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2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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A shape memory alloy thick film actuator array for narrow pitched planar tactile display device 一种用于窄斜平面触觉显示装置的形状记忆合金厚膜致动器阵列
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758244
Hiroshi Yanatori, T. Mineta, S. Takeuchi, Konomu Abe
{"title":"A shape memory alloy thick film actuator array for narrow pitched planar tactile display device","authors":"Hiroshi Yanatori, T. Mineta, S. Takeuchi, Konomu Abe","doi":"10.1109/NEMS.2016.7758244","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758244","url":null,"abstract":"This paper presents a MEMS type shape memory alloy (SMA) thick film actuator array for a tactile display which renders texture to human finger skin by mechanical stimulations. We propose a planar tactile display combined with SMA thick film actuator array (5 × 5 array, 1 mm pitch). The deflectable planar spring-shaped SMA actuators with micro-heater circuits were batch-fabricated from a 10-μm thick SMA film. Fabrication process techniques were newly developed, and then the SMA actuator array device was realized. The generated force and displacement of the SMA actuator at high and room temperatures were 40 mN and 25 mN, respectively, at initial deflection of 100 μm. With a bias spring combination, the reversible force generation and displacement can be estimated as 5 mN and 20 μm which are large enough for mechanical stimulation to human skin.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122553013","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Cubical photonic structures by means of ion beam assisted robotic assembly 离子束辅助机器人装配的立方体光子结构
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758248
Waldemar Klauser, S. Zimmermann, M. Bartenwerfer, S. Fatikow
{"title":"Cubical photonic structures by means of ion beam assisted robotic assembly","authors":"Waldemar Klauser, S. Zimmermann, M. Bartenwerfer, S. Fatikow","doi":"10.1109/NEMS.2016.7758248","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758248","url":null,"abstract":"Fabrication of tailored photonic structures with sufficient precision is a major topic in photonics since decades. However, until now, the assembly of photonic structures in order to control light propagation in all three spatial dimensions remains challenging. This paper presents a reliable approach for fabricating three-dimensional structures consisting of individually stacked colloidal particles. The combination of a robotic dual-probe setup inside a scanning electron microscope and the purposeful use of ion beam based etching and deposition techniques allows to fabricate on-demand three-dimensional photonic structures with cubic geometry. The advantages and limits of this technique are highlighted with respect to further application scenarios.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131987308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Vibration and large deformation simulation analysis of graphene membrane for nanomechanical applications 石墨烯薄膜在纳米机械应用中的振动和大变形模拟分析
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758234
Ping Li, Rahman Hebibul, Libo Zhao, Zhikang Li, Yulong Zhao, Zhuangde Jiang
{"title":"Vibration and large deformation simulation analysis of graphene membrane for nanomechanical applications","authors":"Ping Li, Rahman Hebibul, Libo Zhao, Zhikang Li, Yulong Zhao, Zhuangde Jiang","doi":"10.1109/NEMS.2016.7758234","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758234","url":null,"abstract":"This paper reports an efficient and accurate simulation method for vibrations and deformations of single- and multi-layer graphene membranes. In this method, a graphene membrane is modelled by a 2-D plate element whose thickness is changeable in COMSOL Multiphysics. The graphene is regarded as a linear isotropic elastic material, and the load-deformation behaviour is approximated as a doubly clamped bridge model or a clamped circular membrane. By comparing the simulation results using 2-D plate and another SHELL element with the experiment data respectively, we find that the average errors of 1st-order frequency using 2-D plate and SHELL element for the same membrane are 4% and 43%. Therefore, the simulation method using 2-D plate element is precise and efficient for the nanomechanical analysis of graphene sheets. With the proposed simulation method, the vibrations and nonlinear deformations of the circular and square graphene membranes are analyzed with different dimensions and thicknesses. These simulation results can be the guideline for the nanomechanical device design.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126531320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism 一种两级微杠杆机构的MEMS压电平面内谐振加速度计
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758289
Yixiang Wang, Hong Ding, Xianhao Le, Jin Xie
{"title":"A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism","authors":"Yixiang Wang, Hong Ding, Xianhao Le, Jin Xie","doi":"10.1109/NEMS.2016.7758289","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758289","url":null,"abstract":"In this paper, we firstly present a MEMS (microelectromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity of the resonant accelerometer. The preliminary characterization of the device was tested in a vacuum chamber at the pressure of 4 mTorr. The sensitivity of the device is 28.4Hz/g at the base frequency around 141 kHz (201 ppm/g), which is higher than the previously reported data.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126226601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology 采用多层金属技术设计MEMS加速度计的弹簧常数
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758281
D. Yamane, T. Konishi, Teruaki Safu, H. Toshiyoshi, M. Sone, K. Masu, K. Machida
{"title":"A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology","authors":"D. Yamane, T. Konishi, Teruaki Safu, H. Toshiyoshi, M. Sone, K. Masu, K. Machida","doi":"10.1109/NEMS.2016.7758281","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758281","url":null,"abstract":"We report an approach to design spring constant arranged for MEMS accelerometers fabricated by multi-layer metal technology. The proposed multi-layer metal structure can control the spring constant of serpentine flexure to suspend high-density proof mass. Moreover, the multi-layer metal configuration enables us to obtain high degree of freedom of spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics of the proposed micromechanical springs were consistent with the design values.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"10 5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114278159","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Probing crystallography-induced anisotropy and periodic property of atomic friction in MoS2 via fast Fourier transform processing 利用快速傅立叶变换处理探测二硫化钼原子摩擦的晶体诱导各向异性和周期性
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758298
M. Li, Lianqing Liu, N. Jiao, Peng Yu, N. Xi, Yuechao Wang
{"title":"Probing crystallography-induced anisotropy and periodic property of atomic friction in MoS2 via fast Fourier transform processing","authors":"M. Li, Lianqing Liu, N. Jiao, Peng Yu, N. Xi, Yuechao Wang","doi":"10.1109/NEMS.2016.7758298","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758298","url":null,"abstract":"An theoretical and experimental study on friction anisotropy and 120 degree periodicity variation in atomic friction of MoS2 is presented in this paper. To clearly clarify these properties, fast Fourier transform(FFT) is utilized by Matlab software to perform the frequency variation of the actual friction signal wave acquired from the lateral friction experiment. Characteristic of the computed frequency ratios periodically varying with lattice orientation is clearly observed and well explained in terms of the periodical variation in atomic friction. The consistency between the theoretical analysis and experimental result ultimately verify the validity of the assumption. The discovery of this paper promises future application in real-time crystallographic orientation detecting.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124202934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Digital electrostatic acoustic transducer array 数字静电声换能器阵列
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758238
A. Arevalo, D. Castro, D. Conchouso, J. Kosel, I. Foulds
{"title":"Digital electrostatic acoustic transducer array","authors":"A. Arevalo, D. Castro, D. Conchouso, J. Kosel, I. Foulds","doi":"10.1109/NEMS.2016.7758238","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758238","url":null,"abstract":"In this paper we present the fabrication and characterization of an array of electrostatic acoustic transducers. The array is micromachined on a silicon wafer using standard micro-machining techniques. Each array contains 2n electrostatic transducer membranes, where “n” is the bit number. Every element of the array has a hexagonal membrane shape structure, which is separated from the substrate by 3μm air gap. The membrane is made out 5μm thick polyimide layer that has a bottom gold electrode on the substrate and a gold top electrode on top of the membrane (250nm). The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with 90 V giving and sound output level as high as 35dB, while actuating all the elements at the same time.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115706137","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Removal of aqueous metals from wastewater using porous functional heterocyclic aromatic amines 利用多孔功能杂环芳香族胺去除废水中的水金属
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758280
R. Hsu, Hung-Lun Liao, Pen-Cheng Wang
{"title":"Removal of aqueous metals from wastewater using porous functional heterocyclic aromatic amines","authors":"R. Hsu, Hung-Lun Liao, Pen-Cheng Wang","doi":"10.1109/NEMS.2016.7758280","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758280","url":null,"abstract":"In this work, the applicability of poly aromatic amines (PAA) for the removal of gold, copper and palladium from various water samples has been investigated. Batch experiments were performed to realize the effect of relative nitrogen/carbon composition on the ability of PAA for removal of aqueous metals to achieve quantitative separation of metal. Besides, the effect of monomer structures on the morphology of polymerized aromatic amines was studied. Several polymerized aromatic amines were prepared by oxidative chemical. ICP-MS was used to determine the content of matals in the initial and final sample solutions to calculate metal uptake. The morphology was examined using scanning electron microscopy. Besides, the C/N ratio of the polymers was investigated by element analysis (EA).","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"289 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123270207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices 用于高频声学器件的薄LiTaO3上的A1模式Lamb波
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758293
Najoua Assila, M. Kadota, Y. Ohashi, Shuji Tanaka
{"title":"A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices","authors":"Najoua Assila, M. Kadota, Y. Ohashi, Shuji Tanaka","doi":"10.1109/NEMS.2016.7758293","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758293","url":null,"abstract":"The Lamb waves and horizontal shear waves' propagation in LiTaO<sub>3</sub> thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO<sub>3</sub> thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A<sub>1</sub> mode Lamb wave resonators in (0°, 39°, 0°) LiTaO<sub>3</sub>'s thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A<sub>1</sub> mode Lamb wave close to (0°, 30°, 0°) LiTaO<sub>3</sub> thin plate is suitable for high frequency devices.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"114 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123375863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of a graphene capacitive pressure sensor for ultra-low pressure detection 用于超低压力检测的石墨烯电容式压力传感器的设计
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI: 10.1109/NEMS.2016.7758230
Yangxi Zhang, Yiming Gui, Fanrui Meng, Chengchen Gao, Y. Hao
{"title":"Design of a graphene capacitive pressure sensor for ultra-low pressure detection","authors":"Yangxi Zhang, Yiming Gui, Fanrui Meng, Chengchen Gao, Y. Hao","doi":"10.1109/NEMS.2016.7758230","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758230","url":null,"abstract":"This paper reports the design and theoretical calculation of a capacitive ultra-low pressure sensor, which is based on circular suspend graphene diaphragm array. The atom scale thickness and high mechanical strength of suspend graphene diaphragm both contribute to ultra-low pressure measure range. As the size of single suspend graphene diaphragm is limited by fabrication process, a parallel connected sensor array is designed to achieve detectable capacitance change and redundancy. In calculation, a sensor array with 40,000 5μm radius suspend graphene diaphragm cells in 4mm×4mm size can provide 288fF/Pa sensitivity to pressure load.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129072150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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