外延生长的实时监测

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI:10.1109/LEOSST.2000.869716

D. Aspnes

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引用次数: 0

摘要

光学探针不仅提供了外延的微观机制信息，而且还被用于成分梯度材料和结构生长的全自动样品驱动闭环反馈控制。

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Real-time monitoring of epitaxial growth

Optical probes not only provide information about microscopic mechanisms of epitaxy but have also been used for fully automatic sample-driven closed-loop feedback control of the growth of compositionally graded materials and structures.

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2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)

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