Effective force generation for ECLIA composed of Si bone structure and conductive polymer flexible slider

In this paper, we present the design and fabrication of a new type of slider for ECLIA (Electrostatic Control Linear Actuator). The slider is composed of a flexible conductive polymer and Silicon bone structure, hereafter called Polymer-Si bone slider, in order to generate electrostatic and suction force for the clutch mechanism and pushing force of the slider. The Polymer-Si bone slider can improve the stability of slider movement compared to a polymer slider. The flexible conductive polymer film, which consists of a Aramid base thin film and coated conductive PEDOT:PSS layer, can be deformed, and fitted to the opposite electrode surface at low applied voltages. In addition, the Si bone structure is rigid for stability movement and large pushing force of the slider. The characteristics of this new slider were compared to conventional sliders.