T. Sandner, Simon Kimme, T. Grasshoff, U. Todt, A. Graf, Christian Tulea, A. Lenenbach, H. Schenk
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引用次数: 15
摘要
本文设计了两种新型的大孔径微扫描镜，采用HR介质涂层，适用于小型激光仪器的高功率激光应用。采用5×7.1mm孔径的静电驱动二维光栅扫描镜对激光切割过程中的ps激光束进行动态转向。第二个磁性2d光束转向镜使手动制导激光仪器的静态光束校正成为可能。介绍了一种6 mm × 8 mm反射板磁万向节微镜的优化设计。这里达到了3°的静态偏转。两种MEMS器件都成功地在532nm高功率ps激光器上进行了20W连续波测试。
Micro-scanning mirrors for high-power laser applications in laser surgery
We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.
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