Assembly of 3D MEMS mirrors and scanners using compliant push pads

Abstract

This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.