstract":"Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process Shuichi TAJIRI1, Takanori ONISHI1, Yukiko OKANO1, Soichi OGAWA2 and Hiroshi MIMA3 1Okano Works, Ltd., Micro sensor Division, 6229 Izuo, Taisyo-ku, Osaka-shi, Osaka 5510031, Japan 2Ogawa Creation Research Laboratory, 7187 Karigutidai, Tarumi-ku, Kobe-shi, Hyogo 6550049, Japan 3Osaka City University, 33138 Sugimoto, Sumiyoshi-ku, Osaka-shi, Osaka 5588585, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"48 1","pages":"220-227"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89561218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
SAGA-LSにおける軟X線吸収分光 (小特集 シンクロトロン放射光によるX線吸収分光法の新展開(2)) SAGA-LS的软X射线吸收光谱(小特集同步辐射光的X射线吸收光谱法的新发展(2))
Journal of The Vacuum Society of Japan Pub Date : 2016-12-01 DOI: 10.3131/JVSJ2.59.341
Eiichi Kobayashi, Daisuke Yoshimura, Hiroyuki Setoyama, Toshihiro Okajima
{"title":"SAGA-LSにおける軟X線吸収分光 (小特集 シンクロトロン放射光によるX線吸収分光法の新展開(2))","authors":"Eiichi Kobayashi, Daisuke Yoshimura, Hiroyuki Setoyama, Toshihiro Okajima","doi":"10.3131/JVSJ2.59.341","DOIUrl":"https://doi.org/10.3131/JVSJ2.59.341","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"44 1","pages":"341-345"},"PeriodicalIF":0.0,"publicationDate":"2016-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83346123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Recent Developments in Gas Cluster Ion Beam Technology 气体束离子束技术的最新进展
Journal of The Vacuum Society of Japan Pub Date : 2016-05-01 DOI: 10.3131/JVSJ2.59.121
N. Toyoda
{"title":"Recent Developments in Gas Cluster Ion Beam Technology","authors":"N. Toyoda","doi":"10.3131/JVSJ2.59.121","DOIUrl":"https://doi.org/10.3131/JVSJ2.59.121","url":null,"abstract":"Gas cluster ion beam (GCIB) exhibit unique irradiation eŠects such as dense energy deposition, low-damage irradiation, and surface smoothing eŠects. Especially, low-damage sputtering of organic materials is one of the hot applications of GCIB. However, it is still necessary to improve beam properties of GCIB. In this paper, we will review characterization of GCIB regarding formation of multiply charged GCIB and eŠects of collisions with residual gas. As recent applications of GCIB, etching enhancement by introduction of reactive background gas, and a nano-fabrication of magnetic recording device by GCIB are explained.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"114 1","pages":"121-127"},"PeriodicalIF":0.0,"publicationDate":"2016-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77175263","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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