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2013 International Conference on Optical MEMS and Nanophotonics (OMN)最新文献

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Sensitivity-enhanced SERS substrate fabrication by nanoimprinting compressed PDMS elastomer 纳米压印压缩PDMS弹性体制备灵敏度增强的SERS衬底
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659098
W. Kuo, Jiayue Yan, W. Chou, H. Yu
{"title":"Sensitivity-enhanced SERS substrate fabrication by nanoimprinting compressed PDMS elastomer","authors":"W. Kuo, Jiayue Yan, W. Chou, H. Yu","doi":"10.1109/OMN.2013.6659098","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659098","url":null,"abstract":"This paper reports a low-cost fabrication method of sensitivity-enhanced SERS substrate using nanoimprinting lithography. A PDMS elastomer with grating structure is deformed by compressing to achieve the better pitch for SERS substrate. Experimental results show that the sensitivity can be enhanced about three times by this method.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"14 1","pages":"139-140"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76079101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thermoelectrically controlled varifocal micromirror for near aberration free imaging 用于近像差成像的热电控制变焦微镜
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659037
Li Li, Ran Li, W. Lubeigt, D. Uttamchandani
{"title":"Thermoelectrically controlled varifocal micromirror for near aberration free imaging","authors":"Li Li, Ran Li, W. Lubeigt, D. Uttamchandani","doi":"10.1109/OMN.2013.6659037","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659037","url":null,"abstract":"A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"60 1","pages":"17-18"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78119011","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Vertical field enhanced nanostructure for quantum well infrared photodetector through Germanium subwavelength arrays 基于锗亚波长阵列的量子阱红外光电探测器垂直场增强纳米结构
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659060
Wei Dong, T. Hirohata, K. Nakajima, Xiao-ping Wang
{"title":"Vertical field enhanced nanostructure for quantum well infrared photodetector through Germanium subwavelength arrays","authors":"Wei Dong, T. Hirohata, K. Nakajima, Xiao-ping Wang","doi":"10.1109/OMN.2013.6659060","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659060","url":null,"abstract":"Finite-difference-time-domain (FDTD) computer simulations reveal interesting features of Germanium (Ge) subwavelength nanostructures designed in x-y plane on substrate of InP with normal incidence, which can be applied in quantum well infrared photodetector (QWIP). Unlike the mechanism of excellent near field effects through periodic metallic nanostructures, large intensity of Ez field is achieved at near-infrared range by subwavelength arrays of Ge which has no surface plasmons (SPs). The evanescent Ez field generated along the surface of Ge is interpreted due to waveguide mode interference of coupled scattering. The existence of the enhanced field is confirmed by comparing the Fourier transform infrared (FTIR) spectra of real-fabricated samples with simulation outcomes. Positions of resonant peaks obtained in experiment are in good agreement with those of simulation.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"39 1","pages":"63-64"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81403940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An infrared detector based on nonlinear oscillation 一种基于非线性振荡的红外探测器
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659110
Daisuke Momonoi, T. Yamazaki, S. Kumagai, M. Sasaki
{"title":"An infrared detector based on nonlinear oscillation","authors":"Daisuke Momonoi, T. Yamazaki, S. Kumagai, M. Sasaki","doi":"10.1109/OMN.2013.6659110","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659110","url":null,"abstract":"An infrared detector that uses nonlinear oscillation was fabricated for achieving high sensitivity. Transducer of the infrared detection was a torsional oscillator consisting bi-materials structures. When the incident infrared is absorbed by the torsional oscillator, the oscillator is bended due to the differences in thermal expansions. The bending hardens the spring constant of torsional oscillator to shift the resonant frequency. To improve the response to light incidence, the light-absorbing material of copper black film was deposited on the light-absorber. Reflectivity of the copper black film was 0.2%. Irradiating light onto the detector shifted the resonant frequency.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"312 1","pages":"163-164"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77242831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro-scanning mirrors for high-power laser applications in laser surgery 高功率激光微扫描镜在激光手术中的应用
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1117/12.2042671
T. Sandner, Simon Kimme, T. Grasshoff, U. Todt, A. Graf, Christian Tulea, A. Lenenbach, H. Schenk
{"title":"Micro-scanning mirrors for high-power laser applications in laser surgery","authors":"T. Sandner, Simon Kimme, T. Grasshoff, U. Todt, A. Graf, Christian Tulea, A. Lenenbach, H. Schenk","doi":"10.1117/12.2042671","DOIUrl":"https://doi.org/10.1117/12.2042671","url":null,"abstract":"We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"58 1","pages":"83-84"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78902700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Monolithic photonic crystal-based fiber-tip Fabry-Pérot static pressure sensor 基于单片光子晶体的光纤尖端法布里-普氏静压传感器
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659053
Xuan Wu, C. Jan, O. Solgaard
{"title":"Monolithic photonic crystal-based fiber-tip Fabry-Pérot static pressure sensor","authors":"Xuan Wu, C. Jan, O. Solgaard","doi":"10.1109/OMN.2013.6659053","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659053","url":null,"abstract":"We developed a monolithic photonic crystal-based optical fiber-tip static pressure sensor. The single-crystalline silicon, from which the sensor was built, ensures a low-stress membrane free of the buckling that is characteristic of oxide membranes on silicon. The photonic crystals on the membrane improve its reflectance and sharpen the Fabry-Pérot resonance peaks. The sensor head fits within an 11 mm × 1.8 mm × 1.8 mm volume and exhibits a sensitivity of 6.76 nm/kPa with excellent linearity up to 3.73 kPa.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"41 1","pages":"49-50"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74141630","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
2D MEMS scanner with a rotation-angle detector for a time-of-flight image sensor 二维MEMS扫描仪与旋转角度检测器的飞行时间图像传感器
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659078
I. Aoyagi, K. Hamaguchi, Y. Nonomura, T. Akashi
{"title":"2D MEMS scanner with a rotation-angle detector for a time-of-flight image sensor","authors":"I. Aoyagi, K. Hamaguchi, Y. Nonomura, T. Akashi","doi":"10.1109/OMN.2013.6659078","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659078","url":null,"abstract":"A moving-magnet-type raster-output 2D MEMS scanner with a rotation-angle detector has been developed. To realize high precision and low temperature dependence, we propose the detector composed of four Hall sensors. By operation the outputs of the four Hall sensors, we enhanced the sensitivity and linearity of the detector, and realized the high precision detector. The fabricated detector achieved the detecting linearity of <; ± 0.11° for movable frame, and <; ± 0.07° for movable mirror at room temperature.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"102 1","pages":"99-100"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73220549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Integration of angular rate sensor on large deflection polymer-MEMS mirror 角速率传感器在大偏转聚合物- mems反射镜上的集成
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659063
Hirofumi Yamashita, K. Terao, H. Takao, F. Shimokawa, F. Oohira, Takaaki Suzuki
{"title":"Integration of angular rate sensor on large deflection polymer-MEMS mirror","authors":"Hirofumi Yamashita, K. Terao, H. Takao, F. Shimokawa, F. Oohira, Takaaki Suzuki","doi":"10.1109/OMN.2013.6659063","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659063","url":null,"abstract":"Repeatability of driving characteristics of a polymer-MEMS mirror are transitioned by an environment and time course change. In this study, we propose a method of motion sensing for the purpose of laser scan stable by the active control of a polymer-MEMS mirror. A proposed motion sensor is a coil-type sensor that induces the electric current by an electromagnetic induction and monolithically integrated on the mirror driving by the electromagnetic force. The fabricated mirror made of SU-8 polymer deflects over ±30deg. at low electric current. The measured current induced by the integrated sensor coil is clearly obtained by applying the lock-in detection for signal processing method, and it indicates that the feasibility of amplitude control of the polymer MEMS mirror.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"100 2 1","pages":"69-70"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77578428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Assembly of 3D MEMS mirrors and scanners using compliant push pads 使用兼容的推板组装3D MEMS反射镜和扫描仪
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659042
Y. Chiu, Yan-Ting Wu, Hao-Chiao Hong
{"title":"Assembly of 3D MEMS mirrors and scanners using compliant push pads","authors":"Y. Chiu, Yan-Ting Wu, Hao-Chiao Hong","doi":"10.1109/OMN.2013.6659042","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659042","url":null,"abstract":"This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"52 1","pages":"27-28"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79396361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Mirrors and anti-reflective surfaces in single crystal silicon by patterning of the silicon surface 单晶硅表面的镜面和抗反射表面
2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI: 10.1109/OMN.2013.6659061
S. Hadzialic, M. Taklo
{"title":"Mirrors and anti-reflective surfaces in single crystal silicon by patterning of the silicon surface","authors":"S. Hadzialic, M. Taklo","doi":"10.1109/OMN.2013.6659061","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659061","url":null,"abstract":"We present mirrors and anti-reflective (AR) surfaces based on micro-structuring of silicon. Compared to dielectric Bragg reflector mirrors and thin film AR-coatings these structures are thinner, result in less material stress, and are compatible with CMOS technology (all silicon). Our surface structures are optimized for the 7-14 μm wavelength range. Such structures have applications within fields of infrared imaging, alcoholmeters, and cooling and anesthesia gas-detectors.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"2021 1","pages":"65-66"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76744906","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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