Design and fabrication of InP free-standing optical waveguides for MEMS

2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI:10.1109/OMN.2014.6924583

W. H. Ng, N. Podoliak, W. Stewart, P. Horák, Huiyun Liu, A. Kenyon

引用次数: 1

Abstract

We present the design and fabrication of an optical MEMS device on InP platform. The device is based on a suspended parallel waveguide configuration with side pillars supports. Electrodes are integrated on the device layer to provide MEMS actuation functionality to the waveguides. The device is designed to be used as an optical buffer for telecommunication applications.

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用于MEMS的InP独立光波导的设计与制造

提出了一种基于InP平台的光学MEMS器件的设计与制造方法。该器件基于带有侧柱支撑的悬浮平行波导结构。电极集成在器件层上，为波导提供MEMS驱动功能。该装置被设计用作电信应用的光缓冲器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2014 International Conference on Optical MEMS and Nanophotonics

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