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An electro-enzymatic flexible molecular lactate sensor 一种电酶法柔性乳酸分子传感器
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196802
N. Thomas, I. Lähdesmäki, B. Parviz
{"title":"An electro-enzymatic flexible molecular lactate sensor","authors":"N. Thomas, I. Lähdesmäki, B. Parviz","doi":"10.1109/NEMS.2012.6196802","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196802","url":null,"abstract":"We present the fabrication and electrochemical characterization of an electronic molecular lactate sensor comprised of an optimized three-electrode setup on a transparent, flexible polymer substrate. The sensors are functionalized with the flavoenzyme lactate oxidase as a selective, nanoscale recognition element. They exhibit an exceptionally high sensitivity in their linear range of ~ 370 μAmM-1cm-2, a very low detection limit of ~ 5 μM, and good thermal stability, with a working electrode area of only ~ 0.19 mm2. We envision the sensors being utilized for one-time measurements of lactate levels in food or agricultural products for monitoring of their freshness, and show results of lactate level measurements for various dairy products.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125337652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy 用动态拉曼光谱预测3C-SiC悬臂梁的可靠性
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196772
Raden Dewanto, Tao Chen, R. Cheung, Zhongxu Hu, B. Gallacher, J. Hedley
{"title":"Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy","authors":"Raden Dewanto, Tao Chen, R. Cheung, Zhongxu Hu, B. Gallacher, J. Hedley","doi":"10.1109/NEMS.2012.6196772","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196772","url":null,"abstract":"We propose an extension and improvement to reliability predictions in epitaxially grown 3C-SiC cantilever beam MEMS by utilizing dynamic Raman spectroscopy to allow the gathering of Weibull fracture test data to be done directly on devices thereby taking account of actual geometrical tolerances, dynamic load conditions and effects from the microfabrication process due to high lattice and thermal mismatch between 3C-SiC and Si. In this work, 3C-SiC devices were fabricated, modeled and actuated to determine both theoretical and experimentally measured strain levels within the device during operation. Initial results indicate both characteristic Raman peaks of 3C-SiC are suitable for this characterization and measurement resolution of 0.02 cm-1 is demonstrated. As the technique is performed directly on devices, it simplifies the frequently found time consuming methodology of preparations of micron-sized specimen fracture test pieces and gives a mechanism for feedback to optimize the fabrication process.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129947057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
High quality factor parylene-based intraocular pressure sensor 高品质因子聚苯乙烯眼压传感器
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196741
J. Lin, Yu Zhao, Po-Jui Chen, Y. Tai
{"title":"High quality factor parylene-based intraocular pressure sensor","authors":"J. Lin, Yu Zhao, Po-Jui Chen, Y. Tai","doi":"10.1109/NEMS.2012.6196741","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196741","url":null,"abstract":"A new concept of the intraocular pressure (IOP) sensor design and its implantation approach are presented in this paper. A parylene-based sensing part with about 30 μm in thickness was fabricated, and then integrated with an implantation tube attached to sensor's backside pressure access hole. During the implantation, only the implantation tube was implanted into the anterior chamber to fulfill minimally invasive implantation. The IOP sensor membrane is thin and flexible so that it can attach to the cornea. Because the sensing area was exposed outside to the air all the time, the quality factor can be kept at 27-30 to maintain the sensing distance during the whole testing pressure range. The sensitivity is obtained as high as 542 ppm/mmHg while the responsivity is about 205 kHz/mmHg, which is suitable for biomedical applications.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130045030","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Separation of dendritic and T cells using electrowetting and dielectrophoresis 用电润湿和介质电泳分离树突状细胞和T细胞
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196752
Chang-An Chen, Chiun-Hsun Chen, A. Ghaemmaghami, S. Fan
{"title":"Separation of dendritic and T cells using electrowetting and dielectrophoresis","authors":"Chang-An Chen, Chiun-Hsun Chen, A. Ghaemmaghami, S. Fan","doi":"10.1109/NEMS.2012.6196752","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196752","url":null,"abstract":"The research of immune cells is fundamental to many biological studies. Dendritic cells have the ability to induce a primary immune response in resting naive T cells. The aim of this work is to separate the activated T cells from dendritic cells on a digital microfluidic device where droplets are driven by electrowetting-on-dielectric (EWOD). The cells suspended in EWOD-driven droplets are separated and concentrated using a high frequency electric signal which generates non-uniform electric fields and dielectrophoresis (DEP) forces exerting on dendritic cells and T cells. Separation and concentration of dendritic cells and T cells are demonstrated in a droplet using EWOD and DEP.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128870386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Electrical performance of micro-assembled beads under different temperatures and loadings 微组装珠在不同温度和载荷下的电性能
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196811
Y. Tzeng, Kerwin Wang
{"title":"Electrical performance of micro-assembled beads under different temperatures and loadings","authors":"Y. Tzeng, Kerwin Wang","doi":"10.1109/NEMS.2012.6196811","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196811","url":null,"abstract":"Micro-assembly is an efficient tool to build electrical connections with metallic micro-beads. This process uses patterned photoresist AZ1512 as an adhesion for micro-bead arrangement. The assembled beads is immobilized with underfill embedment (ZYMET 2821). This method allows arbitrary geometric pattern designs. All of these processes can be completed below 150°C. This paper characterizes the electrical performance of these densely-arranged anisotropic conductive tunnels under different temperatures and stresses loading Experiment results suggest that using photoresist to assemble micro conductive beads with underfill immobilization can yield stable performance.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"454 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115934145","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography 基于金属接触转移光刻的局域表面等离子体共振阵列金属微/纳米粒子
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196788
H. Y. Chung, C. Y. Wu, C. H. Chen, Y. C. Lee
{"title":"Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography","authors":"H. Y. Chung, C. Y. Wu, C. H. Chen, Y. C. Lee","doi":"10.1109/NEMS.2012.6196788","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196788","url":null,"abstract":"In this study, we demonstrate a rapidly, low cost, and mass production process to fabricate arrayed metallic nanoparticles on a variety of substrates based on contact transfer and metal mask embedded lithography (CMEL). A hexagonal arrayed metallic nanoparticles deployed on ITO/glass substrate with sub-micron periodicity is achieved. It is observed in optical transmittance measurements that noble metallic arrayed nanoparticles deployed on ITO/glass substrate result in a spectrally narrowband of extinction in visible range, and is in good agreement with the simulated results using finite-element method (FEM). It is found that the narrowband extinction spectrum is associated with electromagnetic field coupling between the arrayed metallic nanostructures and the ITO layer. This electromagnetic field coupling induces significant plasmon resonance in the ITO layer underneath the arrayed metallic nanostructures. Based on this observed phenomenon and our innovative large-area nano-fabrication processes, optoelectronic devices with arrayed metallic nanostructures can be easily designed and developed.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"172 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116020256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process 采用CMOS MEMS工艺设计了微静电变换器的热敏开关和可变电容
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196879
J. Chiou, Lei-Chun Chou, You-Liang Lai, Sheng-Chieh Huang
{"title":"Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process","authors":"J. Chiou, Lei-Chun Chou, You-Liang Lai, Sheng-Chieh Huang","doi":"10.1109/NEMS.2012.6196879","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196879","url":null,"abstract":"This paper focuses on implementing a novel thermal switch and variable capacitance design by using commercially available CMOS MEMS process which can approach in a micro electrostatic converter system. In this system, there are two major parts. First is the variable capacitance, and the second is the thermal switch. In the variable capacitance, it implement by UMC 0.18μm one-poly seven-metal (1P7M) CMOS MEMS process. In the post-process, the silicon-oxidation have been released and the gap between two metal layers filled with PDMS (Polydimethylsiloxane). Filling with PDMS is to significantly increase Cmax.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121335693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material 一种压阻式法向和剪切力传感器，采用液态金属合金作为测量材料
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196822
Xiaomei Shi, Ching-Hsiang Cheng, C. Chao, Like Wang, Yongping Zheng
{"title":"A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material","authors":"Xiaomei Shi, Ching-Hsiang Cheng, C. Chao, Like Wang, Yongping Zheng","doi":"10.1109/NEMS.2012.6196822","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196822","url":null,"abstract":"We present a novel normal and shear force sensor by using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a polydimethylsiloxane (PDMS) substrate. By using liquid metal alloy as gauge material, it can detect large forces without breaking the sensor wires. Since the liquid-metal piezoresistors deform with the elastomeric substrate, shear and normal forces can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair of symmetric piezoresistors, which is screen-printed on the cavity of PDMS substrate with tilt angle around 30° to be sensitive to both normal and shear forces. Normal force will compress both piezoresistors as common mode while shear force will shorten one piezoresistor but elongate the other as differential mode. The testing results demonstrate the sensitivity of the force sensor in both normal and shear directions. The hysteresis of the force sensor was also measured.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121162624","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Piezoelectrically actuated Circular Diaphragm Resonator mass sensors 压电驱动的圆膜片谐振器质量传感器
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196726
N. Keegan, J. Hedley, Zhongxu Hu, J. Spoors, W. Waugh, B. Gallacher, C. McNeil
{"title":"Piezoelectrically actuated Circular Diaphragm Resonator mass sensors","authors":"N. Keegan, J. Hedley, Zhongxu Hu, J. Spoors, W. Waugh, B. Gallacher, C. McNeil","doi":"10.1109/NEMS.2012.6196726","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196726","url":null,"abstract":"This work reports a piezoelectrically driven and sensed Circular Diaphragm Resonator (CDR) mass sensor. The work is a development of an electrostatically-activated version and aims to simplify the microfabrication process and signal recovery electronics. A range of device geometries were fabricated and both optical and electrical testing performed to assess performance. Electrical sensing, using a charge amplifier, achieved a signal to noise ratio of 10:1 at 6 MHz and a preliminary sensitivity of 55 fg Hz-1. The devices are nano-enabled as biosensors using a high resolution bio-molecule patterning technique and preliminary results are introduced in this regard.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"192 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116403643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Electrowetting droplets investigated with smoothed particle hydrodynamics and moving least squares 用光滑粒子流体力学和移动最小二乘法研究电润湿液滴
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196780
D. Weiss, A. Greiner, J. Lienemann, J. Korvink
{"title":"Electrowetting droplets investigated with smoothed particle hydrodynamics and moving least squares","authors":"D. Weiss, A. Greiner, J. Lienemann, J. Korvink","doi":"10.1109/NEMS.2012.6196780","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196780","url":null,"abstract":"The numerical analysis of oscillating electrowetting droplets is challenging predominantly due to the frequent change in topology of the phases involved and the coupling of electrostatic forces into the system. Damped systems require an even larger number of oscillations or simulation time steps, respectively, until resonance becomes apparent, and an efficient model is required.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127044353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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