一种两级微杠杆机构的MEMS压电平面内谐振加速度计

2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI:10.1109/NEMS.2016.7758289

Yixiang Wang, Hong Ding, Xianhao Le, Jin Xie

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引用次数: 2

摘要

本文首先提出了一种具有两级微杠杆机构的MEMS(微机电系统)压电平面内谐振加速度计。双端音叉(DETF)谐振器是用氮化铝(AlN)压电换能器驱动和传感的。为了提高谐振式加速度计的灵敏度，提出了优化的DETF谐振腔结构和两级微杠杆机构。在4 mTorr压力的真空室中对该器件进行了初步表征。该装置在基频约141 kHz (201 ppm/g)时的灵敏度为28.4Hz/g，高于先前报道的数据。

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A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism

In this paper, we firstly present a MEMS (microelectromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity of the resonant accelerometer. The preliminary characterization of the device was tested in a vacuum chamber at the pressure of 4 mTorr. The sensitivity of the device is 28.4Hz/g at the base frequency around 141 kHz (201 ppm/g), which is higher than the previously reported data.

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2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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