基于单片光子晶体的光纤尖端法布里-普氏静压传感器

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659053

Xuan Wu, C. Jan, O. Solgaard

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引用次数: 9

摘要

研制了基于单片光子晶体的光纤尖端静压传感器。单晶硅是传感器的制造材料，它保证了低应力膜不会出现硅氧化膜的屈曲现象。膜上的光子晶体提高了膜的反射率，使膜的法布里-普氏共振峰锐化。传感器头的尺寸为11 mm × 1.8 mm × 1.8 mm，灵敏度为6.76 nm/kPa，线性度最高可达3.73 kPa。

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Monolithic photonic crystal-based fiber-tip Fabry-Pérot static pressure sensor

We developed a monolithic photonic crystal-based optical fiber-tip static pressure sensor. The single-crystalline silicon, from which the sensor was built, ensures a low-stress membrane free of the buckling that is characteristic of oxide membranes on silicon. The photonic crystals on the membrane improve its reflectance and sharpen the Fabry-Pérot resonance peaks. The sensor head fits within an 11 mm × 1.8 mm × 1.8 mm volume and exhibits a sensitivity of 6.76 nm/kPa with excellent linearity up to 3.73 kPa.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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