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Optical Interference Coatings Conference (OIC) 2019最新文献

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Optimizing the Deposition of Sputtered Gold Island Films with Time Derivative Surface Reflectance 利用时间导数表面反射率优化溅射金岛膜的沉积
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.TA.9
A. Riera, B. Baloukas, O. Zabeida, L. Martinu
{"title":"Optimizing the Deposition of Sputtered Gold Island Films with Time Derivative Surface Reflectance","authors":"A. Riera, B. Baloukas, O. Zabeida, L. Martinu","doi":"10.1364/OIC.2019.TA.9","DOIUrl":"https://doi.org/10.1364/OIC.2019.TA.9","url":null,"abstract":"Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130352253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Recent advances in Cr-based interference coatings for EUV and soft x-ray optics 用于EUV和软x射线光学的cr基干涉涂层的最新进展
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.FB.1
F. Delmotte, C. Burcklen, E. Meltchakov, R. Soufli, J. Rebellato, A. Jérôme, S. Rossi
{"title":"Recent advances in Cr-based interference coatings for EUV and soft x-ray optics","authors":"F. Delmotte, C. Burcklen, E. Meltchakov, R. Soufli, J. Rebellato, A. Jérôme, S. Rossi","doi":"10.1364/OIC.2019.FB.1","DOIUrl":"https://doi.org/10.1364/OIC.2019.FB.1","url":null,"abstract":"We present recent advances in the development of Chromium-based interference coatings in the EUV/soft x-ray range. We achieved breakthroughs in coating efficiency by using advanced concepts including 3-material multilayers and interface engineering.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130584844","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Characterization of transmittance, reflectance, and optical scattering of high-performance interference filters in the visible and near-infrared spectral regions 高性能干涉滤光片在可见光和近红外光谱区的透射率、反射率和散射特性
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.THD.1
M. Zerrad, M. Lequime, C. Amra
{"title":"Characterization of transmittance, reflectance, and optical scattering of high-performance interference filters in the visible and near-infrared spectral regions","authors":"M. Zerrad, M. Lequime, C. Amra","doi":"10.1364/OIC.2019.THD.1","DOIUrl":"https://doi.org/10.1364/OIC.2019.THD.1","url":null,"abstract":"SALSA instrument allows an ultimate metrology of transmittance, reflectance and scattering functions of high performance optical coatings in the visible & near infrared range. Accuracy of measurements emphasizes an excellent agreement with the models.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131019431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Improving film stress and surface roughness by using a plasma source in magnetron sputtering 磁控溅射中等离子体源改善薄膜应力和表面粗糙度
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.WC.4
S. S. Thöny, S. Gees, E. Schüngel
{"title":"Improving film stress and surface roughness by using a plasma source in magnetron sputtering","authors":"S. S. Thöny, S. Gees, E. Schüngel","doi":"10.1364/OIC.2019.WC.4","DOIUrl":"https://doi.org/10.1364/OIC.2019.WC.4","url":null,"abstract":"Equipping a magnetron sputter deposition system with an additional plasma source allows to improve surface roughness and film stress independent of the sputter parameters. This will be shown at the example of a HfO2/SiO2 UV mirror and of hydrogenated amorphous silicon.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"215 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123250575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Design of Multilayer Coatings Using Deep Search Methods 利用深度搜索方法设计多层涂层
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.TC.2
M. Trubetskov
{"title":"Design of Multilayer Coatings Using Deep Search Methods","authors":"M. Trubetskov","doi":"10.1364/OIC.2019.TC.2","DOIUrl":"https://doi.org/10.1364/OIC.2019.TC.2","url":null,"abstract":"New deep search needle optimization, gradual evolution, and design cleaner methods are proposed. Novel methods have an outstanding performance and allow obtaining solutions of the most challenging design problems from scratch.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123800004","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Improvement of uniformities of thickness and incident angles of particles by swinging rotation motion on reactive sputtering deposition 摆动旋转运动改善反应溅射沉积中颗粒厚度和入射角的均匀性
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.WD.4
M. Akiba
{"title":"Improvement of uniformities of thickness and incident angles of particles by swinging rotation motion on reactive sputtering deposition","authors":"M. Akiba","doi":"10.1364/OIC.2019.WD.4","DOIUrl":"https://doi.org/10.1364/OIC.2019.WD.4","url":null,"abstract":"On reactive magnetron sputtering, we developed swinging rotation motion. It improves uniformities of thickness and incident angles of particles. The uniformities and the area size are easily adjustable with the range of the swinging motion.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116289481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The reflectance of the Al+MgF2 film in the Far-Ultraviolet Al+MgF2薄膜的远紫外反射率
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.FB.3
Jinyan Wang, Jinlong Zhang, Hongfei Jiao, Cheng Xinbin, Wang Zhanshan
{"title":"The reflectance of the Al+MgF2 film in the Far-Ultraviolet","authors":"Jinyan Wang, Jinlong Zhang, Hongfei Jiao, Cheng Xinbin, Wang Zhanshan","doi":"10.1364/OIC.2019.FB.3","DOIUrl":"https://doi.org/10.1364/OIC.2019.FB.3","url":null,"abstract":"The Al mirror protected with a fluoride film was produced, and the effect of the annealing to the reflectance was investigated. It showed the reflectance >85% in the wavelength of 121.6nm has been achieved.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"140 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116479340","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mechanical and thermal properties of Si/SiO2 narrow-band mid-infrared filters for space applications 用于空间应用的Si/SiO2窄带中红外滤光片的机械和热性能
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.WB.3
A. Sytchkova, B. Baloukas, O. Zabeida, A. Piegari, J. Klemberg-Sapieha, M. Grilli, L. Martinu
{"title":"Mechanical and thermal properties of Si/SiO2 narrow-band mid-infrared filters for space applications","authors":"A. Sytchkova, B. Baloukas, O. Zabeida, A. Piegari, J. Klemberg-Sapieha, M. Grilli, L. Martinu","doi":"10.1364/OIC.2019.WB.3","DOIUrl":"https://doi.org/10.1364/OIC.2019.WB.3","url":null,"abstract":"The residual stress compensation of Si/SiO2 narrow-band filters for the mid-infrared range, composed of a combination of a Fabry-Perot and a blocking filter, is studied.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"2014 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114771367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study on the Polarization Contrast of Polarization Modulated Mirror Affected by Simulated Space Atomic Oxygen 模拟空间原子氧对偏振调制镜偏振对比影响的研究
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.MA.4
Duan Weibo, Liu Baojian, Li Daqi, Yu Deming, Liu Dingquan
{"title":"Study on the Polarization Contrast of Polarization Modulated Mirror Affected by Simulated Space Atomic Oxygen","authors":"Duan Weibo, Liu Baojian, Li Daqi, Yu Deming, Liu Dingquan","doi":"10.1364/OIC.2019.MA.4","DOIUrl":"https://doi.org/10.1364/OIC.2019.MA.4","url":null,"abstract":"The effect of space atomic oxygen on the polarization contrast of polarization modulated mirrors is investigated with different experimental doses. The results are important to the long-term space engineering application of polarization modulated mirrors.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125276700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS) 等离子体辅助直流磁控溅射(PAPMS)技术大批量生产高质量光学涂层
Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI: 10.1364/OIC.2019.WB.6
R. Faber, R. Meagher
{"title":"Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS)","authors":"R. Faber, R. Meagher","doi":"10.1364/OIC.2019.WB.6","DOIUrl":"https://doi.org/10.1364/OIC.2019.WB.6","url":null,"abstract":"Plasma Assisted Pulsed DC Magnetron Sputtering (PAPMS) results in low loss, high performance optical coatings. Multi-layers using metals and metal-oxides demonstrate that this technology is suitable for volume production of complex high quality coatings.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"78 5 Pt 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115045388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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