2014 International Conference on Optical MEMS and Nanophotonics最新文献

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Optical signal transmission through plasmonic waveguide under applied electrical bias 外加偏压条件下等离子体波导中的光信号传输
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924504
M. Fukuhara, T. Aihara, M. Ota, H. Sakai, Y. Kimura, Y. Ishii, M. Fukuda
{"title":"Optical signal transmission through plasmonic waveguide under applied electrical bias","authors":"M. Fukuhara, T. Aihara, M. Ota, H. Sakai, Y. Kimura, Y. Ishii, M. Fukuda","doi":"10.1109/OMN.2014.6924504","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924504","url":null,"abstract":"The feasibility of optical signal transmission and electrical bias separation was demonstrated by forming a 3-μm-wide separation gap between a plasmonic waveguide and a Au/Si Schottky diode. To transmit optical signals, a surface plasmon polariton was excited at the air/Au interface of the Au film deposited on the SiO2 layer. The transmitted optical signal was detected as a photocurrent using the Au/Si Schottky diode. The electrical separation was confirmed by applying a bias voltage between the plasmonic waveguide and the Si substrate. From the transmitted power, optical signal transmission only across the electrical separation gap was confirmed.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132882395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optical position detection for MOEMS scanner mirrors with arbitrary trajectories 任意轨迹MOEMS扫描镜的光学位置检测
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924557
A. Tortschanoff, M. Baumgart, D. Holzmann, Christoph Mayer, T. Sandner, A. Kenda
{"title":"Optical position detection for MOEMS scanner mirrors with arbitrary trajectories","authors":"A. Tortschanoff, M. Baumgart, D. Holzmann, Christoph Mayer, T. Sandner, A. Kenda","doi":"10.1109/OMN.2014.6924557","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924557","url":null,"abstract":"For electrostatically driven MOEMS devices, which do not have intrinsic on-chip feedback, position information can be provided by optical methods, most simply by using a reflection from the backside of a MOEMS scanner. One possibility, which is applicable to arbitrary trajectories, is based on the measurement of the position of the back-reflected light with a quadrant diode. In this work, we present results from tests with a quadrant diode with a central hole, which provides robust results and enables a very compact design.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133026774","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Metasurface for three-dimensional optical holography 三维光学全息的超表面
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924508
Xianzhong Chen, Lingling Huang, H. Muhlenbernd, Hao Zhang, Shumei Chen, B. Bai, Qiaofeng Tan, Guofan Jin, K. Cheah, C. Qiu, Jensen Li, T. Zentgraf, Shuang Zhang
{"title":"Metasurface for three-dimensional optical holography","authors":"Xianzhong Chen, Lingling Huang, H. Muhlenbernd, Hao Zhang, Shumei Chen, B. Bai, Qiaofeng Tan, Guofan Jin, K. Cheah, C. Qiu, Jensen Li, T. Zentgraf, Shuang Zhang","doi":"10.1109/OMN.2014.6924508","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924508","url":null,"abstract":"The emerging field of plasmonic metasurface has aroused considerable interest due to their capability of arbitrary manipulation of the phase profile at the interface. We experimentally demonstrated three-dimensional (3D) holography by using metasurfaces consisting of subwavelength metallic nanorods with spatially varying orientations. Metasurfaces represent a new route towards high-resolution on-axis 3D holograms with wide field of view since the phase can be continuously controlled locally at each subwavelength unit cell.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134265726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Enhanced electro-optic switching characteristics using mems based terahertz metamaterial 利用mems基太赫兹超材料增强电光开关特性
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924507
Prakash Pitchappa, C. Ho, Yu‐Sheng Lin, Chengkuo Lee
{"title":"Enhanced electro-optic switching characteristics using mems based terahertz metamaterial","authors":"Prakash Pitchappa, C. Ho, Yu‐Sheng Lin, Chengkuo Lee","doi":"10.1109/OMN.2014.6924507","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924507","url":null,"abstract":"We present a design approach to achieve enhanced electro-optic switching characteristics using micro-electro-mechanically reconfigurable metamaterial by increasing the number of movable cantilevers in metamaterial unit cell. When the number of movable cantilevers is increased from one to two, the switching contrast improved by 5 times at 0.7 THz.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123484118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Study on nanoscale patterning of SAMs by using near-field photothermal desorption 利用近场光热解吸技术研究sam的纳米尺度图案化
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924526
Shouhei Fukuyama, Mao Jinde, Y. Taguchi
{"title":"Study on nanoscale patterning of SAMs by using near-field photothermal desorption","authors":"Shouhei Fukuyama, Mao Jinde, Y. Taguchi","doi":"10.1109/OMN.2014.6924526","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924526","url":null,"abstract":"We have developed a nanoscale patterning method of self-assembled monolayers (SAMs) using near-field light. This method utilizes the thermal desorption, which can make a noncontact patterning of SAMs at nanoscale. Here, we numerically estimate temperature distributions on a sample surface by the finite difference time domain (FDTD) method. The analytical results show the effective probe and sample conditions for the photothermal heating. As a result, the feasibility of the nanoscale patterning of SAMs using this method was confirmed. Furthermore, the preliminarily experiment of the thermal desorption using the near-field light with proposed model was carried out.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116617062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Double-side-drive electrostatic optical chopper for time-resolved Raman spectroscopy 用于时间分辨拉曼光谱的双面驱动静电光学斩波器
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924545
Y. Kogita, Y. Hirai, O. Tabata, T. Tsuchiya
{"title":"Double-side-drive electrostatic optical chopper for time-resolved Raman spectroscopy","authors":"Y. Kogita, Y. Hirai, O. Tabata, T. Tsuchiya","doi":"10.1109/OMN.2014.6924545","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924545","url":null,"abstract":"A double-side-drive MEMS electrostatic optical chopper for time-resolved Raman spectroscopy to evaluate local dynamic stress in MEMS resonators has been proposed. The chopper is used as a mechanical pulse width modulator for the incident laser. The advantages are; 1) mechanical chopping, which can maintain the quality of source gas laser 2) small size for easy installation in commercial Raman spectrometer, 3) low cost by mass production. The chopper was fabricated using SOG structure. The measured response time was 50 μs and the measured incident laser shows the laser is modulated by MEMS optical chopper.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117048967","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry 微干涉测量用玻璃膜硅微致动器的整体集成
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924606
J. Lullin, S. Bargiel, E. Courjon, S. Perrin, M. Baranski, N. Passilly, C. Gorecki
{"title":"Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry","authors":"J. Lullin, S. Bargiel, E. Courjon, S. Perrin, M. Baranski, N. Passilly, C. Gorecki","doi":"10.1109/OMN.2014.6924606","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924606","url":null,"abstract":"We report the monolithic integration of glass membranes on a highly structured SOI wafer of electrostatic comb-drive actuator. The integration method combines glass micromachining techniques and non-standard processing of SOI, based on spray coating and projection photolithography. Proposed solution overcomes several basic difficulties of monolithic glass integration. We demonstrate its potential by fabrication of 4×4 matrix of reference mirrors on very thin (25 μm) and large (φ=2 mm) light-transparent glass membranes, which is of great importance for MOEMS-based phase-shift micro-interferometry systems.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"25 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124264941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Quantum dots and single molecule detection enable highly sensitive analysis of genetic biomarkers 量子点和单分子检测能够高度敏感地分析遗传生物标志物
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924513
Tza-Huei Wang
{"title":"Quantum dots and single molecule detection enable highly sensitive analysis of genetic biomarkers","authors":"Tza-Huei Wang","doi":"10.1109/OMN.2014.6924513","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924513","url":null,"abstract":"There has been an increasing interest in using confocal single-molecule detection (SMD) for genomic detection. The driving force comes from its ultrahigh sensitivity for detection of low-abundance nucleic acids without the need for amplification. On the other hand, semiconductor quantum dots (QDs) have attracted a great deal of attention for biomedical applications. The unique photophysical properties of semiconductor quantum dots (QDs) such as high quantum yield and photostability make them ideal for use as spectral labels and luminescent probes. We have developed highly sensitive and quantitative technologies for clinically relevant analysis of DNA markers based on the convergence of SMD, microfluidic manipulation, and QDs.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"139 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128391782","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dual-axis hybrid-MEMS mirror having Si and polymer hinges for large-area 2D raster scan 具有Si和聚合物铰链的双轴混合mems反射镜用于大面积二维光栅扫描
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924575
Hirofumi Yamashita, K. Terao, H. Takao, F. Shimokawa, F. Oohira, Takaaki Suzuki
{"title":"Dual-axis hybrid-MEMS mirror having Si and polymer hinges for large-area 2D raster scan","authors":"Hirofumi Yamashita, K. Terao, H. Takao, F. Shimokawa, F. Oohira, Takaaki Suzuki","doi":"10.1109/OMN.2014.6924575","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924575","url":null,"abstract":"In this study, we propose a dual-axis hybrid-MEMS mirror for large-area 2D raster scanner composed of fast and slow driving gimbals. For simple fabrication and high driving performance, an outer gimbal for slow and large scanning has polymer SU-8 hinges with low rigidity, and an inner gimbal for fast scanning has Si hinges with high rigidity. The outer gimbal deflected over ±14deg. at non-resonant frequency of 60Hz refresh rate, and the inner one ±1deg. at the resonant frequency 22.9kHz. The 2D raster scanning of the fabricated mirror was demonstrated.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125698458","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabry-Perot resonators based on photonic crystal mirrors with strong gradients of reflected phase 基于强反射相位梯度光子晶体镜的法布里-珀罗谐振器
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924541
A. Gellineau, Yu-po Wong, O. Solgaard
{"title":"Fabry-Perot resonators based on photonic crystal mirrors with strong gradients of reflected phase","authors":"A. Gellineau, Yu-po Wong, O. Solgaard","doi":"10.1109/OMN.2014.6924541","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924541","url":null,"abstract":"Photonic Crystal mirrors with phase responses that are strongly varying as a function of wavenumber are designed, fabricated, and characterized. When used in Fabry-Perot resonators, these mirrors enable effective cavity lengths that are strong functions of wavenumber. Our measurements demonstrate that these cavities have very useful device applications, including wavelength-stable sensors and miniaturized high quality factor resonators.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"92 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133101825","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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