A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices

Najoua Assila, M. Kadota, Y. Ohashi, Shuji Tanaka
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Abstract

The Lamb waves and horizontal shear waves' propagation in LiTaO3 thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO3 thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A1 mode Lamb wave resonators in (0°, 39°, 0°) LiTaO3's thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A1 mode Lamb wave close to (0°, 30°, 0°) LiTaO3 thin plate is suitable for high frequency devices.
用于高频声学器件的薄LiTaO3上的A1模式Lamb波
研究了兰姆波和水平横波在LiTaO3薄板中的传播与欧拉角的关系。速度和机电耦合系数在很大程度上取决于板的厚度。在(0°,30°,0°)附近,LiTaO3薄板具有高速度和适合高频滤波器的耦合系数。作者在(0°,39°,0°)LiTaO3薄板上制备了A1模Lamb波谐振器。用网络分析仪和超声显微镜测量了兰姆波速度和漏兰姆波速度。实测速度与有限元计算速度一致。获得了高于20,000 m/s的速度。结果表明,靠近(0°,30°,0°)LiTaO3薄板的A1模兰姆波适用于高频器件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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