Advanced Engineering Materials最新文献_第7页

Porosity-Zoned Porous-Transport Layer for Proton-Exchange Membrane Water Electrolysis by High-Velocity Flame Spraying

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-09 DOI: 10.1002/adem.202402462

Kirsten Bobzin, Selina Finger, Lidong Zhao, Hendrik Heinemann, Elisa Olesch, Katja Radermacher, Sabrina Pechmann, Dennis Possart, Silke H. Christiansen, Darius Hoffmeister, Birk Fritsch, Simon Thiele, Andreas Hutzler

{"title":"Porosity-Zoned Porous-Transport Layer for Proton-Exchange Membrane Water Electrolysis by High-Velocity Flame Spraying","authors":"Kirsten Bobzin, Selina Finger, Lidong Zhao, Hendrik Heinemann, Elisa Olesch, Katja Radermacher, Sabrina Pechmann, Dennis Possart, Silke H. Christiansen, Darius Hoffmeister, Birk Fritsch, Simon Thiele, Andreas Hutzler","doi":"10.1002/adem.202402462","DOIUrl":"https://doi.org/10.1002/adem.202402462","url":null,"abstract":"The porous-transport layer (PTL) is a crucial component in proton-exchange membrane water electrolyzers (PEMWE) enabling water and gas transport as well as electrically contacting the catalyst layer (CL). To reduce the overall costs of PTLs, a fabrication method by high-velocity oxy-fuel (HVOF) spraying is introduced. Free-standing PTLs are obtained via the application of a titanium coating onto a substrate and its subsequent separation and thermal treatment. The obtained PTLs feature two sides of different roughness and porosity as analyzed and visualized by X-ray microscopy. This way, the side with decreased porosity (21%) is intended to function as a microporous layer, improving the contact with the CL. The presented fabrication process promises decreased costs compared to vacuum plasma spraying, a simplified, chemical-free mechanical separation of the PTL from the substrate, and a high scale-up suitability. In the results, it is demonstrated that HVOF can produce titanium PTLs with low oxygen content. Additionally, PEMWE single-cell tests demonstrate that the sprayed PTLs perform on par with a commercially available PTL material.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 5","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adem.202402462","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143535781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication Techniques and Their Impact on the Properties of Microalgae-Based Hybrid Biochemobrionic Materials

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-09 DOI: 10.1002/adem.202401856

Bahar Aslanbay Guler, Zeliha Demirel, Esra Imamoglu

{"title":"Fabrication Techniques and Their Impact on the Properties of Microalgae-Based Hybrid Biochemobrionic Materials","authors":"Bahar Aslanbay Guler, Zeliha Demirel, Esra Imamoglu","doi":"10.1002/adem.202401856","DOIUrl":"https://doi.org/10.1002/adem.202401856","url":null,"abstract":"Chemobrionics has garnered significant interest across various scientific disciplines, including chemistry, physics, material science, and regenerative medicine. To broaden their application field, hybrid materials can be developed by incorporating organic or biological components into their chemical composition. In the present study, it is aimed to synthesize a hybrid biochemobrionic material by incorporating Chlorella vulgaris microalgae into the calcium–magnesium silicate–phosphate chemobrionic structure. Two different techniques are compared for fabrication of biochemobrionic material. Additionally, antioxidant activity, degradation behavior, and cytotoxicity of the biochemobrionic are investigated. While the coating method is found to be more successful in enriching the material content with organic components, the direct incorporation method is deemed more suitable for biochemobrionic production due to the homogeneous distribution of microalgae, as well as the stability and mechanical strength of the material. According to the results, integrating C. vulgaris biomass not only enhances the antioxidant capability of the biochemobrionic material but also accelerates its degradation rate. Furthermore, in vitro cytotoxicity assessment reveals no notable adverse effects for both chemobrionic and biochemobrionic specimens, though surface modifications can potentially boost cell viability. In conclusion, the direct incorporation method emerges as a promising approach for integrating a wide variety of components into chemobrionic structures.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 4","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143431157","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Review on Anion Exchange of Lead-Halide Perovskite Nanocrystals: Process, Methods, and Applications

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-09 DOI: 10.1002/adem.202401776

Mulin Li, Qianxi Yin, Rongrong Xu, Xiaoting Wang, Xianliang Huang, Ziyi Chen, Teng Ma, Jun Chen, Haibo Zeng

{"title":"Review on Anion Exchange of Lead-Halide Perovskite Nanocrystals: Process, Methods, and Applications","authors":"Mulin Li, Qianxi Yin, Rongrong Xu, Xiaoting Wang, Xianliang Huang, Ziyi Chen, Teng Ma, Jun Chen, Haibo Zeng","doi":"10.1002/adem.202401776","DOIUrl":"https://doi.org/10.1002/adem.202401776","url":null,"abstract":"Lead-halide perovskites are a new class of semiconductor materials that have excellent optoelectronic properties and can be easily transformed into bright luminescent colloidal nanocrystals. These characteristics bring great prospects for the development of high-efficiency optical devices. These materials possess unique anion-exchange properties that allow for post-synthesis adjustment of the bandgap. Anion exchange typically initiates at the surface: Perovskite nanocrystals have flexible lattice properties, which allow ions to gradually diffuse into the interior of the crystal with the help of vacancies, resulting in the formation of complete or mixed-phase perovskites. Various methods, such as liquid phase, gas phase, and solid phase anion exchange, enable precise control over the composition and bandgap modulation, thereby tuning the emission wavelengths of nanocrystals across the visible spectrum. The flexibility and precision offered by anion exchange facilitate effective phase control and engineering of the optoelectronic properties of lead-halide perovskites. This, in turn, opens up opportunities for their application in light-emitting diodes, solar cells, and detectors, thus driving further advancements in anion-exchange technology.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 4","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143431156","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Study on the Precipitation Behavior of SiC/7075Al Composite Material Controlled by Pulse Current-Assisted Treatment

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-09 DOI: 10.1002/adem.202401912

Xian Wang, Wei Zhao, Jie Yan, Wenxian Wang

{"title":"Study on the Precipitation Behavior of SiC/7075Al Composite Material Controlled by Pulse Current-Assisted Treatment","authors":"Xian Wang, Wei Zhao, Jie Yan, Wenxian Wang","doi":"10.1002/adem.202401912","DOIUrl":"https://doi.org/10.1002/adem.202401912","url":null,"abstract":"In order to further improve the comprehensive mechanical properties of as-rolled SiC/7075Al composites, the microstructure and mechanical properties of the composites are modified by pulse current-assisted treatment (PCAT). The results show that the pulse current acts on the interior of the material in a unique way, reducing the nucleation barrier of the precipitated phase. Two nano-scale precipitated phases of MgZn2 (η′) and Mg2Si (β′) are formed inside the composite. The fine precipitates play a significant role in the strengthening of dislocation and dispersion of the material, which makes the material obtain excellent strength and plasticity. The mechanical properties analysis reveals that the yield strength (YS), ultimate tensile strength (UTS), and elongation of the samples subjected to PCAT are 223.6, 434.5 MPa, and 20.6%, respectively. Compared to the as-rolled samples, the YS exhibits an enhancement of 4.7%, the UTS increases significantly by 25.6%, and the elongation improves remarkably by 108%. PCAT enhances the strength and plasticity of SiC/7075Al composites, breaking the competition between strength and plasticity.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 4","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143431096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of Magnetically Actuated Pillars with NiTi–Polydimethylsiloxane Integration for Advanced Mobility in Soft Robotics

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-09 DOI: 10.1002/adem.202402468

Cristian Padilha Fontoura, Cesar Aguzzoli

{"title":"Development of Magnetically Actuated Pillars with NiTi–Polydimethylsiloxane Integration for Advanced Mobility in Soft Robotics","authors":"Cristian Padilha Fontoura, Cesar Aguzzoli","doi":"10.1002/adem.202402468","DOIUrl":"https://doi.org/10.1002/adem.202402468","url":null,"abstract":"The use of responsive pillar arrays and cilia-like structures is linked with many groundbreaking applications, including microfluidic devices, biomedical applications, and soft robotics. To be effective, cilia or pillar arrays must exhibit flexible and controllable motion tailored to their specific applications. In this context, in this work, developing a compliant structure, which combines longitudinal stiffness controlled by a shape-memory alloy and magnetically actuated pillars, is aimed at. Polydimethylsiloxane is used as the matrix material, while nickel–titanium (NiTi) alloy provides stiffening to the base, and the pillars are enriched with iron via magnetron sputtering. The structures are generated through cast molding, employing pillar array-forming templates obtained by additive manufacturing. Various physicochemical and mechanical analyses are conducted to assess the composite's properties, including tensile testing, pullout test, and magnetometry. Overall, tailored dexterity and actuation are achieved by controlling temperature and magnetic field application. This advancement not only demonstrates the feasibility of creating responsive pillars at a relatively low cost—in comparison to commercial iron nanoparticles—and environmentally friendly techniques but also opens avenues for their integration into sophisticated devices requiring precise and adaptable movements. Future research should focus on optimizing the actuation efficiency and exploring broader applications in bioengineering and robotics.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 4","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143431097","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Improving Surface Properties of AlSi10Mg Fabricated by Cold Spray: Mechanical Milling is a Tool for Fabrication of Composite ZrN/AlSi10Mg Particles

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-09 DOI: 10.1002/adem.202401862

Veronika S. Suvorova, Dmitrii S. Suvorov, Fedor Yu. Bochkanov, Victoriya U. Mnatsakanyan, Artur Chkirya, Samat K. Mukanov, Stanislav V. Chernyshikhin, Andrey A. Nepapushev, Dmitry O. Moskovskikh

{"title":"Improving Surface Properties of AlSi10Mg Fabricated by Cold Spray: Mechanical Milling is a Tool for Fabrication of Composite ZrN/AlSi10Mg Particles","authors":"Veronika S. Suvorova, Dmitrii S. Suvorov, Fedor Yu. Bochkanov, Victoriya U. Mnatsakanyan, Artur Chkirya, Samat K. Mukanov, Stanislav V. Chernyshikhin, Andrey A. Nepapushev, Dmitry O. Moskovskikh","doi":"10.1002/adem.202401862","DOIUrl":"https://doi.org/10.1002/adem.202401862","url":null,"abstract":"\u0000In this study, the possibility of employing ZrN/AlSi10Mg composite powders with 10, 20, and 30 wt% ZrN and a low-pressure cold spraying (CS) unit to enhance the surface properties of AlSi10Mg obtained through laser powder bed fusion (LPBF) is investigated for the first time. A high-energy ball mill is used to produce composite powders from AlSi10Mg and ZrN powders. ZrN/AlSi10Mg powders are sprayed onto the surface of LPBFed AlSi10Mg at a pressure of 0.7 MPa and a temperature of 400 °C. It is demonstrated that the utilization of composite powders facilitates a uniform distribution of ceramic particles in the coating and reduces the share of their losses during the CS process to 2%. It is found that the microhardness and elastic modulus of composite coatings increase with increasing mass fractions of ZrN, while the wear rate (WR) decreases. A change in the wear mechanism from adhesive to abrasive is observed. It is possible to increase the microhardness and elastic modulus of the LPBFed AlSi10Mg surface with a coating containing 30 wt% ZrN by 43% (193 ± 5 HV0.1) and 62% (105 ± 9 GPa), respectively, and reduce the WR by 25% (8.26 ± 0.09) × 10−4 mm3 m−1.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 4","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143431158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Optimization Study of Shear-Thickening Polishing Technology in the Passivation Process of Spiral-Fluted Tap Edge Based on Simulation Analysis

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-09 DOI: 10.1002/adem.202402476

Xu Wang, Zhiyuan Bao, Jiahuan Wang, Binghai Lyu, Jinghu Wang, Qianfa Deng, Wenghong Zhao, Julong Yuan

{"title":"Optimization Study of Shear-Thickening Polishing Technology in the Passivation Process of Spiral-Fluted Tap Edge Based on Simulation Analysis","authors":"Xu Wang, Zhiyuan Bao, Jiahuan Wang, Binghai Lyu, Jinghu Wang, Qianfa Deng, Wenghong Zhao, Julong Yuan","doi":"10.1002/adem.202402476","DOIUrl":"https://doi.org/10.1002/adem.202402476","url":null,"abstract":"\u0000This study examines the effectiveness of shear-thickening polishing technology in passivating high-speed steel tap edges through simulation. It analyzes the impact of workpiece speed (V), rotary speed (V′), and inclination angle (θ) on pressure distribution and surface roughness during edge preparation. The simulation shows a peak pressure of 8723.236 Pa at an 80° angle, leading to uniform distribution and reduced surface roughness to 12 nm after 25 min of polishing. A multiresponse optimization method identifies optimal edge preparation conditions at maximum pressure, enhancing edge consistency and minimizing roughness. A mathematical model and universal empirical formula relate edge preparation rate to inclination angle, applicable to various curved edge tools. A regression model explores relationships among inclination angle, rotational speed, and edge blunting radius. The study finds that an inclination angle of 80°, a spin speed of 10 rad min−1, and a disk speed of 80 rad min−1 can control the edge radius to 30 μm. The research confirms the simulation's reliability and highlights the inclination angle's significant effect on edge radius, providing a theoretical and practical guide for applying shear-thickening polishing technology in tool edge preparation.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 5","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143535783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Electrostatic Accumulation-Induced Auxiliary Field and Coaxial Airflow for Jet Convergence in Electrospinning

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-09 DOI: 10.1002/adem.202402298

Xudong Guan, Xiaoxuan Chen, Ruxin Gao, Xinyu Bin, Xinyu Liao, Shuhang Song, Jiaqi Wang, Jinxin Liu, Yuqing Liu

{"title":"Electrostatic Accumulation-Induced Auxiliary Field and Coaxial Airflow for Jet Convergence in Electrospinning","authors":"Xudong Guan, Xiaoxuan Chen, Ruxin Gao, Xinyu Bin, Xinyu Liao, Shuhang Song, Jiaqi Wang, Jinxin Liu, Yuqing Liu","doi":"10.1002/adem.202402298","DOIUrl":"https://doi.org/10.1002/adem.202402298","url":null,"abstract":"Controlling the stability of the charged jet during the electrospinning process remains a critical challenge for achieving precision in electrospinning and optimizing the structural design of nanofibers. This research introduces a novel electrospinning technique, termed Airflow Synergistic Electrostatic Field (ASEF) focusing. During the electrospinning process, the charged jet is guided through a perforated insulating plate by coaxial airflow. The charges accumulate around the holes, creating electrostatic lenses that focus the jet. The results indicate that this method not only suppresses jet oscillation, ensuring precise deposition of the spinning jet, but also improves the nanofibrous structure, thereby altering its mechanical properties and morphological features. Orthogonal experiments and finite element method simulations were employed to optimize and provide theoretical validation for the technique. Under optimized conditions (20 cm spinning distance, 20 kV voltage, 20 kPa airflow pressure, and a 5 cm auxiliary electric field), the spinning jet deposition area was successfully reduced to 4.0 cm2. Finally, a proof-of-concept experiment using eggshells as a model substantiated the ASEF technique's potential for precise deposition of electrospun fibers and its encapsulation performance, offering new possibilities for biomedical applications such as non-invasive wound repair.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 5","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143535782","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Broadband Sound Absorption in a Composite of Localized Aluminum Foam and Microperforated Plates

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-08 DOI: 10.1002/adem.202402205

Jin Chen, Sihan Li, Gexuan Ning, Lisi Liang, Lixing Zhang, Zhongyi Cui, Zeming Wang, Zhuyue Zhang

{"title":"Broadband Sound Absorption in a Composite of Localized Aluminum Foam and Microperforated Plates","authors":"Jin Chen, Sihan Li, Gexuan Ning, Lisi Liang, Lixing Zhang, Zhongyi Cui, Zeming Wang, Zhuyue Zhang","doi":"10.1002/adem.202402205","DOIUrl":"https://doi.org/10.1002/adem.202402205","url":null,"abstract":"A composite structure (L-LDMPP) consisting of localized aluminum foam, a localized microperforated plate (MPP), and a double-layer MPP is proposed to enhance sound absorption. A simulation model using COMSOL is developed to predict the sound absorption coefficient and investigate the acoustic benefits of localized aluminum foam and localized MPP. A comparative analysis is performed to evaluate the sound absorption performance of four configurations: L-SMPP (localized aluminum foam with a single-layer MPP), L-DMPP (localized aluminum foam with a double-layer MPP), L-LSMPP (localized aluminum foam with a localized MPP and a single-layer MPP), and L-LDMPP (localized aluminum foam with a localized MPP and a double-layer MPP). The model's accuracy is validated against experimental data. Results show that localized aluminum foam, localized MPP, and double-layer MPP optimize acoustic impedance matching. The sound absorption characteristics of L-LDMPP are divided into two domains: the resonance acoustic domain, influenced by the double-layer MPP structure behind the localized aluminum foam, and the coupled acoustic domain, influenced by both the localized aluminum foam and localized MPP.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 4","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143431067","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis

IF 3.4 3区材料科学

Advanced Engineering Materials Pub Date : 2025-01-07 DOI: 10.1002/adem.202402656

Richard Daubriac, Leonardo Cancellara, Zeinab Chehadi, Lu Lu, Louis Thuries, Mohamed Ali Khaled, Fabien Roze, Nicolas Jourdan, Zsolt Tokei, Armel Descamps-Mandine, Teresa Hungria, Pier-Francesco Fazzini, Toshiyuki Tabata, Karim Huet

{"title":"Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis","authors":"Richard Daubriac, Leonardo Cancellara, Zeinab Chehadi, Lu Lu, Louis Thuries, Mohamed Ali Khaled, Fabien Roze, Nicolas Jourdan, Zsolt Tokei, Armel Descamps-Mandine, Teresa Hungria, Pier-Francesco Fazzini, Toshiyuki Tabata, Karim Huet","doi":"10.1002/adem.202402656","DOIUrl":"https://doi.org/10.1002/adem.202402656","url":null,"abstract":"Ruthenium (Ru) has been identified as a durable and relevant substitute to copper (Cu) to answer the access resistance lowering of the back-end-of-line (BEOL) metal levels, which is a high-priority concern for future devices. Herein, the nonequilibrium and local properties of pulsed scanning laser annealing (SLA) technique are used to enhance the structural and electrical properties of thin polycrystalline Ru layers (<30 nm). For the best annealing conditions, transmission electron microscopy observations show a substantial grain size enlargement, with large grains (≈80 nm) occupying the whole layer height. It goes with a 53% resistivity reduction, measured by 4-point probe, confirming the strong grain boundary scattering reduction. A Mayadas–Shatzkes model incorporating temperature-dependent resistivity measurements allows the extraction of promising reflectivity and specularity coefficients of around 0.58 and 0.98, respectively. Beyond the best conditions, failure modes for devices integration are observed, such as surface wrinkling and local buckling. Given the studied system, a semiquantitative analysis of these phenomena is given and simulations based on the finite element method are used to find further optimal annealing conditions. This study confirms the potential of Ru as a promising BEOL material, but also SLA as a convincing technique for future 3D architectures.","PeriodicalId":7275,"journal":{"name":"Advanced Engineering Materials","volume":"27 4","pages":""},"PeriodicalIF":3.4,"publicationDate":"2025-01-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adem.202402656","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143431485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0