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2014 International Conference on Optical MEMS and Nanophotonics最新文献

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λ/8 Precision parabolic resonant varifocal mirror λ/8精密抛物面谐振变焦镜
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924613
K. Nakazawa, Takashi Sasaki, K. Hane
{"title":"λ/8 Precision parabolic resonant varifocal mirror","authors":"K. Nakazawa, Takashi Sasaki, K. Hane","doi":"10.1109/OMN.2014.6924613","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924613","url":null,"abstract":"An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133473987","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Integration of the innovative 3D micro prism design and fabrication technology for a pico-projection system 集成微型投影系统的创新三维微棱镜设计和制造技术
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924579
K. Hung, Y. Chuang, Y. Tsai, Shih-Hao Huang, Jheng-Huai Huang
{"title":"Integration of the innovative 3D micro prism design and fabrication technology for a pico-projection system","authors":"K. Hung, Y. Chuang, Y. Tsai, Shih-Hao Huang, Jheng-Huai Huang","doi":"10.1109/OMN.2014.6924579","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924579","url":null,"abstract":"In this study, micro-opto-electro-mechanical systems (MOEMS) technology was used to design an innovative and compact 10 × 6 × 1.5 mm) 3D micro prism, featuring three distinct 45° inclined optical surfaces that simplify the optical design and dimensions of the micro-projection system. The 3D micro-prism manufacturing process is based on a process involving three time inclined exposures and thickfilm (1.5 mm). The roughness of the inclined surface reached 29.8 nm, improving the 407-nm surface roughness yielded by computer numerical control (CNC) processing.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"96 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132313353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
3D photonic crystals fabricated by nanoimprint lithography 纳米压印技术制备三维光子晶体
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924524
M. Eibelhuber, T. Matthias, T. Glinsner
{"title":"3D photonic crystals fabricated by nanoimprint lithography","authors":"M. Eibelhuber, T. Matthias, T. Glinsner","doi":"10.1109/OMN.2014.6924524","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924524","url":null,"abstract":"In recent years direct writing methods as e-beam lithography have been extensively used for research and development of photonic structures but these techniques cannot be easily scaled up for cost efficient production. The restrictions in pattern size and fabrication of 3D structures, in combination with long process time and high costs make high quality, nanoimprinting techniques an attractive solution for next generation lithography methods. There are several Nanoimprint Lithography (NIL) techniques which can be categorized depending on the process parameters and the imprinting method - either step & repeat or full wafer imprinting. A variety of potential applications has been demonstrated using NIL (e.g. SAW devices, vias and contact layers with dual damascene imprinting process, Bragg structures, patterned media) [1,2]. In this work UV-NIL has been selected for the fabrication process of 3D-photonic crystals. Results with up to five layers will be demonstrated.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132361574","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Implantable glass optrodes for deep-tissue light delivery 用于深层组织光传输的植入式玻璃电极
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924573
T. Abaya, M. Diwekar, S. Blair, P. Tathireddy, L. Rieth, F. Solzbacher
{"title":"Implantable glass optrodes for deep-tissue light delivery","authors":"T. Abaya, M. Diwekar, S. Blair, P. Tathireddy, L. Rieth, F. Solzbacher","doi":"10.1109/OMN.2014.6924573","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924573","url":null,"abstract":"3D needle-type glass waveguide arrays were developed as potentially compact neural interfaces for light delivery in deep-tissue. As much as 90% of input light is transmitted via a single optrode to depths >1mm in tissue. Light emission profiles from the optrode tips into tissue can exhibit beam widths of 70-150 μm and full-angle divergence ranging from 13-40°. These beam characteristics may be able to satisfy a wide range of requirements for targeted illumination in neural stimulation.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133496303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Photonic sensors and devices based on hollow-core photonic bandgap fibres 基于空心光子带隙光纤的光子传感器和器件
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924538
W. Jin, Fan Yang, Yinchun Cao, H. Ho
{"title":"Photonic sensors and devices based on hollow-core photonic bandgap fibres","authors":"W. Jin, Fan Yang, Yinchun Cao, H. Ho","doi":"10.1109/OMN.2014.6924538","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924538","url":null,"abstract":"Hollow-core photonic bandgap fibres have unique properties and can be used to create photonic sensors and devices with novel functionalities. Here we report some recent developments, including pressure and acoustic sensors with enhanced sensitivity, gas sensors with fast response and ppm level detection-limit, and novel in-fibre polarizers, polarization controllers and grating devices.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"450 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122483508","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and fabrication of InP free-standing optical waveguides for MEMS 用于MEMS的InP独立光波导的设计与制造
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924583
W. H. Ng, N. Podoliak, W. Stewart, P. Horák, Huiyun Liu, A. Kenyon
{"title":"Design and fabrication of InP free-standing optical waveguides for MEMS","authors":"W. H. Ng, N. Podoliak, W. Stewart, P. Horák, Huiyun Liu, A. Kenyon","doi":"10.1109/OMN.2014.6924583","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924583","url":null,"abstract":"We present the design and fabrication of an optical MEMS device on InP platform. The device is based on a suspended parallel waveguide configuration with side pillars supports. Electrodes are integrated on the device layer to provide MEMS actuation functionality to the waveguides. The device is designed to be used as an optical buffer for telecommunication applications.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122562606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Combining external cavity quantum cascade lasers and MOEMS technology: An approach for miniaturization and fast wavelength scanning 结合外腔量子级联激光器和MOEMS技术:一种小型化和快速波长扫描的方法
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924608
O. Ambacher, R. Ostendorf, D. Bleh, A. Merten, J. Grahmann, R. Schmidt, M. Kunzer, S. Hugger, J. Wagner
{"title":"Combining external cavity quantum cascade lasers and MOEMS technology: An approach for miniaturization and fast wavelength scanning","authors":"O. Ambacher, R. Ostendorf, D. Bleh, A. Merten, J. Grahmann, R. Schmidt, M. Kunzer, S. Hugger, J. Wagner","doi":"10.1109/OMN.2014.6924608","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924608","url":null,"abstract":"In order to realize a spectrally broad band and rapid tunable spectrometer in the MIR (3-12 μm wavelength range), we aim for the combination of a quantum cascade laser with a micro-opto-electro-mechanical scanning grating. The scanning grating consists of a very small diffraction grating oscillating at its resonance frequency. It serves as wavelength selective feedback to rapidly tune the quantum cascade laser. Composed together, both parts build an external cavity laser in Littrow-configuration. Thanks to the compactness of the micro-opto-electro-mechanical system, portable and cost effective spectrometers can be realized.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128903401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Direct imaging of nanophotonic cavity modes using Li ion microscope 利用锂离子显微镜直接成像纳米光子腔模式
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924536
J. Zou, K. Twedt, M. Davanco, K. Srinivasan, J. McClelland, V. Aksyuk
{"title":"Direct imaging of nanophotonic cavity modes using Li ion microscope","authors":"J. Zou, K. Twedt, M. Davanco, K. Srinivasan, J. McClelland, V. Aksyuk","doi":"10.1109/OMN.2014.6924536","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924536","url":null,"abstract":"Micrometer-scale photonic cavities with high quality factors (Q) enable on chip motion sensing with unparalleled precision and bandwidth. The optical mode shape is critical for the transducer performance, yet it is difficult to measure directly and noninvasively. Here we use a scanning lithium ion microscope to visualize the electric field energy density of a 10 um diameter, 245 nm thick, 60000 Q Si microdisk optical cavity and to identify the radial order of the mode. The technique utilizes a beam of Li ions as a high spatial resolution noncontact probe, minimally perturbing the measured cavity resonance.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"117 6","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132025298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tunable anamorphotic imaging system based on fluidic cylindrical lenses 基于流体圆柱透镜的可调谐畸变成像系统
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924521
D. Patz, S. Leopold, M. Hoffmann, S. Sinzinger
{"title":"Tunable anamorphotic imaging system based on fluidic cylindrical lenses","authors":"D. Patz, S. Leopold, M. Hoffmann, S. Sinzinger","doi":"10.1109/OMN.2014.6924521","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924521","url":null,"abstract":"We present an anamorphotic imaging system with a separately tunable magnification in horizontal and vertical direction in order to change the aspect ratio of the image. The design is based on cylindrical membrane lenses made of aluminum nitride with tunable focal power to realize a vario system without moving elements. We demonstrate the design concept of cylindrical lenses with a very compact geometry, the optical system as well as experimental results.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127462023","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Electrically-actuated cantilever for planar evanescent tuning of microring resonators in SOI platforms 用于SOI平台微环谐振器平面瞬变调谐的电驱动悬臂
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924561
Hossam Shoman, M. Dahlem
{"title":"Electrically-actuated cantilever for planar evanescent tuning of microring resonators in SOI platforms","authors":"Hossam Shoman, M. Dahlem","doi":"10.1109/OMN.2014.6924561","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924561","url":null,"abstract":"A novel design for tuning the resonant frequency of optical microring resonators is proposed, based on side evanescent field perturbation using a MEMS cantilever. Both mechanical and optical properties of the cantilever, defined in the top silicon layer of a standard SOI stack, are evaluated numerically. The height of the suspended structure is controlled through electrostatic actuation. The presence of the cantilever in the near-field of the optical mode affects the effective refractive index, resulting in frequency tuning. Results show a tuning range of the resonant frequency of about 12 nm, around 1550 nm, which is suitable for WDM applications.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121637376","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
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