E. Geiss, M. Aminpur, R. Sporer, V. Seshachalam, P. Timoney, Brendan O'Brien, J. LaRose, E. Barlaz, Cameron Werner, Katie Lutker-Lee, Luis Fernandez, Brian Pfeifer, C. Mbanaso, Yan Shao, Angélique Raley
{"title":"Advanced process technologies for photonics waveguide patterning","authors":"E. Geiss, M. Aminpur, R. Sporer, V. Seshachalam, P. Timoney, Brendan O'Brien, J. LaRose, E. Barlaz, Cameron Werner, Katie Lutker-Lee, Luis Fernandez, Brian Pfeifer, C. Mbanaso, Yan Shao, Angélique Raley","doi":"10.1117/12.2657729","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":156510,"journal":{"name":"Advanced Etch Technology and Process Integration for Nanopatterning XII","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Etch Technology and Process Integration for Nanopatterning XII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2657729","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}