采用多层金属技术设计MEMS加速度计的弹簧常数

2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI:10.1109/NEMS.2016.7758281

D. Yamane, T. Konishi, Teruaki Safu, H. Toshiyoshi, M. Sone, K. Masu, K. Machida

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引用次数: 3

摘要

本文报道了一种多层金属制造的MEMS加速度计中弹簧常数的设计方法。所提出的多层金属结构可以控制蛇形弯曲的弹簧常数，以悬浮高密度的防块。此外，多层金属结构使我们能够在不影响MEMS加速度计性能的情况下获得弹簧常数设计的高度自由度。制作了一个概念验证装置，所提出的微机械弹簧的测量特性与设计值一致。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology

We report an approach to design spring constant arranged for MEMS accelerometers fabricated by multi-layer metal technology. The proposed multi-layer metal structure can control the spring constant of serpentine flexure to suspend high-density proof mass. Moreover, the multi-layer metal configuration enables us to obtain high degree of freedom of spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics of the proposed micromechanical springs were consistent with the design values.

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来源期刊

2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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