Trace moisture detection in corrosive gases using quadrupole mass spectroscopy

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI:10.1109/LEOSST.2000.869711

H. Funke, M. Raynor, V. Houlding, T. Ramus, S. Hein, R. Kirk

引用次数: 1

Abstract

An online analyzer for impurities in corrosive gases was developed using an HP-5973 MSD quadrupole mass selective detector equipped with customized data acquisition and gas sample inlet. The instrument was evaluated for its ability to quantitatively analyze moisture and other impurities at the ppm level in HCl.

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四极杆质谱法检测腐蚀性气体中的微量水分

采用HP-5973 MSD四极杆质量选择检测器，配备定制的数据采集和气体样品入口，开发了腐蚀性气体中杂质在线分析仪。该仪器在HCl中定量分析ppm水平的水分和其他杂质的能力得到了评价。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)

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