{"title":"Chemical Mechanisms of Metal-Based Extreme Ultraviolet Resists","authors":"A. Brouwer","doi":"10.2494/photopolymer.35.81","DOIUrl":"https://doi.org/10.2494/photopolymer.35.81","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"27 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74683205","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yusuke Otsubo, K. Sakai, K. Kasahara, Hong Xu, E. Giannelis, C. Ober
{"title":"Progress in EUV Photoresists for High-Resolution Patterning","authors":"Yusuke Otsubo, K. Sakai, K. Kasahara, Hong Xu, E. Giannelis, C. Ober","doi":"10.2494/photopolymer.35.101","DOIUrl":"https://doi.org/10.2494/photopolymer.35.101","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"1 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79950229","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Sasai, D. Ousaka, Y. Fujii, Aoi Isono, Y. Yamauchi, S. Kondo, Tatsuyuki Nakatiani
{"title":"Surface Functionalization of Diamond-like Carbon Film with Biocompatible Polymer Brushes","authors":"Y. Sasai, D. Ousaka, Y. Fujii, Aoi Isono, Y. Yamauchi, S. Kondo, Tatsuyuki Nakatiani","doi":"10.2494/photopolymer.35.303","DOIUrl":"https://doi.org/10.2494/photopolymer.35.303","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"1 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82943060","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Takuzi Tanaka, Syunya Saegusa, Masayuki Naya, T. Fukuoka, Sho Amano, Y. Utsumi, A. Yamaguchi
{"title":"Evaluation of Surface-Enhanced Raman Scattering Substrate Consisting of Gold Nanoparticles Grown on Nanoarrays of Boehmite Fabricated using Magnetron Sputtering Process","authors":"Takuzi Tanaka, Syunya Saegusa, Masayuki Naya, T. Fukuoka, Sho Amano, Y. Utsumi, A. Yamaguchi","doi":"10.2494/photopolymer.35.249","DOIUrl":"https://doi.org/10.2494/photopolymer.35.249","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"34 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89381951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Matsuura, Yuuri Higashide, Y. Takagishi, Masanobu Ohkita, Tomoharu Tachikawa
{"title":"Preparation of a Polysilane-(1-Pyrene)Methyl Methacrylate Copolymer","authors":"Y. Matsuura, Yuuri Higashide, Y. Takagishi, Masanobu Ohkita, Tomoharu Tachikawa","doi":"10.2494/photopolymer.35.347","DOIUrl":"https://doi.org/10.2494/photopolymer.35.347","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"8 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82163398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yutaro Iwashige, Hiroto Kudo, K. Okamoto, T. Kozawa
{"title":"Synthesis and Resist Sensitive Property of Iodine-Containing Materials using Extreme Ultraviolet (EUV) Exposure Tool","authors":"Yutaro Iwashige, Hiroto Kudo, K. Okamoto, T. Kozawa","doi":"10.2494/photopolymer.35.41","DOIUrl":"https://doi.org/10.2494/photopolymer.35.41","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"2 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79006649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tomohito Kizu, Shinji Yamakawa, Takeo Watanabe, S. Yasui, Tomoyuki Shibagaki
{"title":"Development of Selenonium PAGs in EUV Lithography toward High Sensitivity Achievement","authors":"Tomohito Kizu, Shinji Yamakawa, Takeo Watanabe, S. Yasui, Tomoyuki Shibagaki","doi":"10.2494/photopolymer.35.55","DOIUrl":"https://doi.org/10.2494/photopolymer.35.55","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"155 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77078740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Surface Cleaning and Modification of Oxide Films by Atomic Hydrogen Annealing","authors":"A. Heya, K. Sumitomo","doi":"10.2494/photopolymer.35.351","DOIUrl":"https://doi.org/10.2494/photopolymer.35.351","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"80 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75080498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Effect of UV-Light Irradiation on Charge-Accumulation States in PTzBT Polymer Solar Cells","authors":"D. Xue, Masahiko Saito, I. Osaka, K. Marumoto","doi":"10.2494/photopolymer.35.193","DOIUrl":"https://doi.org/10.2494/photopolymer.35.193","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"1 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83037096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Sekiguchi, M. Hanabata, H. Minami, Y. Matsumoto, Yosuke Ohta, Fucheng Wang, Martin Z Ma, Zhiqiang Su
{"title":"The Synthesis of the High Resolution i Line Novolak Resist","authors":"A. Sekiguchi, M. Hanabata, H. Minami, Y. Matsumoto, Yosuke Ohta, Fucheng Wang, Martin Z Ma, Zhiqiang Su","doi":"10.2494/photopolymer.35.327","DOIUrl":"https://doi.org/10.2494/photopolymer.35.327","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"1141 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82605773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}