微波- ecr蚀刻系统用于三维器件制造的高k和低k介质自由基蚀刻

{"title":"微波- ecr蚀刻系统用于三维器件制造的高k和低k介质自由基蚀刻","authors":"Yusuke Nakatani, Yasushi Sonoda, T. Iwase, Yi‐Ying Lin, Masashi Kawabata, Motohiro Tanaka","doi":"10.1117/12.2656040","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":156510,"journal":{"name":"Advanced Etch Technology and Process Integration for Nanopatterning XII","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Radical etching of high-k and low-k dielectrics for three-dimension device manufacturing with microwave-ECR etching system\",\"authors\":\"Yusuke Nakatani, Yasushi Sonoda, T. Iwase, Yi‐Ying Lin, Masashi Kawabata, Motohiro Tanaka\",\"doi\":\"10.1117/12.2656040\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":156510,\"journal\":{\"name\":\"Advanced Etch Technology and Process Integration for Nanopatterning XII\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Advanced Etch Technology and Process Integration for Nanopatterning XII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2656040\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Etch Technology and Process Integration for Nanopatterning XII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2656040","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}