SPIE MOEMS-MEMS最新文献_第5页

Toward sub-10-nm resolution zone plates using the overlay nanofabrication processes 采用覆盖纳米工艺制备亚10nm分辨率的带片

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.768878

W. Chao, E. Anderson, P. Fischer, Donghyun Kim

引用次数: 11

Fabrication and testing of plasmonic optimized transmission and reflection coatings 等离子体优化传输和反射涂层的制备和测试

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.763921

A. Cruz-Cabrera, L. Basilio, D. Peters, J. Wendt, S. Kemme, S. Samora

{"title":"Fabrication and testing of plasmonic optimized transmission and reflection coatings","authors":"A. Cruz-Cabrera, L. Basilio, D. Peters, J. Wendt, S. Kemme, S. Samora","doi":"10.1117/12.763921","DOIUrl":"https://doi.org/10.1117/12.763921","url":null,"abstract":"We designed, fabricated, and tested surface-plasmon-based transmissive coatings in the MWIR (mid wave infrared) and LWIR (long wave infrared). This method offers certain advantages over current coatings technologies such as thin-film stacks and two-dimensional surface structuring (e.g. motheyes) while exploring an entirely different physical mechanism for achieving transmission. Thin-film stack technology relies on interference between layers of the stack, and often many layers are required for high efficiency performance. Two-dimensional surface structuring can optimize transmission over a broad spectral and angular domain1. Here the physical mechanism is an effective index matching between air and the substrate due to subwavelength surface features, such as tall pyramids. These pyramids must have a high-aspect ratio, resulting in a surface of many tall thin features, which may not be mechanically robust. In this work, we created a transmissive surface out of a metal skin perforated with an array of subwavelength apertures. The surface is the infrared analog of a frequency selective surface (FSS) common in the microwave regime. Such perforated metal surfaces are predicted to have nearly 100% transmission over selected wavelength and angular ranges. These ranges are determined by array geometry, period, and aperture size and shape, allowing the designer considerable freedom. Array geometry and aperture shape were investigated for tailoring spectral features.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"181 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124524740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7

Frontiers in device engineering: synthesis for nonintuitive design 器件工程前沿:非直觉设计的综合

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.769264

A. Levi

引用次数: 0

Dry film process development for electroplating and lift-off of metal layers 电镀及金属层剥离干膜工艺的发展

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.768611

P. R. Kanikella, M. O’Keefe, Chang-soo Kim

引用次数: 3

Mechanics of the dynamic release process for stiction failed microcantilever beams using structural vibrations 基于结构振动的粘性失效微悬臂梁动态释放过程力学

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.783835

Amit Savkar, K. D. Murphy

引用次数: 4

Cytometric biochips with optically active surfaces for spatial engineering of fluorescence excitation 具有光学活性表面的荧光激发空间工程细胞生物芯片

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.763645

H. Summers, R. Errington, Paul J. Smith, D. Matthews, J. Leary

引用次数: 0

Micromachining of a fiber-to-waveguide coupler using grayscale lithography and through-wafer etch 采用灰度光刻和通晶圆蚀刻的光纤-波导耦合器的微加工

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.764036

T. Dillon, M. Zablocki, S. Shi, J. Murakowski, D. Prather

{"title":"Micromachining of a fiber-to-waveguide coupler using grayscale lithography and through-wafer etch","authors":"T. Dillon, M. Zablocki, S. Shi, J. Murakowski, D. Prather","doi":"10.1117/12.764036","DOIUrl":"https://doi.org/10.1117/12.764036","url":null,"abstract":"For some time, the micro-optics and photonics fields have relied on fabrication processes and technology borrowed from the well-established silicon integrated circuit industry. However, new fabrication methodologies must be developed for greater flexibility in the machining of micro-optic devices. To this end, we have explored grayscale lithography as an enabler for the realization of such devices. This process delivers the ability to sculpt materials arbitrarily in three dimensions, thus providing the flexibility to realize optical surfaces to shape, transform, and redirect the propagation of light efficiently. This has opened the door for new classes of optical devices. As such, we present a fiber-to-waveguide coupling structure utilizing a smoothly contoured lensing surface in the device layer of a silicon-on insulator (SOI) wafer, fabricated using grayscale lithography. The structure collects light incident normally to the wafer from a singlemode optical fiber plugged through the back surface and turns the light into the plane of the device layer, focusing it into a single-mode waveguide. The basis of operation is total internal reflection, and the device therefore has the potential advantages of providing a large bandwidth, low polarization sensitivity, high efficiency, and small footprint. The structure was optimized with a simulated annealing algorithm in conjunction with two-dimensional finite-difference time-domain (FDTD) simulation accelerated on the graphics processing unit (GPU), and achieves a theoretical efficiency of approximately seventy percent, including losses due to Fresnel reflection from the oxide/silicon interface. Initial fabrication results validate the principle of operation. We discuss the grayscale fabrication process as well as the through-wafer etch for mechanical stabilization and alignment of the optical fiber to the coupling structure. Refinement of the through-wafer etch process for high etch rate and appropriate sidewall taper are addressed.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130937146","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

Noninstrumented nucleic acid amplification assay 无仪器核酸扩增试验

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.763650

B. Weigl, G. Domingo, Jay L Gerlach, Dennis Tang, D. Harvey, Nick Talwar, Alex Fichtenholz, Bill van Lew, P. Labarre

{"title":"Noninstrumented nucleic acid amplification assay","authors":"B. Weigl, G. Domingo, Jay L Gerlach, Dennis Tang, D. Harvey, Nick Talwar, Alex Fichtenholz, Bill van Lew, P. Labarre","doi":"10.1117/12.763650","DOIUrl":"https://doi.org/10.1117/12.763650","url":null,"abstract":"We have developed components of a diagnostic disposable platform that has the dual purpose of providing molecular diagnostics at the point of care (POC) as well as stabilizing specimens for further analysis via a centralized surveillance system. This diagnostic is targeted for use in low-resource settings by minimally trained health workers. The disposable device does not require any additional instrumentation and will be almost as rapid and simple to use as a lateral flow strip test - yet will offer the sensitivity and specificity of nucleic acid amplification tests (NAATs). The low-cost integrated device is composed of three functional components: (1) a sample-processing subunit that generates clean and stabilized DNA from raw samples containing nucleic acids, (2) a NA amplification subunit, and (3) visual amplicon detection sub-unit. The device integrates chemical exothermic heating, temperature stabilization using phase-change materials, and isothermal nucleic acid amplification. The aim of developing this system is to provide pathogen detection with NAAT-level sensitivity in low-resource settings where there is no access to instrumentation. If a disease occurs, patients would be tested with the disposable in the field. A nucleic acid sample would be preserved within the spent disposable which could be sent to a central laboratory facility for further analysis if needed.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126585348","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 11

Manipulating T-junction chip for the generation of uniform O/W and W/O emulsions 操纵t结芯片生成均匀的O/W和W/O乳剂

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.771516

C. Yeh, Sheng-Ji Lee, Meng Sun, Q. Fang, Yu-Cheng Lin

{"title":"Manipulating T-junction chip for the generation of uniform O/W and W/O emulsions","authors":"C. Yeh, Sheng-Ji Lee, Meng Sun, Q. Fang, Yu-Cheng Lin","doi":"10.1117/12.771516","DOIUrl":"https://doi.org/10.1117/12.771516","url":null,"abstract":"The purpose of this study is to generate monodisperse oil-in-water (O/W) and water-in-oil (W/O) emulsions using microfluidic T-junction. The materials of poly methyl methacrylate (PMMA) (hydrophobic), polydimethylsiloxane (PDMS) (hydrophobic) and glass (hydrophilic) were employed for microfluidic chip fabrication. Our strategy is based on the shear focus effect and sheath effect (focusing) to form uniform self-assembling sphere structures, the so-called O/W and W/O emulsions, in the T-junction microchannel. Results show that the size from 31 μm to 43 μm in diameter of O/W emulsions was generated by using the glass-based microfluidic chip. In addition, results show that the size from 70 μm to 220 µm of W/O emulsions was available by utilizing the PMMA-based microfluidic chip. These W/O emulsions were further applied to Ca-alginate microparticles (Ca-alg MPs). And the results also show that the size from 410 μm to 700 μm of UV-Photopolymerized microparticles was available by utilizing the PDMS-based microfluidic chip. The proposed microfluidic chips are capable of generating relatively uniform micro-droplets and have the advantages of actively controlling the droplet diameter, and having a simple and low cost process, with a high throughput.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"333 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115980639","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Study of Ag-In solder as low temperature wafer bonding intermediate layer 将 Ag-In 焊料用作低温晶片键合中间层的研究

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI: 10.1117/12.762046

R. I. Made, C. Gan, Chengkuo Lee, L. Yan, A. Yu, S. Yoon, J. Lau

引用次数: 6