Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS)

Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI:10.1364/OIC.2019.WB.6

R. Faber, R. Meagher

引用次数: 0

Abstract

Plasma Assisted Pulsed DC Magnetron Sputtering (PAPMS) results in low loss, high performance optical coatings. Multi-layers using metals and metal-oxides demonstrate that this technology is suitable for volume production of complex high quality coatings.

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等离子体辅助直流磁控溅射(PAPMS)技术大批量生产高质量光学涂层

等离子体辅助脉冲直流磁控溅射(PAPMS)可以产生低损耗、高性能的光学涂层。使用金属和金属氧化物的多层涂层表明，该技术适用于复杂的高质量涂层的批量生产。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optical Interference Coatings Conference (OIC) 2019

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