{"title":"Front Matter: Volume 12499","authors":"","doi":"10.1117/12.2685109","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":156510,"journal":{"name":"Advanced Etch Technology and Process Integration for Nanopatterning XII","volume":"468 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Etch Technology and Process Integration for Nanopatterning XII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2685109","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}