2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)最新文献_第3页

Modeling of highly multimodal optical interconnects for time domain analysis 用于时域分析的高多模态光互连建模

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869691

A. Himmler, E. Griese, J. Schrage, T. Bierhoff, A. Wallrabenstein

引用次数: 1

Receiver performance of broadband data delivery on WDM systems using spectrally sliced spontaneous emission sources 波分复用系统宽带数据传输接收机性能研究

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869752

C. Lam, M. Feuer, N. Frigo

{"title":"Receiver performance of broadband data delivery on WDM systems using spectrally sliced spontaneous emission sources","authors":"C. Lam, M. Feuer, N. Frigo","doi":"10.1109/LEOSST.2000.869752","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869752","url":null,"abstract":"Spectral slicing of spontaneous emission sources has been proposed to deliver broadcast services on WDM passive optical networks. Recent advances in ultrahigh power LEDs makes spectral slicing a more promising solution for FTTH broadband access systems. However, the output from a spontaneous emission source contains spontaneous-spontaneous emission beat noise, also called excess intensity noise. The signal to spontaneous-spontaneous emission beat noise ratio is proportional to the ratio of the optical bandwidth of the optical source to the electrical detection bandwidth. With the new requirements of delivering high speed broadband data in access networks and the introduction of closer and narrower bandwidth optical wavelength channels, the effects of spontaneous-spontaneous emission beat noise becomes more pronounced in spectrally sliced WDM systems. In this paper, we experimentally study the performance of broadband data delivery on WDM systems using spectrally sliced spontaneous emission sources.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"126 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128043815","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Spectroscopic ellipsometry and reflectometry: a user's perspective 光谱椭偏和反射:用户的视角

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869717

H. Tompkins, J. Baker, S. Smith, D. Convey

{"title":"Spectroscopic ellipsometry and reflectometry: a user's perspective","authors":"H. Tompkins, J. Baker, S. Smith, D. Convey","doi":"10.1109/LEOSST.2000.869717","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869717","url":null,"abstract":"We discuss how analytical tools in a characterization lab can be used to enhance metrology tools in a fab. The emphasis is on the interaction between a characterization lab and a wafer fab belonging to the same industrial company. Specifically this work will deal with ex situ analysis rather than in situ metrology. A metrology tool in a fab must be clean, fast, simple to operate, and must be able to measure small features. A classical example is a reflectometry tool. On the other hand, a tool in a characterization lab can handle a much more complex sample, can take a significantly longer time for the analysis, and often has the luxury of using a blanket wafer. The analyst is also available for consulting with regard to optimum samples configuration in order to generate the information required. Our emphasis will be on using spectroscopic ellipsometry in a characterization lab to develop optical constants of unusual material so that this information can be used in a reflectometry tool in the fab.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122655097","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Liquid crystal devices as holographic recording media for aberration compensation in membrane-mirror based telescope systems 液晶器件作为全息记录介质用于膜镜望远镜系统的像差补偿

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869733

T. Martinez, M. Gruneisen, K. MacDonald, J. Baker

引用次数: 0

Enhanced imaging arrays using a sigma delta ADC in Si CMOS for each array pixel 对每个阵列像素使用Si CMOS中的σ δ ADC增强成像阵列

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869677

M. Brooke

引用次数: 1

Scatterometry applied to microelectronics processing 散射测量在微电子加工中的应用

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869722

J. McNeil

引用次数: 20

Confidence limits for network performance in the presence of homodyne optical crosstalk 纯差光串扰存在时网络性能的置信限

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869747

K. Durrani, M. Holmes

引用次数: 2

Burst mode optical data switching in WDM networks WDM网络中突发模式光数据交换

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869763

B. Meagher, Xiaohui Yang, R. McFarland

引用次数: 2

Substrate temperature measurement and control by emissivity compensated pyrometry during metalorganic vapor phase epitaxy of III-V device structures in large scale rotating disc reactors 大型转盘反应器III-V型金属有机气相外延器件结构中衬底温度的测量与控制

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869727

J. Ramer, B. Patel, V. Boguslavskiy, A. Patel, M. Schurman, A. Gurary

{"title":"Substrate temperature measurement and control by emissivity compensated pyrometry during metalorganic vapor phase epitaxy of III-V device structures in large scale rotating disc reactors","authors":"J. Ramer, B. Patel, V. Boguslavskiy, A. Patel, M. Schurman, A. Gurary","doi":"10.1109/LEOSST.2000.869727","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869727","url":null,"abstract":"The growth process for many III-V semiconductor devices is quite temperature sensitive. The temperature window for some of the more challenging device structures can be as narrow as 2-3/spl deg/C, depending upon how tight the final device specifications are. Clearly, measurement and control of the growth temperature in a MOVPE production environment is critical to maintaining high yields from the growth process. We have solved this problem by using a pyrometric technique known as emissivity compensated pyrometry. This in-situ measurement technique requires the combined functionality of a conventional pyrometer and a reflectometer. The reflectance of the substrate is measured at the same wavelength that the pyrometer measures the thermal radiance. By using the equation /spl epsi/=1-R the spectral directional emissivity of the substrate surface can be calculated from the measured spectral directional reflectivity. This allows the measured thermal emission to be constantly corrected for the changing emissivity of the growth surface. In this way, the accurate temperature of the substrate can be measured at any time during growth.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123886776","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Noise and distortion characteristics of cryogenic vertical cavity lasers 低温垂直腔激光器的噪声和畸变特性

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1049/EL:20001108

Hanxing Shi, D. Cohen, D. Lofgreen, L. Coldren

引用次数: 0