F. Delmotte, C. Burcklen, E. Meltchakov, R. Soufli, J. Rebellato, A. Jérôme, S. Rossi
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Abstract
We present recent advances in the development of Chromium-based interference coatings in the EUV/soft x-ray range. We achieved breakthroughs in coating efficiency by using advanced concepts including 3-material multilayers and interface engineering.
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