2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献_第3页

Implementation of a subwavelength Bragg reflector for Terahertz applications 用于太赫兹应用的亚波长布拉格反射器的实现

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196824

Vikas Singal, S. Smaili, Y. Massoud

引用次数: 0

Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes 在发光二极管中制造亚微米图案蓝宝石衬底的金属接触印刷光刻技术

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196718

Y. Hsieh, Y. Lee

引用次数: 3

Analysis of air damping in micromachined resonators 微机械谐振器中的空气阻尼分析

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196819

Guoqiang Wu, Dehui Xu, B. Xiong, Y. Ma, Yuelin Wang, E. Jing

引用次数: 3

Benchmarking the passive differential input technique to shielded GSG probes 屏蔽式GSG探头无源差分输入技术的基准测试

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196820

Yuanjie Xu, Haoshen Zhu, Joshua E-Y Lee

引用次数: 0

In situ heating to improve adhesion for parylene-on-parylene deposition 原位加热以提高聚苯乙烯对聚苯乙烯沉积的附着力

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196762

D. Kang, Jay Han-Chieh Chang, J. Kim, Y. Tai

引用次数: 5

Conductive micro silver wires via aerosol deposition 通过气溶胶沉积的导电微银线

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196775

Bulei Xu, Wenlong Lv, Xiang Wang, T. Lei, G. Zheng, Yang Zhao, Daoheng Sun

引用次数: 3

In-vitro transgenic mice liver tissue culture via hydrodynamic flow perfusion bioreactor 水动力流灌注生物反应器体外培养转基因小鼠肝组织

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196740

Che-Wei Wu, S. Sivashankar, S. Puttaswamy, Hui-Ling Lin, Kuo-Wei Chang, C. Yeh, Cheng-Hsien Liu

引用次数: 1

Integration the back-side inclined exposure technology to fabricate the 45° k-type prism with nanometer roughness 结合背面倾斜曝光技术制备45°k型纳米粗糙度棱镜

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196737

K. Hung, Y. Tsai, Chun-Fu Lee, Yi-Hao Chu

{"title":"Integration the back-side inclined exposure technology to fabricate the 45° k-type prism with nanometer roughness","authors":"K. Hung, Y. Tsai, Chun-Fu Lee, Yi-Hao Chu","doi":"10.1109/NEMS.2012.6196737","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196737","url":null,"abstract":"This paper describes the design for a special k-type microprism structure for application in the lateral-type blu-ray semiconductor laser of an optical pickup head system. This design solves the current frontal type blu-ray semiconductor laser problem, and thus reduces the size of the optical pickup head. This study combines front- and back- inclined exposure technology to develop a k-type microprism structure. Thick film negative photoresist are used in this study as the main structural material. For obtaining the optimal structural surface roughness, the effect of solvent loss percentage of the polymer material was controlled. Besides, the bottom half of the k-type was generated through backside exposure to solve problems such as diffraction phenomena due to uneven photoresist surface during front-side inclined exposure. This design also avoids the problem of refractive index matching by omitting the step of filling the gap between the mask and the photo resistor with glycerol. For improving the roughness problem of the front-side inclined exposure, backside inclined exposure is implemented when fabricating a 45 ° polymer micro mirror. The use of front-side exposure for making the top half of the k-type solves the problem of undesirable surface roughness caused by insufficient light penetration during front-side inclined exposure. This paper utilizes front- and back-side inclined exposure technology to fabricate a 45 ° k-type polymer micro mirror with 15.2 and 12.4 nm (400 μm × 400 μm) roughness, respectively. The roughness level could meet the standards (λ/10, λ = 405 nm) of blue ray specifications. This type of micro prism can be used as a key component in Pico-projector, Interferometer, bio detection systems, data storage systems, and linear encoder optical systems. This novel technology also has the characteristics of high throughput and wafer-level assembly.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116708779","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

A research of the bandwidth of a mode-matching MEMS vibratory gyroscope 模式匹配MEMS振动陀螺仪的带宽研究

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196880

Chunhua He, Qiancheng Zhao, J. Cui, Zhenchuan Yang, G. Yan

引用次数: 8

Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab 基于二维硅板的微加工声子晶体谐振器的研制

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196785

Nan Wang, F. Hsiao, M. Palaniapan, Chengkuo Lee

{"title":"Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab","authors":"Nan Wang, F. Hsiao, M. Palaniapan, Chengkuo Lee","doi":"10.1109/NEMS.2012.6196785","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196785","url":null,"abstract":"This paper shows the design, fabrication and characterization of novel micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab. The PnC slab was made by etching a square array of cylindrical air holes in a 10 μm thick free-standing silicon plate, while the defects are created by replacing periodically arranged three rows of air holes with one row of air holes at the centre of the PnC region. The radius of the central air holes (r') is also varied to study the effect of r' on the performance of the PnC resonators. Piezoelectric aluminium nitride (AlN) film is employed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a pure PnC structure with a stopband of 140 MHz <; f <;195 MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators reaches its maximum value (174.67 MHz) when central-hole radius (r') reaches 8 μm, while Q factor reaches maximum (893) at r' = 6 μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics and may be further optimized for applications such as microfluidics, biomedical devices and RF communications in GHz range.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"66 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133675868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0