2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)最新文献

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Estimating the Surface Adhesion Force Using Pull-in/-out Hysteresis in Comb-Drive Devices 利用梳状传动装置的拉入/拉出迟滞估计表面附着力
J. Mouro, S. Rana, J. Reynolds, Harold M. H. Chong, D. Pamunuwa
{"title":"Estimating the Surface Adhesion Force Using Pull-in/-out Hysteresis in Comb-Drive Devices","authors":"J. Mouro, S. Rana, J. Reynolds, Harold M. H. Chong, D. Pamunuwa","doi":"10.1109/TRANSDUCERS.2019.8808684","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808684","url":null,"abstract":"Surface adhesion forces play a critical role in the operation of NEM relays, but characterization data for micro/nanoscale contact areas of relevant materials are scarce. A novel technique to estimate the adhesion force between two contacting surfaces is presented. This method uses the hysteresis in the pull-in/-out voltages measured experimentally in electrostatically actuated comb-drive and circular NEM devices with two contacting electrodes. In these geometries the electrostatic actuation force is independent of the device displacement and the surface adhesion forces can be analytically calculated from the force balance describing the pull-out event. Finite-element ANSYS simulations of the electromechanical behavior of the devices support the analytical approach. Adhesion forces of 0.081 µN and 0.167 µN were calculated for Au-Au and Ti-Ti contacts with areas of 750 nm × 300 nm and 100 nm × 300 nm, respectively.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"23 1","pages":"1981-1984"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79061009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Film Bulk Acoustic Wave Resonator for Trace Chemical Warfare Agents Simulants Detection in Micro Chromatography 微色谱中痕量化学战剂模拟物检测的薄膜体声波谐振器
Jizhou Hu, H. Qu, Wenlan Guo, Ye Chang, W. Pang, X. Duan
{"title":"Film Bulk Acoustic Wave Resonator for Trace Chemical Warfare Agents Simulants Detection in Micro Chromatography","authors":"Jizhou Hu, H. Qu, Wenlan Guo, Ye Chang, W. Pang, X. Duan","doi":"10.1109/TRANSDUCERS.2019.8808278","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808278","url":null,"abstract":"This paper reported the polymer coated film bulk acoustic resonators (FBAR) as a sensitive detector in micro chromatography for the detection of trace chemical warfare agents (CWA) simulants. The FBAR sensor was enclosed in a microfluidic channel and then coupled with microfabricated separation column. The subsequent chromatographic analysis successfully demonstrated the detection of parts per billion (ppb) concentrations of chemical warfare agents (CWAs) simulants in a five components gas mixture. This work represented an important step toward the realization of FBAR based handheld micro chromatography for CWA detection in the field.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"126 1","pages":"45-48"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85902209","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Shape Memory Foil-Based Active Micro Damping for Portable Applications 基于形状记忆箔的便携式有源微阻尼
K. Jacob, S. Ahmadi, F. Wendler, S. Miyazaki, M. Gueltig, M. Kohl
{"title":"Shape Memory Foil-Based Active Micro Damping for Portable Applications","authors":"K. Jacob, S. Ahmadi, F. Wendler, S. Miyazaki, M. Gueltig, M. Kohl","doi":"10.1109/TRANSDUCERS.2019.8808494","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808494","url":null,"abstract":"Novel damping devices are presented and characterized that make use of energy dissipation due to the one-way shape memory effect in micromachined shape memory alloy (SMA) foil actuators of 30 µm thickness and lateral dimensions a few mm. The design of SMA foil actuators consists of free-standing planar suspensions with bridge, spiral and folded beam design for load control in-plane and out-of-plane. In contrast to SMA wire-based solutions, this new approach is compatible to MEMS batch fabrication technology. Under pulsed loading, a damping capacity of up to 0.92 is achieved, which compares favorably with the best viscoelastic damping concepts.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"16 1","pages":"590-593"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72857988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Large Strain Measurements by Vacuum-Packaged Mems Resonators Manufactured on Ultrathin Silicon Chips 超薄硅片真空封装Mems谐振器的大应变测量
L. Belsito, M. Ferri, A. Roncaglia
{"title":"Large Strain Measurements by Vacuum-Packaged Mems Resonators Manufactured on Ultrathin Silicon Chips","authors":"L. Belsito, M. Ferri, A. Roncaglia","doi":"10.1109/TRANSDUCERS.2019.8808240","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808240","url":null,"abstract":"Silicon resonators fabricated with wafer-level vacuum packaging on ultrathin silicon chips (overall thickness around 60 μm) are utilized for strain measurements on steel slabs. The thinned chips are glued on steel using M-bond 610 and Loctite EA 9461 adhesives and the sensor response during bending tests performed while operating the resonators in closed loop is measured, evaluating possible non-ideal effects such as creep and hysteresis. In the measurements, the results obtained on the ultrathin chips are compared with those achieved on sensors manufactured on the native 500 μm thick silicon substrates. The results obtained show an astonishing improvement in the measurements realized with the thinned chips, which show creep levels below 0.1%, no appreciable hysteresis phenomena and strain measurement range extended beyond 850 με, indicating that chip thinning can be a viable way to obtain high-quality strain measurements on a large range by vacuum-packaged silicon MEMS resonators","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"12 1","pages":"2009-2012"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73176660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study on the Influence of Ferroelectric Materials on the Output Performance of Triboelectric Nanogenerators 铁电材料对摩擦纳米发电机输出性能影响的研究
Xin Chen, Lingxiao Gao, Junfei Chen, Mengke Qi, Dongxiao Li, S. Zeng, X. Mu
{"title":"Study on the Influence of Ferroelectric Materials on the Output Performance of Triboelectric Nanogenerators","authors":"Xin Chen, Lingxiao Gao, Junfei Chen, Mengke Qi, Dongxiao Li, S. Zeng, X. Mu","doi":"10.1109/TRANSDUCERS.2019.8808323","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808323","url":null,"abstract":"Triboelectric nanogenerators (TENGs) have demonstrated as an effective way to harvest mechanical energy to drive small electronics. The density of triboelectric charges generated on contact surfaces between two distinct materials is a critical factor for dictating the output power. Herein, we demonstrate the unusual ability of ferroelectric materials to enhance the output performance of the triboelectric nanogenerators (TENG) by taking advantage of the dipole moment in the documents. The output voltage ranged from 100 V to 215 V under a constant contact force of 40 N. This work not only provides a new method of enhancing output power of TENGs but also offers an insight into charge transfer in contact electrification by investigating dipole-moment-induced effects on the electrical output of TENGs.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"1 1","pages":"342-345"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76706303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Self-Powered Transparent Stretchable 3D Motion Sensor 自供电透明可拉伸3D运动传感器
Hang Guo, Xuexian Chen, Liming Miao, Haobin Wang, Ji Wan, Haixia Zhang
{"title":"Self-Powered Transparent Stretchable 3D Motion Sensor","authors":"Hang Guo, Xuexian Chen, Liming Miao, Haobin Wang, Ji Wan, Haixia Zhang","doi":"10.1109/TRANSDUCERS.2019.8808338","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808338","url":null,"abstract":"This paper reports a novel self-powered three-dimension motion sensor capable of independently detecting contact trajectory, pressure and velocity based on triboelectrification and electrostatic induction synchronously. Motion trajectories in the full plane can be identified by using a unique net-cross electrodes configuration design. In addition, the patterned silver nanowires (AgNWs) electrodes are sprayed onto the polydimethylsilane (PDMS) substrate to achieve good transparency and stretchability. By attaching the 3D motion sensor on human skin or robot surface directly, the 3D motion information of the object could be acquired including pressure, velocity and trajectory. The self-powered 3D motion sensor is a promising candidate in terms of human-computer interaction, anti-counterfeiting signatures, etc.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"3 1","pages":"554-557"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78991193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Digital DNA Sequence Profiling of Rare Epigenetic Cancer Biomarkers in A Highly Parallelized Microfluidic Platform 高度并行微流控平台中罕见表观遗传癌症生物标志物的数字DNA序列分析
C. O’Keefe, Sixuan Li, Tza-Huei Wang
{"title":"Digital DNA Sequence Profiling of Rare Epigenetic Cancer Biomarkers in A Highly Parallelized Microfluidic Platform","authors":"C. O’Keefe, Sixuan Li, Tza-Huei Wang","doi":"10.1109/TRANSDUCERS.2019.8808784","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808784","url":null,"abstract":"We present a microfluidic platform for molecule-by-molecule detection of heterogeneous epigenetic patterns of rare tumor-derived DNA by highly parallelized digital melt assessment. We introduce a multilayer geometric strategy to capture single molecules in a pico-array at high efficiency. We demonstrate sensitive detection and comprehensive profiling of rare heterogeneously methylated DNA of a classic tumor suppressor gene, p14ARF, at frequencies as low as 0.0001% methylated/unmethylated.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"27 1","pages":"2-5"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86178427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Super High Frequency Lateral-Field-Excited Aluminum Nitride Cross-Sectional Lamé Mode Resonators 超高频侧向场激发氮化铝横截面lam<s:1>模谐振器
Guofeng Chen, Flavius V. Pop, M. Rinaldi
{"title":"Super High Frequency Lateral-Field-Excited Aluminum Nitride Cross-Sectional Lamé Mode Resonators","authors":"Guofeng Chen, Flavius V. Pop, M. Rinaldi","doi":"10.1109/TRANSDUCERS.2019.8808381","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808381","url":null,"abstract":"This paper reports on the first demonstration of super high frequency (SHF) lateral-field-excited (LFE) aluminum nitride (AlN) cross-sectional Lamé mode resonators (CLMRs). A simple 2-mask process was used to fabricate LFE AlN CLMRs operating at 4.2 GHz with an electromechanical-coupling coefficient kt2 of 1.2 %, providing > 20 MHz filter bandwidth. Anchor loss is reduced to provide 2X higher quality factor (Qm > 1150) implemented with a small termination impedance of 160 Ω. Such important features render AlN LFE CLMRs promising candidates for low-cost yet high-performance wireless communication technologies, such as LTE‐Advanced contiguous carrier aggregation which requires up to 20 MHz bandwidth.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"02 1","pages":"539-542"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86094773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Acoustic Micro-Opto-Mechanical Transducers for Crack Width Measurement on Concrete Structures from Aerial Robots 基于航空机器人的混凝土结构裂缝宽度测量声学微光机械传感器
D. Marini, L. Belsito, L. Masini, M. A. Trujillo, Ángel L. Petrus, D. Martínez, Francisco Gamero, J. M. Barrientos, Elena Blanco, A. Roncaglia
{"title":"Acoustic Micro-Opto-Mechanical Transducers for Crack Width Measurement on Concrete Structures from Aerial Robots","authors":"D. Marini, L. Belsito, L. Masini, M. A. Trujillo, Ángel L. Petrus, D. Martínez, Francisco Gamero, J. M. Barrientos, Elena Blanco, A. Roncaglia","doi":"10.1109/TRANSDUCERS.2019.8808296","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808296","url":null,"abstract":"A novel Micro-Opto-Mechanical acoustic sensor that can be utilized to measure the width of surface opening cracks in concrete structures from aerial robots is presented. The sensor is used in combination with a piezoelectric emitter operating at 54 kHz in a crack width measurement procedure that provides a resolution around 0.2 mm. The method is tolerant to pressure variations during contact with concrete, which may easily occur when operating the sensors from aerial robots.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"96 1","pages":"893-896"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83984591","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion 用高分辨率衍射x射线跟踪方法观察离子通道门控运动的微制溶液室
Ikkei Yamauchi, Tomoki Tabuchi, Y. Hirai, M. Iwamoto, T. Tsuchiya, H. Shimizu, O. Tabata
{"title":"Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion","authors":"Ikkei Yamauchi, Tomoki Tabuchi, Y. Hirai, M. Iwamoto, T. Tsuchiya, H. Shimizu, O. Tabata","doi":"10.1109/TRANSDUCERS.2019.8808206","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808206","url":null,"abstract":"The Diffracted X-ray Tracking (DXT) method enables capturing the motion of ion-channel proteins upon gating by tracking a diffraction spot from a gold nanocrystal. However, high background noise from the conventional observation chamber prevented the clear detection of diffraction spots. In order to reduce the background noise, we propose a novel solution chamber comprising two microfabricated silicon nitride (SiN) membranes. A reduction in background noise as well as trajectories of diffraction spots were observed with this chamber. Furthermore, the gating dynamics of KcsA potassium ion channel occurring in response to acidic pH was successfully measured.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"29 1","pages":"25-28"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83028237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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