2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

{"title":"Fabrication of deep lateral single-crystal-silicon blaze micro-grating by Inductively-Coupled-Plasma Reactive Ion Etch","authors":"Yu-Hsin Lin, C. Weng, C. Su, W. Hsu","doi":"10.1109/NEMS.2012.6196869","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196869","url":null,"abstract":"This paper presents a method by using a compensative structure assisted to fabricate deep lateral single-crystal-silicon (SCS) blaze micro-grating at Inductively-Coupled-Plasma Reactive Ion Etch (ICP-RIE). Due to the high resolution of blaze micro-grating, it's hard to maintain the teeth structure of blaze micro-grating under deep silicon etch in ICP-RIE process. Here, the independent rectangular structure and symmetrical structure to micro-grating is designed to obstruct the non-vertical plasma ion to etch the sidewall of micro-grating structure and to get better the profile control at deep micro-grating structure. The lateral silicon blaze micro-grating with 100 μm thickness by compensative structure assisted etch process have been successfully demonstrated this method.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"109 ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134092263","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication and Performance Optimization of the Microplasma Reactor with Composite Dielectrics","authors":"Zheng Yuan, L. Wen, Leili Cheng, Jianqiang Ma, J. Chu","doi":"10.1109/NEMS.2012.6196868","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196868","url":null,"abstract":"A microplasma reactor with composite dielectric layers for maskless micro/nano plasma etching is presented. The composite dielectric layers include the Si3N4, SiO2 and polyimide film. In order to obtain optimum dielectric properties of dielectric films, the process parameters for depositing the Si3N4 and SiO2 film were obtained through a large number of experimental data. Then the microplasma reactor having inverted pyramidal hollow cathode and metal-composite dielectric layers-metal sandwich structure, is successfully fabricated. The experiment results show that the lifetimes, stability and microdischarge characteristics of the devices are superior to those of earlier fabricated with a single polymer dielectric layer. These microplasma devices are expected to operate in the further maskless scanning plasma etching.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115704284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A free-standing and flexible parylene PCR device","authors":"P. Satsanarukkit, H. Lo, Y. Tai","doi":"10.1109/NEMS.2012.6196743","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196743","url":null,"abstract":"We present a free-standing and flexible parylene-channel PCR device that allows a simple sealing mechanism to prevent bubbling caused by PCR temperature cycling. This sealing mechanism saves complicated, time-consuming in-channel valve fabrication processes and achieves excellent sealing performance. It is proven experimentally that this new PCR device plus its unique packaging is capable of locking PCR solution in the PCR chamber at 95°C for at least 5 hours without bubbling and leaking. As a result, we have successfully obtained the on chip PCR amplification without the bubble and leaking problem.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114190509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Vibration mode localization in coupled beam-shaped resonator array","authors":"K. Chatani, Dong F. Wang, T. Ikehara, R. Maeda","doi":"10.1109/NEMS.2012.6196725","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196725","url":null,"abstract":"The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection and analyte identification. This study seeks to enhance the amount of amplitude change due to vibration mode localization with a beam shaped 3-resonator array. The preliminarily results have been discussed from view point of vibration characteristic by comparing experimental results with analytical ones, without a small mass perturbation.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116751691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Detecting vapor traces of explosives using a self-assembled mono layer on a surface-modified MEMS capacitor and CMOS electronics","authors":"D. Strle, B. Štefane, I. Muševič","doi":"10.1109/NEMS.2012.6196723","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196723","url":null,"abstract":"A miniature detection system, which is able to detect and selectively recognize different vapour traces of explosives, is presented in this article. It is based on surface-functionalised MEMS capacitive sensors and an extremely low noise integrated circuit. The instrument is sensitive and selective, consumes a minimum amount of energy, is very small and cheap to produce in large quantities, and is insensitive to mechanical influences. It is possible to detect 3ppt of TNT in the atmosphere (3 TNT molecules in 10+12 molecules of air) at 25 °C in 1 Hz bandwidth using very small volume (few mm3) and only approx 20 mA current from a 5 V supply voltage.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117126810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Analysis on 3-Dimensional spatial electric field of AFM based anodic oxidation","authors":"Zenglei Liu, N. Jiao, Zhidong Wang, Z. Dong","doi":"10.1109/NEMS.2012.6196835","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196835","url":null,"abstract":"Atomic force microscope (AFM) based anodic oxidation is an important method to fabricate nano-structures and nano-devices. To realize precise fabrication, electric field between AFM tip and substrate should be under precise control. For precise control of the electric field, a necessary topic is to find out the distribution of the spatial electric field and the relationship between the electric field and parameters. By theoretical analysis we simulated the spatial distribution of the tip/substrate electric field and analyzed the relationship between the electric field and parameters, which were verified by experiments. Our work can provide theoretic support for electric field assisted nanofabrication.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"256 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115787176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency","authors":"M. Aarts, Jia Wei, P. Sarro","doi":"10.1109/NEMS.2012.6196768","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196768","url":null,"abstract":"This paper presents the fabrication and characterization of a silicon-polymer electro-thermal out-of-plane bimorph actuator with SiC as bottom layer, for improved motion and better energy efficiency. The proposed concept improves on an earlier design using aluminum by making the bottom layer of SiC, a more robust material with a lower CTE. A process is developed to fabricate out-of-plane actuators with either Al or SiC as bottom layer. Both devices are characterized and their performances are compared. The new actuator with SiC as bottom layer shows a higher displacement (15.5μm) with less actuation voltage (4 V) and an average temperature increase on the actuator of 82°C.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122944797","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Atomic resolution nanofabrication and dynamic characterization","authors":"Litao Sun","doi":"10.1109/NEMS.2012.6196707","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196707","url":null,"abstract":"Summary form only given. Experiments on individual nanoparticles are generally difficult but can be carried out by the techniques of modern in-situ electron microscopy. With the continuous improvement of in situ techniques inside transmission electron microscope (TEM), the capabilities of TEM extend beyond structural characterization to high-precision nanofabrication and property measurement, which not only enriches the experimental methods of nanoresearch, but also provides new opportunities for the development in nanoscience and nanotechnology. Based on the idea of “setting up a nanolab inside a TEM”, we review our recent progress in atomic resolution nanofabrication and dynamic characterization of structure and properties of nanomaterials. The electron beam can be used as a tool to induce nanofabrication on an atomic scale. Selective irradiation of MWNTs with a focused electron beam can induce changes of their shape such as cutting, bending, welding and drilling a hole on them. In addition, metal crystals can be encapsulated inside graphitic nanocontainers that were designed for in-situ electron irradiation experiments. Under irradiation, the carbon shells contract and lead to compressive forces. By measuring the lattice spacings in HRTEM images of metal crystals inside graphitic shells, pressures on the order 10-20 GPa were determined. Non-hydrostatic pressure, e.g., inside collapsing nanotubes, may deform the crystals considerably. This can be used for studying the deformation behaviour of individual nanometer-sized crystals. Fig. 1 shows how a Co wire inside a carbon nanotube is deformed and extruded when the the nanotube collapses locally under electron irradiation. Another deformation cell, allowing the detailed study of crystal deformation, was designed by electron-beam structuring, as shown in Fig. 2. A 'carbon onion', encapsulating a Au crystal, was punctured by a fully focused electron beam and subsequently exposed to uniform irradiation so that the Au crystal was slowly extruded through the hole. The interaction between metal and carbon was also studied on an atomic scale by introducing Au and Pt atoms into graphene layers. Individual Au or Pt atoms were observed by HRTEM at different temperatures and their migration was monitored. Fig. 3 shows drilling a Snm-diameter hole by electron beam on graphene for third-generation gene sequencing. The mechanism of electron-beam induced high-resolution nanofabrication was also discussed.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123264625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A high efficient POM micro-methanol reformer","authors":"Hsueh-Sheng Wang, Kuo-Yang Huang, H. Peng, Yuh-Jeen Huang, F. Tseng","doi":"10.1109/NEMS.2012.6196815","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196815","url":null,"abstract":"In the present study, a novel micro-channel methanol reformer with a finger-shaped groove structure was successfully demonstrated to enhance the methanol conversion rate and the hydrogen yield. By introducing a centrifugal technique, a porous and gradient distribution of the catalyst layer thickness can be obtained inside the micro-channels so as to force the methanol steam to react sufficiently with high surface area catalysts. As the ratio of binder to catalysts varied from 60 to 0, the methanol conversion rate, hydrogen selectivity and hydrogen yield of the micro-methanol reformer at 250°C can approach ~100%, 92% and 1.56×10-5 mole min-1, respectively. Moreover, a high performance output can still be obtained even at 200°C, which is superior to our previous studies.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113965126","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A multi-view reflective three-dimensional display","authors":"J. Chuang, Kerwin Wang","doi":"10.1109/NEMS.2012.6196799","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196799","url":null,"abstract":"This research presents a novel volumetric 3D display which takes advantages on the self-assembly technology to prepare a multi-view reflective screen. The screen consists of a simple cubic metallic microsphere array. Each microsphere is well aligned to 69 independently-projected-image-pixels. This process is called pixel-mapping. The purpose of pixel-mapping process is to assign a image pixel to its own position on the reflective microsphere. It can reflect the incident lights to a predetermined orientation because of the spherical reflective surface. That can reduce the perspective phenomenon in traditional volumetric 3D display images. The testing results prove that the self-organized metallic microsphere array works well corresponded to carefully aligned and projected pixels and frames. The novel design successfully exhibit different volumetric 3D images from different viewing angles.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124297810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}