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2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)最新文献

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Frequency locking of micromachined tunable VCSELs to external wavelength selective filters 微机械可调谐vcsel对外部波长选择滤波器的频率锁定
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869679
W. Martin, C. Lin, F. Sighwo, J. Harris
{"title":"Frequency locking of micromachined tunable VCSELs to external wavelength selective filters","authors":"W. Martin, C. Lin, F. Sighwo, J. Harris","doi":"10.1109/LEOSST.2000.869679","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869679","url":null,"abstract":"Frequency locking and tracking of a micromachined tunable VCSEL to an external spectrometer over a 7 nm range is demonstrated. Frequency locking to channels in an arrayed waveguide grating is needed for WDM systems.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125906982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Beam steering optical switches using LCOS: The 'ROSES' demonstrator 使用LCOS的光束导向光开关:“ROSES”演示器
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1049/IC:20000020
W. Crossland, I. Manolis, M. Redmond, K. L. Tan, T. Wilkinson, H. Chu, J. Croucher, V. Handerek, M. Holmes, T. Parker, I.G. Bonas, B. Robertson, S. Warr, R. Franklin, C. Stace, H. White, R. A. Woolley, G. Henshall
{"title":"Beam steering optical switches using LCOS: The 'ROSES' demonstrator","authors":"W. Crossland, I. Manolis, M. Redmond, K. L. Tan, T. Wilkinson, H. Chu, J. Croucher, V. Handerek, M. Holmes, T. Parker, I.G. Bonas, B. Robertson, S. Warr, R. Franklin, C. Stace, H. White, R. A. Woolley, G. Henshall","doi":"10.1049/IC:20000020","DOIUrl":"https://doi.org/10.1049/IC:20000020","url":null,"abstract":"The design, assembly and performance of a prototype 1/spl times/8 reconfigurable holographic free-space switch is described. Central to the switch fabric is a ferroelectric liquid crystal (FLC) on silicon spatial light modulator (SLM) deposited with a 540/spl times/1 array of planar mirror strips. The input and output ports to the switch are fabricated as a linear array of silica planar waveguides connected to single-mode fibres. The waveguide array and the single Fourier transform lens for the holographic replay system are housed in an optomechanical mount to provide stability. The switch operates at 1.55 /spl mu/m wavelength and has a designed optical bandwidth of >60 nm. The primary aim of the ROSES project was to develop the technology required to implement a large scale N/spl times/N holographic routing switch. As a first step towards this goal, a prototype polarisation independent linear 1/spl times/8 fibre optic routing switch was developed. The switch was designed to take a signal beam from a single mode fibre, and dynamically route it to one of eight single-mode output fibres. The switch consists of four main components: a waveguide array providing spatial fan-in to and from the input and output fibres, a Fourier lens, a reflective binary-phase FLC silicon backplane SLM that acts as a beam steering element, and a custom interface board.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125953717","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Trace moisture detection in corrosive gases using quadrupole mass spectroscopy 四极杆质谱法检测腐蚀性气体中的微量水分
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869711
H. Funke, M. Raynor, V. Houlding, T. Ramus, S. Hein, R. Kirk
{"title":"Trace moisture detection in corrosive gases using quadrupole mass spectroscopy","authors":"H. Funke, M. Raynor, V. Houlding, T. Ramus, S. Hein, R. Kirk","doi":"10.1109/LEOSST.2000.869711","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869711","url":null,"abstract":"An online analyzer for impurities in corrosive gases was developed using an HP-5973 MSD quadrupole mass selective detector equipped with customized data acquisition and gas sample inlet. The instrument was evaluated for its ability to quantitatively analyze moisture and other impurities at the ppm level in HCl.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"66 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124244322","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High-sensitivity 1-Gb/s CMOS receiver integrated with a III-V photodiode by wafer-bonding 高灵敏度的1gb /s CMOS接收器与III-V光电二极管通过晶圆键合集成
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869680
T. Nakahara, H. Tsuda, K. Tateno, N. Ishihara, C. Amano
{"title":"High-sensitivity 1-Gb/s CMOS receiver integrated with a III-V photodiode by wafer-bonding","authors":"T. Nakahara, H. Tsuda, K. Tateno, N. Ishihara, C. Amano","doi":"10.1109/LEOSST.2000.869680","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869680","url":null,"abstract":"We have developed a wafer-bonded hybrid receiver using 0.5-/spl mu/m CMOS that operates with a single 3.3-V supply voltage. The receiver circuit is small and simple, has high sensitivity and a broad bandwidth, and operates at either 0.85 or 1.55 /spl mu/m due to the direct attachment of the III-V photodiode without parasitic capacitance.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"136 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124456488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
In situ reflectance monitoring of epitaxial growth 外延生长的原位反射监测
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869714
W. Breiland
{"title":"In situ reflectance monitoring of epitaxial growth","authors":"W. Breiland","doi":"10.1109/LEOSST.2000.869714","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869714","url":null,"abstract":"Epitaxial growth of compound semiconductors is accomplished with MOCVD or MBE. In both these methods, many process variables must be precisely controlled to achieve the proper combination of layer thickness, chemical composition, lattice matching, and doping levels required by modern compound semiconductor devices. We have found that a simple and robust in situ monitor, normal incidence reflectance, has proven to be an indispensable tool for achieving stringent device requirements for epitaxial growth.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121846567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polarisation-induced beating in spatial light modulator optical switches 空间光调制器光开关的极化诱发跳动
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1049/IC:20000021
H. Chu, M. Holmes
{"title":"Polarisation-induced beating in spatial light modulator optical switches","authors":"H. Chu, M. Holmes","doi":"10.1049/IC:20000021","DOIUrl":"https://doi.org/10.1049/IC:20000021","url":null,"abstract":"We report, for the first time, results of a full polarisation analysis of SLM-based switches, taking into account all diffraction orders. Although the switch efficiency is dominated by a polarisation-independent term, we discover polarisation dependent beating effects with residual zero order.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130558150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polarized light scattering techniques for surface wafer inspection 表面晶圆检测的偏振光散射技术
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869724
T. Germer
{"title":"Polarized light scattering techniques for surface wafer inspection","authors":"T. Germer","doi":"10.1109/LEOSST.2000.869724","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869724","url":null,"abstract":"Laser light scattering is used in semiconductor manufacturing to inspect product and process-witness wafers for particulate contaminants, defects, and roughness. Typically, a laser beam is focused onto the wafer surface, and one or more large optics collect light scattered from the surface. As the laser beam is scanned over the wafer surface, background signal is associated with microroughness, while excursions from the background are associated with localized scattering sources, such as particles or subsurface defects. The use of multiple detectors allows some discrimination amongst different classes of light scattering events. The polarization of scattered light carries with it information, which can substantially improve the ability of these instruments to characterize the light scattering sources. This information is often not fully utilized by these instruments. While the incident laser beam is usually polarized in a manner to accentuate a specific scattering source, analysis of polarization of the resulting scattered light is rarely performed. This summary will outline results, which have shown how the polarization can be used to identify scattering sources.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122272043","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Multichannel computer generated holograms 多通道计算机生成全息图
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869674
M. Araiza-Esquivel, S. Guel-Sandoval
{"title":"Multichannel computer generated holograms","authors":"M. Araiza-Esquivel, S. Guel-Sandoval","doi":"10.1109/LEOSST.2000.869674","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869674","url":null,"abstract":"Detour phase computer generated holograms still remain under research due to their interesting characteristics. Many researchers have proposed several multiplexing methods, using detour holograms, where they have been able to perform an image reconstruction in various diffraction orders. As a new approach, we propose handling two or three flat partial objects (FPO) (sections of a whole flat object), that will be stored in a hologram, in such a way that an image addition is carried out with the recovering being in the same or different direction and same diffraction order. The used FPOs can be parts of a larger one, so a direct application of this method is to reunite as a whole, several flat partial images from corresponding FPOs.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"165 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120841028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Real-time monitoring of epitaxial growth 外延生长的实时监测
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869716
D. Aspnes
{"title":"Real-time monitoring of epitaxial growth","authors":"D. Aspnes","doi":"10.1109/LEOSST.2000.869716","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869716","url":null,"abstract":"Optical probes not only provide information about microscopic mechanisms of epitaxy but have also been used for fully automatic sample-driven closed-loop feedback control of the growth of compositionally graded materials and structures.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"234 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116463236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Simple and low-cost silicon Fabry-Perot filter for WDM channel monitoring 简单和低成本的硅法布里-珀罗滤波器用于WDM信道监控
2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI: 10.1109/LEOSST.2000.869760
G. Cocorullo, F. D. Della Corte, M. Iodice, I. Rendina
{"title":"Simple and low-cost silicon Fabry-Perot filter for WDM channel monitoring","authors":"G. Cocorullo, F. D. Della Corte, M. Iodice, I. Rendina","doi":"10.1109/LEOSST.2000.869760","DOIUrl":"https://doi.org/10.1109/LEOSST.2000.869760","url":null,"abstract":"We propose a simple and low-cost solution for tracking the frequency of WDM channels, based on the thermo-optic tuning of Fabry-Perot silicon optical filters. The fabricated structures exhibit, due to a suitable coating stack on both cavity sides, high finesse and narrow bandwidth. Moreover, the free spectral range is large compared to the channel spacing, allowing the monitoring of one carrier frequency at a time. By means of a heater we change the cavity refractive index and move the transmission peaks, thus scanning the WDM frequency set. In particular, in a preliminary prototype realized by using a 100-/spl mu/m-long silicon cavity we demonstrate the possibility to resolve up to seven 50-GHz-spaced channels, with a crosstalk of -10 dB, at wavelengths around 1550 nm. More channels are easily resolvable by using shorter cavities.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114447435","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
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