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Advanced Etch Technology and Process Integration for Nanopatterning XII最新文献

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Advanced process technologies for photonics waveguide patterning 光子波导图形的先进工艺技术
Advanced Etch Technology and Process Integration for Nanopatterning XII Pub Date : 2023-06-20 DOI: 10.1117/12.2657729
E. Geiss, M. Aminpur, R. Sporer, V. Seshachalam, P. Timoney, Brendan O'Brien, J. LaRose, E. Barlaz, Cameron Werner, Katie Lutker-Lee, Luis Fernandez, Brian Pfeifer, C. Mbanaso, Yan Shao, Angélique Raley
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引用次数: 0
Front Matter: Volume 12499 封面:第12499卷
Advanced Etch Technology and Process Integration for Nanopatterning XII Pub Date : 2023-05-21 DOI: 10.1117/12.2685109
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引用次数: 0
Ultra-low energy radical treatments for advanced 3D device structures 先进3D器件结构的超低能量根治
Advanced Etch Technology and Process Integration for Nanopatterning XII Pub Date : 2023-04-30 DOI: 10.1117/12.2659121
Seung Park, Yong-Hee Choi, David Lo, M. Kawaguchi, C. Das
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引用次数: 0
Radical etching of high-k and low-k dielectrics for three-dimension device manufacturing with microwave-ECR etching system 微波- ecr蚀刻系统用于三维器件制造的高k和低k介质自由基蚀刻
Advanced Etch Technology and Process Integration for Nanopatterning XII Pub Date : 2023-04-30 DOI: 10.1117/12.2656040
Yusuke Nakatani, Yasushi Sonoda, T. Iwase, Yi‐Ying Lin, Masashi Kawabata, Motohiro Tanaka
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引用次数: 0
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