2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)最新文献

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Kirigami Cross-Shaped 3D Buckling Active Sensor for Detecting Stretching and Bending 用于检测拉伸和弯曲的Kirigami十字形三维屈曲主动传感器
Liming Miao, Ji Wan, Hang Guo, Haobin Wang, Yu Song, Xuexian Chen, Haixia Zhang
{"title":"Kirigami Cross-Shaped 3D Buckling Active Sensor for Detecting Stretching and Bending","authors":"Liming Miao, Ji Wan, Hang Guo, Haobin Wang, Yu Song, Xuexian Chen, Haixia Zhang","doi":"10.1109/TRANSDUCERS.2019.8808716","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808716","url":null,"abstract":"Stretchable and movable 3D structure is a great choice for sensing stretching and bending. This paper reports a novel cross-shaped 3D buckling strain sensor based on polydimethylsiloxane (PDMS) substrate for detecting stretching and bending. Using pre-stretched PDMS, cross-shaped Polyimide (PI) film with conductive silver paint on its top surface as a 2D precursor can pop up as a dynamic 3D structure and possesses capacitive effect and triboelectric effect under different stretching and bending, which can detect stretching directions, strain value, bending axis direction and radius of curvature simultaneously, showing great potential in human and robot applications.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"49 1","pages":"2488-2491"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84688938","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Picoliter Droplet Generation for Fast Monitoring the Brain Chemistry with Scaled Silicon Nanodyalisis Probe 用硅纳米探针快速监测脑化学的皮升液滴生成
Yan Zhang, Ari Esters, O. Bi, Y. Vlasov
{"title":"Picoliter Droplet Generation for Fast Monitoring the Brain Chemistry with Scaled Silicon Nanodyalisis Probe","authors":"Yan Zhang, Ari Esters, O. Bi, Y. Vlasov","doi":"10.1109/TRANSDUCERS.2019.8808797","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808797","url":null,"abstract":"To monitor neurochemicals while minimizing brain damage, a microdialysis system is developed with fluidic channels scaled to 5 μm-radius to fit into 15x50 μm2 silicon neural probe. Droplet generation is utilized to halt Taylor dispersion to achieve high temporal resolution. To extend the stability region for monodisperse droplet generation in such a space-limited probe at ultra-low nL/min flow rates, we varied the T-junction angle, parameter that is typically omitted from consideration for larger channels. In a series of experiments, we found that increase of the T-junction angle increases the critical capillary number separating squeezing and jetting segmentation regimes. With optimized geometry, we demonstrated generation of monodisperse pL-volume droplets in silicon nanofluidic channels. Finite element analysis indicated that these effects are due to interplay between differential pressure and viscous shear forces.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"31 1","pages":"209-212"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89963632","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Effects of Disc-Shaped Piezoelectric Size Reduction on Resonant Inductorless DC-DC Converter 圆盘形压电尺寸减小对谐振式无电感DC-DC变换器的影响
B. Pollet, Mustapha Touhami, G. Despesse, F. Costa
{"title":"Effects of Disc-Shaped Piezoelectric Size Reduction on Resonant Inductorless DC-DC Converter","authors":"B. Pollet, Mustapha Touhami, G. Despesse, F. Costa","doi":"10.1109/TRANSDUCERS.2019.8808328","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808328","url":null,"abstract":"This paper studies the impact of disc-shaped piezoelectric resonator dimensions on a non-isolated inductorless piezoelectric DC-DC converter. An analytical model, linking geometrical parameters to output power and efficiency is introduced. This later reveals the benefits of reducing the thickness and diameter of the piezoelectric disk. Five piezoelectric discs with different dimensions are tested and compared in experimental works, giving very high efficiency up to 98% and output power up to 1.7 W. An exceptional power density of 366 W.cm-3 was measured at 450 kHz for a 25-30 Volt conversion with an efficiency of 81%.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"114 1","pages":"1423-1426"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76795387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Therapeutic and Side Effects Modeling of Electrolytic Cancer Ablation Therapy Using Organ-on-a-Chip 基于芯片器官的电解癌症消融治疗及副作用建模
Moonchul Park, Jong man Yoo, Albert Kim
{"title":"Therapeutic and Side Effects Modeling of Electrolytic Cancer Ablation Therapy Using Organ-on-a-Chip","authors":"Moonchul Park, Jong man Yoo, Albert Kim","doi":"10.1109/TRANSDUCERS.2019.8808803","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808803","url":null,"abstract":"Minimal invasive ablation therapy is an emerging treatment that enables locoregional tumor removal. One promising modality is electrolytic ablation therapy which induces cell death through local delivery of low-energy direct current. However, the realization of electrolytic ablation in the clinic has hampered by not-well-defined efficacy and mechanism. In this paper, we introduce a Multi-Organoid-on-a-Chip (MOC) that enables the modeling of electrolytic ablation therapy. The evaluated efficacy of electrolytic ablation on pancreatic cancer organoids revealed a 0.14 %/min cell death, while the side effects on neighboring, normal liver organoids inflicted minimal cell death (0.001 %/min). The in vitro results demonstrate a mechanism of the cell death is mainly due to locoregional pH change, and side effects due to byproducts of the electrochemical reaction are minimal.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"3 1","pages":"484-487"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75591664","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of Partly Encapsulated Vertical Nanoelectrodes for an Intracellular Microelectrode Array 细胞内微电极阵列部分封装垂直纳米电极的制备
Sonja Allani, A. Jupe, H. Kappert, H. Vogt
{"title":"Fabrication of Partly Encapsulated Vertical Nanoelectrodes for an Intracellular Microelectrode Array","authors":"Sonja Allani, A. Jupe, H. Kappert, H. Vogt","doi":"10.1109/TRANSDUCERS.2019.8808711","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808711","url":null,"abstract":"In this work, a concept and proof of principle regarding a fabrication technique for vertical nanoelectrodes is presented. CMOS-compatible processes for the fabrication of three-dimensional tubes which are partly encapsulated by an insulation layer are conceived. An extended sacrificial layer technique using deep reactive ion etching (DRIE) and atomic layer deposition (ALD) of encapsulation and electrode material was developed. Additional spacing techniques for tapering of electrode diameter and tip post-lithographically are investigated. Finally, free-standing nanoelectrodes and test structures were produced. The resulting tunable nanoelectrode array can lead to a novel device for a bidirectional interface between integrated circuits and living cells.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"44 1","pages":"1619-1622"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79437339","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures 利用3C-SiC/Si异质结构的超灵敏光电压阻传感器
T. Nguyen, T. Dinh, Abu Riduan Md Foisal, Hoang‐Phuong Phan, Tuan‐Khoa Nguyen, N. Nguyen, D. Dao
{"title":"Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures","authors":"T. Nguyen, T. Dinh, Abu Riduan Md Foisal, Hoang‐Phuong Phan, Tuan‐Khoa Nguyen, N. Nguyen, D. Dao","doi":"10.1109/TRANSDUCERS.2019.8808394","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808394","url":null,"abstract":"Here we report for the first time an ultra-sensitive opto-piezoresistive effect in cubic silicon carbide (3C-SiC) nanofilms grown on silicon (Si). The sensitivity of the sensor was significantly enhanced by coupling the photovoltaic effect and controlling distribution of hole/electron in semiconductors. By applying this method, the gauge factor (GF) of strain sensors can be improved at least three orders of magnitude compared to conventional MEMS sensor. A GF of approximately 58,000 was observed, which is the highest GF reported for semiconductor piezoresistive sensors to date. Consequently, our findings can be deployed to develop ultra-sensitive mechanical sensors and MEMS/NEMS sensing applications.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"98 1","pages":"2057-2060"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79480310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fabrication and Integration of Binary Phased Fresnel Lens and Micro Linear Actuator for IR Laser Beam Scanning Application 用于红外激光束扫描的二元相位菲涅耳透镜和微线性驱动器的制造与集成
Hsueh-Yu Lu, Chi-En Lu, Zi-Rong Huang, Shihwei Lin, Sung-Cheng Lo, Rongshun Chen, W. Fang
{"title":"Fabrication and Integration of Binary Phased Fresnel Lens and Micro Linear Actuator for IR Laser Beam Scanning Application","authors":"Hsueh-Yu Lu, Chi-En Lu, Zi-Rong Huang, Shihwei Lin, Sung-Cheng Lo, Rongshun Chen, W. Fang","doi":"10.1109/TRANSDUCERS.2019.8808625","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808625","url":null,"abstract":"This study presents a MEMS IR-laser beam scanning system consisted of the micro Fresnel lens and linear comb actuators. The merits of this study is to fabricate and further integrate the binary phase Fresnel lens, micro springs, and micro electrostatic actuators through the silicon micromachining processes to achieve the proposed IR-laser beam scanning system. Thus, the difficulty and problem resulted from assembly can be prevented. The proposed IR-laser beam scanner is a spring-mass system driven by linear comb-drive actuators, and operates at the resonant frequency to enlarge the scanning angle. Measurements indicate the scanner has a resonant frequency of ~2 kHz (exceeds the millisecond minimum response time requirement for application), and a displacement of greater than ±20μm at a driving voltage of VDC=12.5V, Vpp=18V. Moreover, the 1550 nm infrared laser beam has a deflection angle of ±6.84°.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"24 1","pages":"1584-1587"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83235520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications 用于低功耗和快速启动应用的具有受电弓振动的三轴捕获和释放陀螺仪
A. Yuzawa, R. Gando, K. Masunishi, E. Ogawa, Hiroki Hiraga, Y. Tomizawa, T. Itakura, T. Ikehashi
{"title":"A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications","authors":"A. Yuzawa, R. Gando, K. Masunishi, E. Ogawa, Hiroki Hiraga, Y. Tomizawa, T. Itakura, T. Ikehashi","doi":"10.1109/TRANSDUCERS.2019.8808391","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808391","url":null,"abstract":"This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a \"Catch-and-Release (CR)\" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"29 1","pages":"430-433"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90536933","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
High-Temperature Piezoelectric Pressure Sensors for Hypersonic Flow Measurements 用于高超声速流量测量的高温压电压力传感器
Yoonho Seo, Donghwan Kim, N. Hall
{"title":"High-Temperature Piezoelectric Pressure Sensors for Hypersonic Flow Measurements","authors":"Yoonho Seo, Donghwan Kim, N. Hall","doi":"10.1109/TRANSDUCERS.2019.8808755","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808755","url":null,"abstract":"This paper presents a microelectromechanical-system (MEMS) piezoelectric pressure sensor for measurements in hypersonic flows at extreme temperatures (>1000 °C). 700-µm diameter diaphragms are surface- and bulk-micromachined and employ aluminum nitride as the sensing material due to its potential for high-temperature operation. Novelty claims include the following: (1) First demonstration of MEMS piezoelectric pressure sensor to capture hypersonic-flow-specific features in field measurements, including shock waves and second-mode instabilities associated with laminar-to-turbulent transition, (2) Successful audio capture while the sensor is immersed in a butane flame, demonstrating operation at extreme temperatures, and (3) First dynamic pressure sensor to include on-diaphragm thin-film platinum temperature sensors for high-temperature readout.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"6 1","pages":"2110-2113"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87789575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Strain Sensor Based on Optical Intensity Change Through the Carbon Nanotube Embedded Elastomer 基于碳纳米管嵌入弹性体光强变化的应变传感器
Jimin Gu, D. Kwon, Junseong Ahn, I. Park
{"title":"Strain Sensor Based on Optical Intensity Change Through the Carbon Nanotube Embedded Elastomer","authors":"Jimin Gu, D. Kwon, Junseong Ahn, I. Park","doi":"10.1109/TRANSDUCERS.2019.8808701","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808701","url":null,"abstract":"In this research, the 3D printed package for optical transmittance change base strain sensor was developed. Optical transmittance based strain sensor is consisted by light source, light detector and functional film which transmittance changed by the external strain. Functional film is carbon nanotube embedded elastomer and it changes its visible light transmittance by the strain. To adjust the optical strain sensor on the human motion detection, we positioned light source and detector in the sensor package. To achieve this problem, we adopted the 3D printed polylactic acid (PLA) package for fabricating ring type strain sensor for finger bending detection.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"16 1","pages":"1716-1719"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79203343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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