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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)最新文献

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In-Situ Transmission Electron Microscopy Coupled with Resonant Microcantilever for Comprehensive Evaluating Sulfurization Performance of Zinc Oxide Nanowires 原位透射电镜耦合谐振微悬臂综合评价氧化锌纳米线的硫化性能
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808584
Xueqing Wang, P. Xu, Haitao Yu, Xinxin Li
{"title":"In-Situ Transmission Electron Microscopy Coupled with Resonant Microcantilever for Comprehensive Evaluating Sulfurization Performance of Zinc Oxide Nanowires","authors":"Xueqing Wang, P. Xu, Haitao Yu, Xinxin Li","doi":"10.1109/TRANSDUCERS.2019.8808584","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808584","url":null,"abstract":"This paper reports a new technique with in-situ transmission electron microscopy (in-situ TEM) and resonant microcantilever to comprehensively evaluate sulfurization performance of ZnO nanowires. Herein, in-situ TEM is used to real-time observe the sulfurization process of ZnO nanowires under SO2-contained atmosphere. Based on temperature-varying micro-gravimetric method, thermodynamic interaction between ZnO nanowires and SO2 molecules is quantitatively evaluated by resonant microcantilever. By exposing the ZnO nanowires sample to SO2-contained atmosphere, a thick shell layer of ZnSO3 can be formed onto the surface of ZnO nanowires and a novel core-shell nanowire structure of ZnO@ZnSO3 is obtained finally. According to our comprehensive evaluation results, the ZnO nanowires sample with 100 nm diameter exhibits high reactive to SO2 molecules and is suitable for SO2 capture and storage.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"47 1","pages":"1187-1190"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78287121","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition 利用选择性钨化学气相沉积的纳米机电逻辑门
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808313
N. Toan, Dong Zhao, N. Inomata, M. Toda, Yunheub Song, T. Ono
{"title":"Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition","authors":"N. Toan, Dong Zhao, N. Inomata, M. Toda, Yunheub Song, T. Ono","doi":"10.1109/TRANSDUCERS.2019.8808313","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808313","url":null,"abstract":"NAND and NOR logical gates based on the electrostatically driven silicon nanoelectromechanical (NEM) switches coated tungsten (W) are designed, fabricated and evaluated. A selectively conformal W deposition on high aspect ratio silicon structures is investigated. Logical gates are successfully fabricated and all their functions have been proved. This work opens the possibility not only for producing the complex mechanical logic systems but also for a way to reducing capacitive gap width.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"17 1","pages":"1709-1711"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77705698","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation 热离子产生用硅解理产生的基于Mems纳米隙的温差测量
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808783
Masaki Shimofuri, Y. Hirai, T. Tsuchiya, O. Tabata
{"title":"Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation","authors":"Masaki Shimofuri, Y. Hirai, T. Tsuchiya, O. Tabata","doi":"10.1109/TRANSDUCERS.2019.8808783","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808783","url":null,"abstract":"Thermionic generation using nanogaps may use for energy harvesting at room temperature. Thermionic generation requires nanogap with a gap distance of several nm to several tens nm, and it is desirable that the opposing surfaces of the gap be parallel and smooth with a large area. We fabricated a 57 nm nanogap of 21.6(4.32×5.0) μm2 by cleaving a single crystal silicon beam installed in MEMS and measured the temperature difference between gap by Raman microscopy. In the experiment, the heat transfer via nanogap was confirmed to be very small.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"69 1","pages":"1483-1486"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77707222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Novel All-Solid-State Soil Nutrient Sensor Using Nanocomposite of Poly(3-Octyl-Thiophene) and Molybdenum Sulfate 基于聚(3-辛基-噻吩)和硫酸钼纳米复合材料的新型全固态土壤养分传感器
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808341
Md. Azahar Ali, Xinran Wang, Yuncong Chen, Yueyi Jiao, M. Castellano, James c. Schnable, P. Schnable, Liang Dong
{"title":"Novel All-Solid-State Soil Nutrient Sensor Using Nanocomposite of Poly(3-Octyl-Thiophene) and Molybdenum Sulfate","authors":"Md. Azahar Ali, Xinran Wang, Yuncong Chen, Yueyi Jiao, M. Castellano, James c. Schnable, P. Schnable, Liang Dong","doi":"10.1109/TRANSDUCERS.2019.8808341","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808341","url":null,"abstract":"Nitrate is a major macronutrient for plant growth. There is a high demand to develop robust, reliable, and maintenance-free soil sensors for long-term monitoring of nitrate variations in field. An ion-selective membrane-based solid-state nitrate sensor is developed using poly(3-octyl-thiophene)-molybdenum disulfide nanocomposite as an ion-to-electron transducing layer. The sensor offers a high sensitivity of 64 mV/decade, a dynamic range of 1–1500 ppm NO3--N, and an improved selectivity for nitrate detection in soils. The sensor has demonstrated the ability to continuously monitor soil nitrate concentrations over a period of four weeks.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"35 1","pages":"170-173"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77856655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Strain-Insensitive Soft Pressure Sensor for Health Monitoring Application Using 3D-Printed Microchannel Mold and Liquid Metal 应变不敏感软压力传感器用于健康监测应用，使用3d打印微通道模具和液态金属
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808472
Kyuyoung Kim, Jungrak Choi, Y. Jeong, Minseong Kim, I. Cho, Seunghwan Kim, Y. Oh, I. Park
{"title":"Strain-Insensitive Soft Pressure Sensor for Health Monitoring Application Using 3D-Printed Microchannel Mold and Liquid Metal","authors":"Kyuyoung Kim, Jungrak Choi, Y. Jeong, Minseong Kim, I. Cho, Seunghwan Kim, Y. Oh, I. Park","doi":"10.1109/TRANSDUCERS.2019.8808472","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808472","url":null,"abstract":"In this research, we introduce a strain-insensitive soft pressure sensor using 3D-printed microchannel mold and liquid metal for health monitoring applications. Our soft pressure sensor consists of elastomer and liquid metal for its intrinsic stretchable property. Also, serpentine geometric pattern of the microchannel enabled the sensor to be strain-insensitive for stable signal response and recovery in wearable applications. Various experiments for sensor characterizations were conducted and the study of FEM simulation verified the strain-insensitive behavior of serpentine pattern. As a health monitoring application, body pressure distribution was monitored using several pressure sensors attached on the clothes and the body pressures were compared according to various lying conditions.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"19 1","pages":"2535-2538"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77977419","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Novel Concept for Room Temperature NO2 Detection: Using Metal Oxides as Resistive Gas Dosimeters 室温NO2检测的新概念:使用金属氧化物作为电阻气体剂量计
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808409
Ricarda Wagner, D. Schönauer-Kamin, R. Moos
{"title":"Novel Concept for Room Temperature NO2 Detection: Using Metal Oxides as Resistive Gas Dosimeters","authors":"Ricarda Wagner, D. Schönauer-Kamin, R. Moos","doi":"10.1109/TRANSDUCERS.2019.8808409","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808409","url":null,"abstract":"In this work, a novel concept for resistive room temperature NO2 sensing is introduced with special respect to concentrations in the ppb-range. The sensor measures directly the dose of a target gas. The actual concentration can be obtained from the time derivative. ZnO, a well-known material for gas sensing, is used to demonstrate the feasibility.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"20 1","pages":"1393-1394"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86687188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Droplet Delivery Control for Surface Acoustic Wave Nebulization Mass Spectrometry 表面声波雾化质谱的液滴输送控制
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808244
Di Sun, K. Böhringer, Matthew Sorensen, Erik Nilsson, D. Goodlett
{"title":"Droplet Delivery Control for Surface Acoustic Wave Nebulization Mass Spectrometry","authors":"Di Sun, K. Böhringer, Matthew Sorensen, Erik Nilsson, D. Goodlett","doi":"10.1109/TRANSDUCERS.2019.8808244","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808244","url":null,"abstract":"We present a novel atomizer using standing wave type surface acoustic wave nebulization (SAWN). Compared with progressive wave SAWN, the standing wave SAWN creates smaller drop sizes. We integrate droplet delivery control functionality with anisotropic ratchet conveyors (ARC) on top of the SAWN surface, which employs micro-sized hydrophilic patterns on hydrophobic Cytop coatings. By adopting Parylene-C as a stencil mask, the hydrophobicity of Cytop does not degrade during fabrication. Droplet movement, merging, mixing and nebulizing are demonstrated as a lab-on-chip platform.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"31 1","pages":"49-52"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87662554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Film Morphology Effect on VOC Sensor Performance Fabricated by Drop-On-Demand Inkjet-Printing 薄膜形态对按需喷墨打印制造VOC传感器性能的影响
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808652
M. Kiaee, T. Maeder, J. Brugger
{"title":"Film Morphology Effect on VOC Sensor Performance Fabricated by Drop-On-Demand Inkjet-Printing","authors":"M. Kiaee, T. Maeder, J. Brugger","doi":"10.1109/TRANSDUCERS.2019.8808652","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808652","url":null,"abstract":"This paper presents a sensor for detecting volatile organic compounds with an inkjet-printed composite. The sensing material is composed of polystyrene (35 kg/mol molecular weight) and a high structure carbon black, Ketjenblack EC-600JD. We used a dual-solvent system for ink formulation and compared its print morphology, and sensing performance with a single-solvent system. The dual solvent system improved droplet formation and minimized coffee ring formation. The sensor response to acetone and ethanol was studied. We observed a 2-fold improved sensitivity due to the absence of the coffee ring effect, which is presumably linked to more uniformity of the surface and fewer variations in the film thickness. Moreover, a superior sensor response/recovery time was obtained by using a dedicated print strategy, e.g., inter-droplet spacing and print pattern layout.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"28 1","pages":"1361-1364"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84404365","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fluidic Self-Assembly Transfer Technology for Micro-Led Display 微型led显示屏的流体自组装传输技术
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808352
Seongkyu Cho, Daewon Lee, Sunghoon Kwon
{"title":"Fluidic Self-Assembly Transfer Technology for Micro-Led Display","authors":"Seongkyu Cho, Daewon Lee, Sunghoon Kwon","doi":"10.1109/TRANSDUCERS.2019.8808352","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808352","url":null,"abstract":"In this paper, we present a demonstration of high yield Fluidic Self-Assembly (FSA) technology to transfer gallium nitride (GaN) microchips which can be used for Micro-LED display. The low melting point alloy on the substrate and the metal electrode of the chip were assembled in heated solution by a simple shaking motion. More than 19,000 blue GaN microchips with 45um in diameter were precisely assembled at 99.90% yield within 1 min. At the chip sizes below 50um, this dramatic improvement in assembly yield was achieved by using a new assembly solution and chip designs. This low cost and fast demonstration has proven that FSA is a suitable mass transfer technology which is applicable to Micro-LED display after some further development.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"289 1","pages":"402-404"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82844246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A Novel Out-of-Plane Electrothermal Bistable Microactuator 一种新型面外电热双稳态微执行器
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI: 10.1109/TRANSDUCERS.2019.8808360
Liang Zhou, Huikai Xie
{"title":"A Novel Out-of-Plane Electrothermal Bistable Microactuator","authors":"Liang Zhou, Huikai Xie","doi":"10.1109/TRANSDUCERS.2019.8808360","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808360","url":null,"abstract":"This paper reports an out-of-plane bistable electrothermal microactautor that is comprised of inverted-series-connected (ISC) Cu/W-based multimorphs. S-shaped ISC multimorphs have been previously employed for generating large vertical displacement. In this work, the ISC multimorphs have been engineered into a warped shape via pre-stressed W and unbalanced SiO2 encapsulation layers. Electrothermal bistable actuators based on the warped ISC multimorphs have been fabricated and tested. A bistable vertical displacement of 25 μm has been obtained.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"125 1","pages":"1953-1956"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73459339","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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