Nanotechnology and Precision Engineering最新文献_第6页

Electron paramagnetic resonance characterization of aluminum ion implantation-induced defects in 4H-SiC 铝离子注入4H-SiC缺陷的电子顺磁共振表征

Nanotechnology and Precision Engineering Pub Date : 2019-12-01 DOI: 10.1016/j.npe.2019.12.002

Xiuhong Wang , Zongwei Xu , Mathias Rommel , Bing Dong , Le Song , Clarence Augustine TH Tee , Fengzhou Fang

{"title":"Electron paramagnetic resonance characterization of aluminum ion implantation-induced defects in 4H-SiC","authors":"Xiuhong Wang , Zongwei Xu , Mathias Rommel , Bing Dong , Le Song , Clarence Augustine TH Tee , Fengzhou Fang","doi":"10.1016/j.npe.2019.12.002","DOIUrl":"10.1016/j.npe.2019.12.002","url":null,"abstract":"<div><p>Deep-level defects in silicon carbide (SiC) are critical to the control of the performance of SiC electron devices. In this paper, deep-level defects in aluminum ion-implanted 4H-SiC after high-temperature annealing were studied using electron paramagnetic resonance (EPR) spectroscopy at temperatures of 77 K and 123 K under different illumination conditions. Results showed that the main defect in aluminum ion-implanted 4H-SiC was the positively charged carbon vacancy (<span><math><msup><msub><mi>V</mi><mi>C</mi></msub><mo>+</mo></msup></math></span>), and the higher the doping concentration was, the higher was the concentration of <span><math><msup><msub><mi>V</mi><mi>C</mi></msub><mo>+</mo></msup></math></span>. It was found that the type of material defect was independent of the doping concentration, although more <span><math><msup><msub><mi>V</mi><mi>C</mi></msub><mo>+</mo></msup></math></span> defects were detected during photoexcitation and at lower temperatures. These results should be helpful in the fundamental research of p-type 4H-SiC fabrication in accordance with functional device development.</p></div>","PeriodicalId":87330,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"2 4","pages":"Pages 157-162"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.npe.2019.12.002","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43586709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

SiC nanowire-based SU-8 with enhanced mechanical properties for MEMS structural layer design 基于SiC纳米线的力学性能增强的SU-8用于MEMS结构层设计

Nanotechnology and Precision Engineering Pub Date : 2019-12-01 DOI: 10.1016/j.npe.2019.11.002

Yu Yang, Liyan Lai, Guifu Ding, Ting Chen

{"title":"SiC nanowire-based SU-8 with enhanced mechanical properties for MEMS structural layer design","authors":"Yu Yang, Liyan Lai, Guifu Ding, Ting Chen","doi":"10.1016/j.npe.2019.11.002","DOIUrl":"10.1016/j.npe.2019.11.002","url":null,"abstract":"<div><p>In addition to being used for pattern transfer, the negative photoresist SU-8 is widely used as a structural material in microelectromechanical systems (MEMS). Due to its good photopatternability, SU-8 has lower manufacturing costs than many other materials, but its mechanical properties are relatively weak to some extent, which limits its performance. The mechanical properties of epoxy-like SU-8 can be enhanced by adding micro- or nano-fillers such as carbon nanotube, clay, and SiC nanowire, which have superior elastic modulus. In this study, SiC nanowires were used to improve the mechanical properties of SU-8 while the SU-8 retains its photopatternability. The SiC nanowires were uniformly dispersed in SU-8 by stirring and ultrasonication. SU-8 materials with different SiC nanowire contents were fabricated into dog bone samples by lithography. The elastic modulus, storage modulus, and damping factor of the samples were measured by the Dynamic mechanical analysis (DMA) Q800. The experiment result shows that the rigidity and toughness increased, and the damping reduced. The 2 wt% SiC nanowires-reinforced SU-8 had a 73.88% increase in elastic modulus and a 103.4% increase in elongation at break. Furthermore, a spring component made by SiC-doped SU-8 could withstand greater acceleration. The SiC nanowires-reinforced SU-8 has the potential to meet higher requirements in the design and manufacture of MEMS and greatly reduce the manufacturing costs of MEMS devices.</p></div>","PeriodicalId":87330,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"2 4","pages":"Pages 169-176"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.npe.2019.11.002","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46604557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7

Design of a test structure based on chevron-shaped thermal actuator for in-situ measurement of the fracture strength of MEMS thin films 基于v形热致动器的MEMS薄膜断裂强度原位测试结构设计

Nanotechnology and Precision Engineering Pub Date : 2019-12-01 DOI: 10.1016/j.npe.2019.10.004

Mengjie Li, Zaifa Zhou, Liyan Yi, Xijie Wang, Saeed Adnan

引用次数: 0

Model analysis and resonance suppression of wide-bandwidth inertial reference system 宽频带惯性参照系的模型分析与共振抑制

Nanotechnology and Precision Engineering Pub Date : 2019-12-01 DOI: 10.1016/j.npe.2019.11.003

Dong Li , Tengfei Wu , Yue Ji , Xingfei Li

{"title":"Model analysis and resonance suppression of wide-bandwidth inertial reference system","authors":"Dong Li , Tengfei Wu , Yue Ji , Xingfei Li","doi":"10.1016/j.npe.2019.11.003","DOIUrl":"10.1016/j.npe.2019.11.003","url":null,"abstract":"<div><p>In the fields of earth observation, deep space detection, laser communication, and directional energy weapon, the target needs to be observed and pointed at accurately. Acquisition, tracking, and pointing (ATP) systems are usually designed to stabilize the line of sight (LOS) within sub-micro radian levels. In the case of an ATP system mounted on a mobile platform, angular disturbances experienced by the mobile platform will seriously affect the LOS. To overcome the problem that the sampling frequency of detectors is usually limited and achieving several hundreds of hertz is difficult, the wide-bandwidth inertial reference system (WBIRS) and fast steering mirror are usually integrated into ATP systems to mitigate these angular disturbances. To reduce the structural stress, a flexible support providing two rotational degrees of freedom is usually adopted for the system. However, the occurrence of resonant points within the bandwidth will be inevitable. Measurements have to be taken to compensate these low-frequency resonant points to realize a wide bandwidth and high precision. In this paper, the low-frequency resonant points of a system were simulated using finite element analysis and tested by a system identification method. The results show that the first-order resonance happened at 34.5 Hz with a gain of 28 dB. An improved double-T notch filter was designed and applied in a real-time system to suppress the resonance at 34.5 Hz. The experimental results show that the resonance was significantly suppressed. In particular, the resonance peak was reduced by 79.37%. In addition, the closed-loop system settling time was reduced by 36.2%.</p></div>","PeriodicalId":87330,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"2 4","pages":"Pages 177-187"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.npe.2019.11.003","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41502282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Simultaneous, hybrid single-molecule method by optical tweezers and fluorescence 同时，采用光镊和荧光杂交的单分子方法

Nanotechnology and Precision Engineering Pub Date : 2019-12-01 DOI: 10.1016/j.npe.2019.11.004

Guoteng Ma , Chunguang Hu , Shuai Li , Xiaoqin Gao , Hongbin Li , Xiaotang Hu

{"title":"Simultaneous, hybrid single-molecule method by optical tweezers and fluorescence","authors":"Guoteng Ma , Chunguang Hu , Shuai Li , Xiaoqin Gao , Hongbin Li , Xiaotang Hu","doi":"10.1016/j.npe.2019.11.004","DOIUrl":"10.1016/j.npe.2019.11.004","url":null,"abstract":"<div><p>As studies on life sciences progress toward the single-molecule level, new experiments have put forward more requirements for simultaneously displaying the mechanical properties and conformational changes of biomolecules. Optical tweezers and fluorescence microscopy have been combined to solve this problem. The combination of instruments forms a new generation of hybrid single-molecule technology that breaks through the limitations of traditional biochemical analysis. Powerful manipulation and fluorescence visualization have been widely used, and these techniques provide new possibilities for studying complex biochemical reactions at the single-molecule level. This paper explains the features of this combined technique, including the application characteristics of single-trap and dual-traps, the anti-bleaching method, and optical tweezers combined with epi-fluorescence, confocal fluorescence, total internal reflection fluorescence, and other fluorescence methods. Using typical experiments, we analyze technical solutions and explain the factors and principles that instrument designers should consider. This review aims to give an introduction to this novel fusion technology process and describe important biological results.</p></div>","PeriodicalId":87330,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"2 4","pages":"Pages 145-156"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.npe.2019.11.004","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44130961","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

A lateral super-resolution imaging method using structured illumination without phase shift 一种无相移结构照明的横向超分辨成像方法

Nanotechnology and Precision Engineering Pub Date : 2019-09-01 DOI: 10.1016/j.npe.2019.10.002

Yuan Jia, Junsheng Lu, Xinyu Chang, Xiaodong Hu

引用次数: 2

Design of a flexible piezoelectric microgripper based on combined amplification principles 基于组合放大原理的柔性压电微夹持器设计

Nanotechnology and Precision Engineering Pub Date : 2019-09-01 DOI: 10.1016/j.npe.2019.10.006

Xiaodong Chen , Zilong Deng , Siya Hu , Jinhai Gao , Xingjun Gao

引用次数: 9

FlexMEMS-enabled hetero-integration for monolithic FBAR-above-IC oscillators 支持flexmems的单片FBAR-above-IC振荡器异质集成

Nanotechnology and Precision Engineering Pub Date : 2019-09-01 DOI: 10.1016/j.npe.2019.08.002

Chuanhai Gao, Menglun Zhang, Yuan Jiang

引用次数: 5

Tool path generation of ultra-precision diamond turning: A state-of-the-art review 超精密金刚石车削的刀具轨迹生成:最新进展

Nanotechnology and Precision Engineering Pub Date : 2019-09-01 DOI: 10.1016/j.npe.2019.10.003

Hu Gong , Shengjun Ao , Kuntao Huang , Yi Wang , Changya Yan

引用次数: 16

Femtosecond laser fabrication of 3D templates for mass production of artificial compound eyes 飞秒激光制造大规模生产人工复眼的三维模板

Nanotechnology and Precision Engineering Pub Date : 2019-09-01 DOI: 10.1016/j.npe.2019.10.005

Guang-Xin Jin , Xin-Yu Hu , Zhuo-Chen Ma , Chun-He Li , Yong-Lai Zhang , Hong-Bo Sun

{"title":"Femtosecond laser fabrication of 3D templates for mass production of artificial compound eyes","authors":"Guang-Xin Jin , Xin-Yu Hu , Zhuo-Chen Ma , Chun-He Li , Yong-Lai Zhang , Hong-Bo Sun","doi":"10.1016/j.npe.2019.10.005","DOIUrl":"10.1016/j.npe.2019.10.005","url":null,"abstract":"<div><p>Compound eyes are unique optical imaging systems that consist of numerous separate light-sensitive units (ommatidia). Attempts have been made to produce artificial compound eyes via advanced 3D nanotechnologies. Among them, femtosecond laser direct writing (FsLDW) technology has emerged as an effective strategy due to its distinct advantages in 3D designable and high precision fabrication capability. However, the point-by-point scanning process results in a very low fabrication efficiency, limiting the practical applications of the FsLDW technology. To solve this problem, we propose a high-efficiency method for the mass production of 3D artificial compound eyes using a photopolymer template fabricated by FsLDW. The resultant 3D SU-8 compound eye templates could be used to replicate polydimethylsiloxane (PDMS) compound eyes many times (over 50 times) with a highly improved efficiency (nearly 20 times higher than the efficiency of direct fabrication using the point-by-point FsLDW). The PDMS replicas showed good focusing and imaging performances. We anticipate that this method may serve as an enabler for the mass production of 3D artificial compound eyes and promote their practical applications in the near future.</p></div>","PeriodicalId":87330,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"2 3","pages":"Pages 110-117"},"PeriodicalIF":0.0,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.npe.2019.10.005","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42330967","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 18