{"title":"等离子体辅助直流磁控溅射(PAPMS)技术大批量生产高质量光学涂层","authors":"R. Faber, R. Meagher","doi":"10.1364/OIC.2019.WB.6","DOIUrl":null,"url":null,"abstract":"Plasma Assisted Pulsed DC Magnetron Sputtering (PAPMS) results in low loss, high performance optical coatings. Multi-layers using metals and metal-oxides demonstrate that this technology is suitable for volume production of complex high quality coatings.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"78 5 Pt 1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS)\",\"authors\":\"R. Faber, R. Meagher\",\"doi\":\"10.1364/OIC.2019.WB.6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Plasma Assisted Pulsed DC Magnetron Sputtering (PAPMS) results in low loss, high performance optical coatings. Multi-layers using metals and metal-oxides demonstrate that this technology is suitable for volume production of complex high quality coatings.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"78 5 Pt 1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.WB.6\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.WB.6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS)
Plasma Assisted Pulsed DC Magnetron Sputtering (PAPMS) results in low loss, high performance optical coatings. Multi-layers using metals and metal-oxides demonstrate that this technology is suitable for volume production of complex high quality coatings.
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