Double-side-drive electrostatic optical chopper for time-resolved Raman spectroscopy

Abstract

A double-side-drive MEMS electrostatic optical chopper for time-resolved Raman spectroscopy to evaluate local dynamic stress in MEMS resonators has been proposed. The chopper is used as a mechanical pulse width modulator for the incident laser. The advantages are; 1) mechanical chopping, which can maintain the quality of source gas laser 2) small size for easy installation in commercial Raman spectrometer, 3) low cost by mass production. The chopper was fabricated using SOG structure. The measured response time was 50 μs and the measured incident laser shows the laser is modulated by MEMS optical chopper.