{"title":"利用近场光热解吸技术研究sam的纳米尺度图案化","authors":"Shouhei Fukuyama, Mao Jinde, Y. Taguchi","doi":"10.1109/OMN.2014.6924526","DOIUrl":null,"url":null,"abstract":"We have developed a nanoscale patterning method of self-assembled monolayers (SAMs) using near-field light. This method utilizes the thermal desorption, which can make a noncontact patterning of SAMs at nanoscale. Here, we numerically estimate temperature distributions on a sample surface by the finite difference time domain (FDTD) method. The analytical results show the effective probe and sample conditions for the photothermal heating. As a result, the feasibility of the nanoscale patterning of SAMs using this method was confirmed. Furthermore, the preliminarily experiment of the thermal desorption using the near-field light with proposed model was carried out.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study on nanoscale patterning of SAMs by using near-field photothermal desorption\",\"authors\":\"Shouhei Fukuyama, Mao Jinde, Y. Taguchi\",\"doi\":\"10.1109/OMN.2014.6924526\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have developed a nanoscale patterning method of self-assembled monolayers (SAMs) using near-field light. This method utilizes the thermal desorption, which can make a noncontact patterning of SAMs at nanoscale. Here, we numerically estimate temperature distributions on a sample surface by the finite difference time domain (FDTD) method. The analytical results show the effective probe and sample conditions for the photothermal heating. As a result, the feasibility of the nanoscale patterning of SAMs using this method was confirmed. Furthermore, the preliminarily experiment of the thermal desorption using the near-field light with proposed model was carried out.\",\"PeriodicalId\":161791,\"journal\":{\"name\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-10-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2014.6924526\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2014.6924526","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study on nanoscale patterning of SAMs by using near-field photothermal desorption
We have developed a nanoscale patterning method of self-assembled monolayers (SAMs) using near-field light. This method utilizes the thermal desorption, which can make a noncontact patterning of SAMs at nanoscale. Here, we numerically estimate temperature distributions on a sample surface by the finite difference time domain (FDTD) method. The analytical results show the effective probe and sample conditions for the photothermal heating. As a result, the feasibility of the nanoscale patterning of SAMs using this method was confirmed. Furthermore, the preliminarily experiment of the thermal desorption using the near-field light with proposed model was carried out.