利用近场光热解吸技术研究sam的纳米尺度图案化

Shouhei Fukuyama, Mao Jinde, Y. Taguchi
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引用次数: 0

摘要

我们开发了一种利用近场光的自组装单层膜(SAMs)的纳米尺度图像化方法。该方法利用热解吸技术,可以在纳米尺度上制备非接触式地表膜。本文采用时域有限差分(FDTD)方法对样品表面的温度分布进行了数值估计。分析结果表明了光热加热的有效探针和样品条件。实验结果证实了该方法在纳米尺度上对地磁薄膜进行图案化的可行性。在此基础上,利用所提出的模型进行了近场光热解吸的初步实验。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study on nanoscale patterning of SAMs by using near-field photothermal desorption
We have developed a nanoscale patterning method of self-assembled monolayers (SAMs) using near-field light. This method utilizes the thermal desorption, which can make a noncontact patterning of SAMs at nanoscale. Here, we numerically estimate temperature distributions on a sample surface by the finite difference time domain (FDTD) method. The analytical results show the effective probe and sample conditions for the photothermal heating. As a result, the feasibility of the nanoscale patterning of SAMs using this method was confirmed. Furthermore, the preliminarily experiment of the thermal desorption using the near-field light with proposed model was carried out.
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