Advanced Materials Technologies最新文献

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Smart Coatings: Fundamentals, Preparation Approaches, and Applications 智能涂料:基本原理,制备方法和应用
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-19 DOI: 10.1002/admt.202500574
Homa Beyrami, Marzieh Golshan, Ali Zardehi-Tabriz, Mehdi Salami-Kalajahi
{"title":"Smart Coatings: Fundamentals, Preparation Approaches, and Applications","authors":"Homa Beyrami,&nbsp;Marzieh Golshan,&nbsp;Ali Zardehi-Tabriz,&nbsp;Mehdi Salami-Kalajahi","doi":"10.1002/admt.202500574","DOIUrl":"https://doi.org/10.1002/admt.202500574","url":null,"abstract":"<p>The adoption of cutting-edge coating technologies in industrial production is increasingly being recognized, underscoring a wide range of exceptional characteristics and features. Among these innovations, smart coatings represent a notable category of materials that can be activated by various internal and external stimuli, such as light, pH levels, moisture, biomolecules, bacteria, mechanical damage, temperature fluctuations, and electric or magnetic fields. The implementation of smart coatings has proven to offer considerable advantages across multiple sectors, notably in the medical industry, construction, energy storage, sensor technology, electronics, and textiles. Despite their potential, the development of smart coatings faces several challenges, including the need for long-term stability, scalability, and cost-effectiveness. Ongoing advancements in nanotechnology and material science are pivotal in fostering innovation within this domain, broadening application prospects, and improving performance metrics. This review aims to examine the diverse categories of smart coatings, emphasizing their protective, decorative, and intelligent functionalities. Key characteristics such as self-healing capabilities, self-cleaning mechanisms, intumescent properties, antibacterial effects, anti-reflection, and electroactive and bioactive traits are highlighted. Additionally, a comprehensive classification of materials and methodologies is presented alongside an overview of the latest developments in this rapidly evolving field.</p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 19","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145230644","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Highly Crystalline and Nanostructured Molybdenum Trioxide (α-MoO3) with Metal–Organic Decomposition on Laser-Induced Graphene for Volatile Organic Compound Gas Sensing 高结晶纳米结构的三氧化钼(α-MoO3)在激光诱导石墨烯上进行金属有机分解,用于挥发性有机化合物气体传感
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-18 DOI: 10.1002/admt.202500714
Akihiro Katsura, Otoya Okanishi, Yukiko Hirose, Yuma Miura, Wenliang Zhu, Tohru Sugahara
{"title":"Highly Crystalline and Nanostructured Molybdenum Trioxide (α-MoO3) with Metal–Organic Decomposition on Laser-Induced Graphene for Volatile Organic Compound Gas Sensing","authors":"Akihiro Katsura,&nbsp;Otoya Okanishi,&nbsp;Yukiko Hirose,&nbsp;Yuma Miura,&nbsp;Wenliang Zhu,&nbsp;Tohru Sugahara","doi":"10.1002/admt.202500714","DOIUrl":"10.1002/admt.202500714","url":null,"abstract":"<p>Gas sensors with metal oxide semiconductors (MOS) are demonstrated high sensitivity, selectivity, and rapid response to volatile organic compounds (VOC) gases due to their redox reactions. However, MOS typically imposes a significant electrical burden on devices due to its low carrier mobility and high electric resistivity. Recently, hybridization of laser-induced graphene (LIG) with MOS is a promising approach to overcome the inherent limitations of MOS and enhance device performance. In this study, molybdenum oxide (MoO<sub>x</sub>) is synthesized on LIG using metal–organic decomposition (MOD) for VOC gas sensing. Highly crystalline α-MoO<sub>3</sub> is demonstrated to grow densely on the LIG by analysis with field emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and Raman spectroscopy. Additionally, the gas sensing test revealed that LIG/α-MoO<sub>3</sub> hybrid gas sensor can selectively detect various VOC gases (methanol, ethanol, 1-propanol, and 2-propanol) and stably detected low concentrations of methanolat 44.7 ppm with low electrical resistivity (6.94 × 10<sup>5</sup> Ω). This work demonstrates that the MOD method enables the synthesis of high-density, highly crystalline, nanostructured α-MoO<sub>3</sub>, thereby enhancing the performance of conventional gas sensors. Furthermore, the LIG and MOS hybrid process with the MOD method can be applied to other MOS and is expected to enhance the performance of semiconductor devices and manufacturing efficiency and reduce processing costs.</p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 18","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145101638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Compliant Die Attach Process for High-Conformity Integration of Ultra-Thin Chips on Curved Surfaces 曲面上超薄芯片高整合集成的柔性贴装工艺
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-18 DOI: 10.1002/admt.202500584
Hakyung Jeong, Seungjin Oh, Hyunkyu Moon, Seungman Kim, Seongheum Han, Jun-Yeob Song, Ah-Young Park, Seung Moo Jeon, Chung Woo Lee, Jae Hak Lee
{"title":"Compliant Die Attach Process for High-Conformity Integration of Ultra-Thin Chips on Curved Surfaces","authors":"Hakyung Jeong,&nbsp;Seungjin Oh,&nbsp;Hyunkyu Moon,&nbsp;Seungman Kim,&nbsp;Seongheum Han,&nbsp;Jun-Yeob Song,&nbsp;Ah-Young Park,&nbsp;Seung Moo Jeon,&nbsp;Chung Woo Lee,&nbsp;Jae Hak Lee","doi":"10.1002/admt.202500584","DOIUrl":"10.1002/admt.202500584","url":null,"abstract":"<p>Advancements in free-form electronics demand robust bonding strategies for integrating ultra-thin silicon dies onto non-planar substrates. This study reports a compliant die attach process optimized for curved surfaces to achieve high surface conformity and minimal void formation. Bonding tools of varying materials and geometries [rigid/flat, rubber/flat, rigid/curved, and rubber/curved] are evaluated to assess their impact on bonding quality. Finite element method (FEM) simulations predicted stress distributions and contact mechanics, which are validated experimentally. Rubber/curved bonding tools exhibited superior compliance, resulting in uniform interfacial contact and reduced defect density. Process parameters such as bonding temperature, pressure, adhesive thickness, and annealing method are systematically refined. Integration of a pressure curing oven (PCO) enabled efficient gas evacuation and enhanced adhesive homogeneity. Distinct from prior approaches limited to planar or mildly curved substrates, this work addresses high-curvature integration through a combined simulation–experiment framework. The proposed process achieved void-free attachment with a curvature deviation below ±2.4% and a void ratio under 0.5% while maintaining mechanical integrity under thermal cycling. This framework provides a scalable and reliable platform for next-generation curved electronics, with specific applicability to LiDAR modules and wide-field of view (FoV) imaging systems.</p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 18","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://advanced.onlinelibrary.wiley.com/doi/epdf/10.1002/admt.202500584","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145101639","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Flexible Flow Velocity Sensor Based on Core-Sheath Structured Triboelectric Nanogenerator for Underwater Environmental Monitoring 基于芯鞘结构摩擦电纳米发电机的水下环境监测柔性流速传感器
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-18 DOI: 10.1002/admt.202500704
Haoyang Song, Shuai Zhang, Hengxu Du, Cong Zhao, Jicang Si, Mengwei Wu, Minyi Xu
{"title":"A Flexible Flow Velocity Sensor Based on Core-Sheath Structured Triboelectric Nanogenerator for Underwater Environmental Monitoring","authors":"Haoyang Song,&nbsp;Shuai Zhang,&nbsp;Hengxu Du,&nbsp;Cong Zhao,&nbsp;Jicang Si,&nbsp;Mengwei Wu,&nbsp;Minyi Xu","doi":"10.1002/admt.202500704","DOIUrl":"10.1002/admt.202500704","url":null,"abstract":"<p>Traditional flow velocity sensors have limitations such as limited accuracy, environmental interference, and dependence on power supply. The high-precision measurement and stable output of the flow velocity sensor are of great significance for the accuracy and reliability of marine environmental monitoring. The triboelectric nanogenerator (TENG), an emerging technology for energy harvesting and sensing, offers a promising solution for real-time flow velocity monitoring. This paper presents a core-sheath structured triboelectric nanogenerator (CS-TENG) with an innovative design featuring flexible materials to enhance environmental adaptability. By leveraging the vortex-induced vibration (VIV) effect, the device achieves efficient fluid kinetic energy harvesting through VIV-induced mechanical vibration coupling, enabling omnidirectional flow velocity measurement. The experimental results show that the frequency of the output signal from CS-TENG has a good linear relationship with the flow velocity, specifically, within a flow velocity range of 0.297–0.931 m s<sup>−1</sup>, the correlation coefficient reached to 0.992. Wireless real-time flow velocity monitoring is achieved by integrating the MCU with the LoRa. The results show that the CS-TENG, as a high-precision active sensor, provides an intelligent solution for marine environmental monitoring.</p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 18","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145101994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Modulating D33 Coefficients Through In Situ AgF and Ag2O Growth in PVDF Composites for High-Performance Piezoelectric Nanogenerators (Adv. Mater. Technol. 12/2025) 利用AgF和Ag2O原位生长在PVDF复合材料中调制D33系数用于高性能压电纳米发电机(Adv. Mater.)。抛光工艺。12/2025)
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-17 DOI: 10.1002/admt.202570064
Renjun Liu, Ki Hoon Shin, Yu Zhu, Qing Liu, Bing Ji, Guoxing Sun, Zongjin Li, Dadimuni De Silva, Aisling Stewart, Matteo Lorenzoni, Ingo Ludtke, Oliver A. Williams, Wenlong Ming, Giorgio Divitini, Jung Inn Sohn, Bo Hou
{"title":"Modulating D33 Coefficients Through In Situ AgF and Ag2O Growth in PVDF Composites for High-Performance Piezoelectric Nanogenerators (Adv. Mater. Technol. 12/2025)","authors":"Renjun Liu,&nbsp;Ki Hoon Shin,&nbsp;Yu Zhu,&nbsp;Qing Liu,&nbsp;Bing Ji,&nbsp;Guoxing Sun,&nbsp;Zongjin Li,&nbsp;Dadimuni De Silva,&nbsp;Aisling Stewart,&nbsp;Matteo Lorenzoni,&nbsp;Ingo Ludtke,&nbsp;Oliver A. Williams,&nbsp;Wenlong Ming,&nbsp;Giorgio Divitini,&nbsp;Jung Inn Sohn,&nbsp;Bo Hou","doi":"10.1002/admt.202570064","DOIUrl":"10.1002/admt.202570064","url":null,"abstract":"<p><b>Piezoelectric Nanogenerators</b></p><p>In article number 2500012, Zongjin Li, Giorgio Divitini, Jung Inn Sohn, Bo Hou, and co-workers show that in-situ AgF and Ag<sub>2</sub> O nanoparticle growth in PVDF boosts its β-phase content to 91.4%, enhancing dielectric constant and d33. This easily scalable approach yields robust piezoelectric generators, powering LEDs and charging capacitors swiftly.\u0000\u0000 <figure>\u0000 <div><picture>\u0000 <source></source></picture><p></p>\u0000 </div>\u0000 </figure></p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 12","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/admt.202570064","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144300402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
New Efficient D-π-A and A-π-A Structured Type I Radical Photoinitiators for Additive Manufacturing Nanomaterials Preparation (Adv. Mater. Technol. 12/2025) 用于增材制造纳米材料制备的新型高效D-π-A和A-π-A结构I型自由基光引发剂抛光工艺。12/2025)
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-17 DOI: 10.1002/admt.202570067
Andrzej Świeży, Filip Petko, Dominika Krok-Janiszewska, Patryk Szymaszek, Mariusz Galek, Joanna Ortyl
{"title":"New Efficient D-π-A and A-π-A Structured Type I Radical Photoinitiators for Additive Manufacturing Nanomaterials Preparation (Adv. Mater. Technol. 12/2025)","authors":"Andrzej Świeży,&nbsp;Filip Petko,&nbsp;Dominika Krok-Janiszewska,&nbsp;Patryk Szymaszek,&nbsp;Mariusz Galek,&nbsp;Joanna Ortyl","doi":"10.1002/admt.202570067","DOIUrl":"10.1002/admt.202570067","url":null,"abstract":"<p><b>Additive Manufacturing Nanomaterials Preparation</b></p><p>In article number 2402139, Joanna Ortyl and co-workers present novel type I radical photoinitiators with extended conjugation systems that exhibit significantly redshifted absorption, enabling photoinitiation deep in visible light. This novel structural design allows for the creation of an entire library of new compounds for use in photopolymerization processes. Due to their excellent photoinitiating performance, these compounds are suitable for applications in vat 3D printing.\u0000\u0000 <figure>\u0000 <div><picture>\u0000 <source></source></picture><p></p>\u0000 </div>\u0000 </figure></p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 12","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/admt.202570067","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144300472","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
DEyeA: Artificial Muscles for the Restoration of Eye Blinking Following Facial Paralysis (Adv. Mater. Technol. 12/2025) DEyeA:用于面瘫后眨眼恢复的人工肌肉。抛光工艺。12/2025)
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-17 DOI: 10.1002/admt.202570065
Stefania Konstantinidi, Markus Koenigsdorff, Pierre-Jean Martin, Amine Benouhiba, Yoan Civet, Gerald Gerlach, Yves Perriard
{"title":"DEyeA: Artificial Muscles for the Restoration of Eye Blinking Following Facial Paralysis (Adv. Mater. Technol. 12/2025)","authors":"Stefania Konstantinidi,&nbsp;Markus Koenigsdorff,&nbsp;Pierre-Jean Martin,&nbsp;Amine Benouhiba,&nbsp;Yoan Civet,&nbsp;Gerald Gerlach,&nbsp;Yves Perriard","doi":"10.1002/admt.202570065","DOIUrl":"10.1002/admt.202570065","url":null,"abstract":"<p><b>Dielectric Elastomer Actuators</b></p><p>Restoring facial movements following paralysis such as blinking is crucial to improve the patient's quality of life and avoid loss of vision or infections. Current procedures for patients are not always adequate, and there is a real need for more appropriate solutions. In article number 2401616, Stefania Konstantinidi and co-workers illustrate a novel functional implant that enables to replicate eye-blinking abilities for paralyzed patients.\u0000\u0000 <figure>\u0000 <div><picture>\u0000 <source></source></picture><p></p>\u0000 </div>\u0000 </figure></p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 12","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/admt.202570065","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144300403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-Molecular-Weight Polymer Donors Based on Bithiophene Imide for High-Efficiency and Durable All-Polymer Solar Cells (Adv. Mater. Technol. 12/2025) 基于双噻吩亚胺的高分子量聚合物供体用于高效耐用的全聚合物太阳能电池。抛光工艺。12/2025)
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-17 DOI: 10.1002/admt.202570063
Jie Yang, Changjing Xu, Sergio Gámez-Valenzuela, Qingqing Bai, Junyi Lu, Bin Liu, Sang Young Jeong, Jin-Woo Lee, Xiage Zhang, Jiahao Chen, Han Young Woo, Bumjoon J. Kim, Huiliang Sun, Xugang Guo
{"title":"High-Molecular-Weight Polymer Donors Based on Bithiophene Imide for High-Efficiency and Durable All-Polymer Solar Cells (Adv. Mater. Technol. 12/2025)","authors":"Jie Yang,&nbsp;Changjing Xu,&nbsp;Sergio Gámez-Valenzuela,&nbsp;Qingqing Bai,&nbsp;Junyi Lu,&nbsp;Bin Liu,&nbsp;Sang Young Jeong,&nbsp;Jin-Woo Lee,&nbsp;Xiage Zhang,&nbsp;Jiahao Chen,&nbsp;Han Young Woo,&nbsp;Bumjoon J. Kim,&nbsp;Huiliang Sun,&nbsp;Xugang Guo","doi":"10.1002/admt.202570063","DOIUrl":"10.1002/admt.202570063","url":null,"abstract":"<p><b>All-Polymer Solar Cells</b></p><p>In article number 2500148, Bin Liu, Sang Young Jeong, Xugang Guo, and co-workers develop a series of bithiophene imide (BTI)-based polymer donors with high number-average molecular weights ranging from 120.3 to 145.5 kDa, offering improved molecular aggregation property and optimized <i>P</i><sub>D</sub>:<i>P</i><sub>A</sub> miscibility. In the image, the iconic Shenzhen Civic Center serves as the backdrop, with the device structure of an all-polymer solar cell extending from it. Above the device lies PBTI-OD, the polymer donor that contributes to the performance of all-polymer solar cells.\u0000\u0000 <figure>\u0000 <div><picture>\u0000 <source></source></picture><p></p>\u0000 </div>\u0000 </figure></p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 12","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/admt.202570063","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144300401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Wearable Electrohydraulic Actuation For Salient Full-Fingertip Haptic Feedback (Adv. Mater. Technol. 12/2025) 面向突出全指尖触觉反馈的可穿戴电液驱动(Adv. Mater)。抛光工艺。12/2025)
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-17 DOI: 10.1002/admt.202570062
Yitian Shao, Alona Shagan Shomron, Bernard Javot, Christoph Keplinger, Katherine J. Kuchenbecker
{"title":"Wearable Electrohydraulic Actuation For Salient Full-Fingertip Haptic Feedback (Adv. Mater. Technol. 12/2025)","authors":"Yitian Shao,&nbsp;Alona Shagan Shomron,&nbsp;Bernard Javot,&nbsp;Christoph Keplinger,&nbsp;Katherine J. Kuchenbecker","doi":"10.1002/admt.202570062","DOIUrl":"10.1002/admt.202570062","url":null,"abstract":"<p><b>Wearable Electrohydraulic Actuation</b></p><p>In article number 2401525, Christoph Keplinger, Katherine J. Kuchenbecker, and co-workers introduce a wearable electrohydraulic haptic system that delivers salient full-fingertip feedback via a thin inflatable chamber actuated by a soft pump. The lightweight, untethered design allows natural hand motion while producing lifelike pressure levels and skin deformation, enhancing immersion in extended reality applications.\u0000\u0000 <figure>\u0000 <div><picture>\u0000 <source></source></picture><p></p>\u0000 </div>\u0000 </figure></p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 12","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/admt.202570062","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144300400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Improvement of Selective Quasi Atomic Layer Etching of SiGe/Si by Plasma Surface Modification for Fishbone FET Fabrication 等离子体表面修饰改进鱼骨场效应管中SiGe/Si的选择性准原子层蚀
IF 6.4 3区 材料科学
Advanced Materials Technologies Pub Date : 2025-06-16 DOI: 10.1002/admt.202402192
Ziyi Hu, Panpan Lai, Rui Ge, Hua Shao, Yuxuan Zhai, Tong Yu, Zemeng Feng, Dashan Shang, Junjie Li, Rui Chen, Lado Filipovic
{"title":"Improvement of Selective Quasi Atomic Layer Etching of SiGe/Si by Plasma Surface Modification for Fishbone FET Fabrication","authors":"Ziyi Hu,&nbsp;Panpan Lai,&nbsp;Rui Ge,&nbsp;Hua Shao,&nbsp;Yuxuan Zhai,&nbsp;Tong Yu,&nbsp;Zemeng Feng,&nbsp;Dashan Shang,&nbsp;Junjie Li,&nbsp;Rui Chen,&nbsp;Lado Filipovic","doi":"10.1002/admt.202402192","DOIUrl":"10.1002/admt.202402192","url":null,"abstract":"<p>Gate-all-around field effect transistors (GAAFETs), including nanosheet (NS) and nanowire (NW) structures, are crucial for the advancement of novel logic devices. One significant challenge in GAA NS is the electrical performance mismatch between NMOS and PMOS drive currents, which stems from the different mobility of holes and electrons. In this study, an innovative Fishbone FET structure with nanoscale dimensions integrating SiGe nano-fins and Si nanosheet is experimentally fabricated. This structure addresses the performance mismatch between NMOS and PMOS in GAAFETs, and enhances the driving capability of the device by increasing the number of effective channels. The Fishbone FET channel is fabricated using dry quasi-atomic layer etching (quasi-ALE), which has emerged as a promising candidate for accurately controlling the etching depth of the SiGe layer. Scanning Electron Microscope (SEM), Transmission Electron Microscope (TEM), and X-ray Photoelectron Spectroscopy (XPS) are employed to systematically investigate various process phenomena and interfacial reaction mechanisms associated with quasi-ALE. The findings show that etching per cycle is ≈0.27 nm, and the etching process involves a two-step self-limiting reaction. This novel channel structure fabrication approach is expected to serve as an important reference for optimizing the channel in GAAFETs.</p>","PeriodicalId":7292,"journal":{"name":"Advanced Materials Technologies","volume":"10 18","pages":""},"PeriodicalIF":6.4,"publicationDate":"2025-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145101155","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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