{"title":"The vertical MSM diamond X-ray detector","authors":"S. Cheirsirikul, S. Jesen, C. Hruanun","doi":"10.1109/NEMS.2012.6196844","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196844","url":null,"abstract":"Development synthesizing diamond film on (100) silicon substrate was processed by HFCVD (Hot Filament Chemical Vapor Deposition). The processes consisted of using methane (CH4) to produce intrinsic diamond and built MSM device on the diamond film. The top and the bottom of diamond is Schottky junctions were produced by aluminum which caused the carriers were able to move in the vertical direction to reduce the effect of grain boundaries. After that, the result of detecting an X-ray of MSM diamond was satisfactory because it could respond along with increasing of intensity of an X-ray and X-ray expose time.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114076889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Kow-Ming Chang, Chu-Feng Chen, C. Lai, C. Hsieh, Chin-Ning Wu, Yu-Bin Wang, Chung-Hsien Liu
{"title":"Sensitivity enhancement in SGOI nanowire biosensor fabricated by top surface passivation","authors":"Kow-Ming Chang, Chu-Feng Chen, C. Lai, C. Hsieh, Chin-Ning Wu, Yu-Bin Wang, Chung-Hsien Liu","doi":"10.1109/NEMS.2012.6196842","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196842","url":null,"abstract":"Increasing the fraction of Ge in SiGe-on-Insulator (SGOI) using Ge condensation by oxidation significantly increases hole mobility. This effect can be exploited to improve the sensitivity of SGOI nanowire. However, our previous studies found that the sensitivity of an SGOI nanowire is degraded as the Ge fraction increases over 20%, because of the surface state of SiGe is unstable when the Ge fraction is high. In this work, a top surface passtivation SiO2 layer was deposited on an Si0.8Ge0.2 nanowire and successfully improve its sensitivity around 1.3 times that of the nanowire sample without top a passivation layer.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126242737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N. Rooij, S. Gautsch, T. Akiyama, F. Loizeau, G. Mileti, Y. Petremand, U. Staufer, R. Straessle, Genki Yoshikawa
{"title":"NEMS based tools for nanoscience and atomic clocks","authors":"N. Rooij, S. Gautsch, T. Akiyama, F. Loizeau, G. Mileti, Y. Petremand, U. Staufer, R. Straessle, Genki Yoshikawa","doi":"10.1109/NEMS.2012.6196702","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196702","url":null,"abstract":"Nanoscience is a thriving multi-disciplinary activity, which aims at understanding the properties and the interaction of very small objects on the nanometer scale. In this endeavor, tools for the observation, analysis and modification of individual objects like macromolecules, clusters or even single atoms are required. The development of dedicated microfabricated instruments to measure physical and chemical interactions at this scale is therefore required. This talk will give an overview of microfabrication techniques employed to shape such NEMS based tools and introduce the audience to several probing techniques. In a second part, we focus on the principles and fabrication techniques of atomic clocks.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"217 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121944215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yiwen Jiang, X. Du, Zhan Zhan, Bulei Xu, Wenlong Lv, Lingyun Wang, Daoheng Sun
{"title":"Design and simulation of fully-symmetrical resonant pressure sensor","authors":"Yiwen Jiang, X. Du, Zhan Zhan, Bulei Xu, Wenlong Lv, Lingyun Wang, Daoheng Sun","doi":"10.1109/NEMS.2012.6196872","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196872","url":null,"abstract":"A fully-symmetrical resonant pressure sensor based upon lateral drive is presented, which can avoid stress concentration that arises from temperature or vacuum packaging. Unlike conventional driving method, resonant structure with laterally driven comb capacitance allows the linear characteristic of driving force and also obtains high quality factor for its slide-film air damping. Furthermore, the detection sensitivity of the device can be improved by using differential capacitance, which will reduce shared-frequency interference phenomenon at the same time. According to the FEM analysis, the structural parameters of resonant pressure sensor are optimized. Meanwhile, the pressure sensitivity of the sensor has designed to be 22.602 Hz/kPa for a 18 μm thick diaphragm over a pressure range of 550 kPa. From temperature simulation, the temperature coefficient of sensor is -1.8233 Hz/°C in the range of -20°C~60°C without any temperature compensation. Finally, the frequency domain characteristics have been confirmed and the quality factors of sensor under different damping ratios are identified, it offers reliable reference for the choice of vacuum in resonant pressure sensor packaging.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130157867","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jin‐Cherng Shyu, C. L. Huang, T. Sheu, H. Ay, J. W. Huang
{"title":"A study of hydrogen peroxide microfluidic fuel cells","authors":"Jin‐Cherng Shyu, C. L. Huang, T. Sheu, H. Ay, J. W. Huang","doi":"10.1109/NEMS.2012.6196831","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196831","url":null,"abstract":"This study investigated various effects, including reactant concentrations, volumetric flow rates and microchannel width, as well as the electrode distance, on the performance of microfluidic fuel cells employing hydrogen peroxide dissolved in alkaline and acid electrolytes as both fuel and oxidant, respectively. Three concentrations ranging from 0.1 M to 0.6 M and five volumetric flow rates ranging from 0.01 mL/min to 1.0 mL/min were tested in the present study for cell performance measurement and discussion. Three microfluidic fuel cells were tested here. Two of them have rectangular microchannel of 0.5 mm and 1.0 mm in width with electrode distance of 0.4 mm. An additional 0.5-mm-wide microchannel fuel cell was also tested with a shorter electrode distance of 0.2 mm. Results show that cell performed at either larger volumetric flow or with smaller microchannel width usually had higher current output at a given cell voltage. The highest cell output at 0.1 V and 0.1 M among the present cells was approximately 100 mA/cm2 produced by the cell whose microchannel width and electrode distance are 0.5 mm and 0.2 mm, respectively. However, with a higher reactant concentration of 0.6 M, the highest cell output at 0.1 V and 0.1 M among the present cells was 2.5 times higher than the abovementioned value, namely 250 mA/cm2, produced by the cell with microchannel width and electrode distance of 0.5 mm and 0.4 mm, respectively.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131072852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Dimensions and capillary effects of microfluidic channel for blood plasma separation","authors":"Yu-Hui Zhan, Ju-Nan Kuo","doi":"10.1109/NEMS.2012.6196849","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196849","url":null,"abstract":"This paper presents a cross-flow microchannel network for separation blood plasma on a microfluidic chip. The whole blood could be introduced into the microchannel via the effects of capillary forces alone, i.e., there was no need for any external driving force. A microfluidic chip for plasma separation including a cross-flow microchannel consisting of a straight main microchannel and a filtration microchannel has been proposed. The microfluidic chip used for plasma separation is fabricated from a single polydimethylsiloxane (PDMS) mold and sealed with an etched glass substrate. Since filtration microchannel depth is less than 2 μm, plasma can be extracted from whole blood. The merits of this design are its simple structure, high separation efficiency and without any external driving force. The experimental results show that this design can extract at least 0.02 μl of plasma from whole blood within 25 s and with a residual cell concentration of less than 0.07 % in the purified plasma.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"113 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133387020","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pinggang Peng, D. Xie, Yezhou Yang, Changjian Zhou, H. Tian, T. Feng, Xiao Li, T. Ren, Hongwei Zhu
{"title":"Multilayer graphene growth by a metal-catalyzed crystallization of diamond-like carbon","authors":"Pinggang Peng, D. Xie, Yezhou Yang, Changjian Zhou, H. Tian, T. Feng, Xiao Li, T. Ren, Hongwei Zhu","doi":"10.1109/NEMS.2012.6196710","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196710","url":null,"abstract":"Graphene has attracted significant attention due to its excellent electrical, optical, mechanical and thermal properties. In the paper, we report a simple and efficient growth method of multilayer graphene using a metal-catalyzed crystallization of diamond-like carbon (DLC) by thermal annealing without any extraneous carbon sources. The Ni/DLC/Si multilayered structure was fabricated on silicon substrate at room temperature (RT) and then was thermally annealed. Multilayer graphene was formed on the nickel surface after cooling down to RT by the analysis of Raman spectra. The quality of the multilayer graphene is comparable to chemical vapor deposition methods (CVD). This method of synthesizing graphene sheets with DLC films provides an important way toward the integration of DLC-based electronic devices with graphene.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133405426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Micro-droplet formation with non-Newtonian solutions in microfluidic T-junctions with different inlet angles","authors":"Z. Gu, J. Liow","doi":"10.1109/NEMS.2012.6196809","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196809","url":null,"abstract":"T-junctions with various inlet angles (θ=30°, 60°, 90°, 120° and 150°) were employed to produce microdroplets. Experimental results showed that the inlet angles play an important role in controlling the droplet size and the T-junction with an inlet angle of 90° always generating the largest droplets for a given continuous phase flow rate. The results for the droplet diameters were separated into two groups, based on the range of the inlet angles (acute angles of 30°, 60° and 90°, and obtuse angles of 90°, 120° and 150°). For the acute inlet angles, the droplet size was larger for an inlet angle of θ=30° than for an inlet angle of θ=60°. For the obtuse inlet angles, the diameter of droplets produced by T-junctions with inlet angles of 120° and 150° were similar in size but smaller than that for 90°. The effect of flow rates of both phases on the droplet formation mechanism was discussed. Water and non-Newtonian xanthan gum and PEO (Polyethylene oxide) solutions were used as the dispersed phase and the differences in droplet sizes were studied.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134638872","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Investigation of particle dispersion and deposition in a channel with elliptic obstructions using lattice Boltzmann method","authors":"A. Tehrani, A. Moosavi","doi":"10.1109/NEMS.2012.6196830","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196830","url":null,"abstract":"Particle transport and deposition in a channel flow with elliptic obstruction is studied. Numerical simulation of fluid flow is performed using two-dimensional lattice Boltzmann method, while one-way coupling Lagrangian method for particle tracking is used. Standard particles are injected in the inlet of the channel. Gravity, Drag force, Brownian forces, and the Saffman lift are considered in equation of particle motion. The influence of geometrical parameter, ellipse aspect ratio, is studied on dispersion and deposition of particles as well as the flow parameters, such as Reynolds number. In addition, the effect of particles size -particles of 0.01-10μm in diameter- on dispersion and deposition patterns is studied. Results reveal more inertial and gravitational trapping on obstacle surface for particles of larger diameter and obstacles of higher aspect ratio. In addition, the Brownian diffusion and the vortexes formed behind the obstacle, which occurs in high Reynolds numbers, dominantly affect finer particles trajectories.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124397298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Effective force generation for ECLIA composed of Si bone structure and conductive polymer flexible slider","authors":"T. Nguyen, S. Konishi","doi":"10.1109/NEMS.2012.6196846","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196846","url":null,"abstract":"In this paper, we present the design and fabrication of a new type of slider for ECLIA (Electrostatic Control Linear Actuator). The slider is composed of a flexible conductive polymer and Silicon bone structure, hereafter called Polymer-Si bone slider, in order to generate electrostatic and suction force for the clutch mechanism and pushing force of the slider. The Polymer-Si bone slider can improve the stability of slider movement compared to a polymer slider. The flexible conductive polymer film, which consists of a Aramid base thin film and coated conductive PEDOT:PSS layer, can be deformed, and fitted to the opposite electrode surface at low applied voltages. In addition, the Si bone structure is rigid for stability movement and large pushing force of the slider. The characteristics of this new slider were compared to conventional sliders.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125845131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}