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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics最新文献

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Microspectrometer: From ideas to product 显微光谱仪:从想法到产品
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607827
H. Herzig, T. Scharf, O. Manzardo
{"title":"Microspectrometer: From ideas to product","authors":"H. Herzig, T. Scharf, O. Manzardo","doi":"10.1109/OMEMS.2008.4607827","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607827","url":null,"abstract":"Spectroscopy with miniaturized systems is one of the fastest developing fields and enters now industrial applications. We will discuss near infrared sensing systems based on MEMS spectrometers starting from concepts, explain prototypes and show final product.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115756712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fabrication of wall-coated Cs vapor cells for a chip-scale atomic clock 芯片级原子钟用壁涂铯蒸汽电池的制造
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607879
M. Hasegawa, P. Dziuban, L. Nieradko, A. Douahi, C. Gorecki, V. Giordano
{"title":"Fabrication of wall-coated Cs vapor cells for a chip-scale atomic clock","authors":"M. Hasegawa, P. Dziuban, L. Nieradko, A. Douahi, C. Gorecki, V. Giordano","doi":"10.1109/OMEMS.2008.4607879","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607879","url":null,"abstract":"Cesium vapor microcells incorporating a Cs dispenser were fabricated. An organosilane monolayer was successfully applied to the microcell walls as an anti-relaxation coating to improve the relaxation time of Cs atoms.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115554631","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A glass cantilever beam sensor combined with a spherical reflecting mirror for sensitivity enhancement 一个玻璃悬臂梁传感器结合了一个球面反射镜，以提高灵敏度
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607870
C. Liao, J. Tsai
{"title":"A glass cantilever beam sensor combined with a spherical reflecting mirror for sensitivity enhancement","authors":"C. Liao, J. Tsai","doi":"10.1109/OMEMS.2008.4607870","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607870","url":null,"abstract":"The incorporation of a micro spherical reflecting mirror (MSRM) onto a cantilever beam sensor magnifies the optical deflection angle and therefore enhances the sensitivity of an optical sensing system. The curvature of the spherical reflecting mirror determines the angle magnification. Given a certain bending amount and a fixed distance between the cantilever and position sensing detector, the cantilever integrated with a micro spherical mirror with a smaller radius of curvature produces a larger optical deflection. Currently at an intermediate stage, our optical sensing system includes a traditional cantilever and a separate spherical mirror with a radius of curvature of 10 cm, which experimentally simulates a system with a MSRM-integrated cantilever beam. The experimental results show that the sensitivity is enhanced by 70%.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116006705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Fabrication of aberration-corrected tunable micro-lenses 像差校正可调微透镜的制造
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607828
D. Mader, A. Seifert, H. Zappe
{"title":"Fabrication of aberration-corrected tunable micro-lenses","authors":"D. Mader, A. Seifert, H. Zappe","doi":"10.1109/OMEMS.2008.4607828","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607828","url":null,"abstract":"Pressure-actuated liquid-filled micro-lenses may be tuned in focal length from several millimeters to infinity and are thus suitable for use in tunable lens systems. A novel fabrication method for pneumatic multi-chamber lens systems which correct imaging errors such as chromatic and spherical aberrations is presented. The approach is a highly flexible, accurate and inexpensive way to implement lens combinations on the micro-scale which are similar to those in conventional macroscopic systems. A three-chamber lens system will demonstrate the potential of the process.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115594670","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Ultrahigh sensitivity slot-waveguide biosensor on a highly integrated chip for simultaneous diagnosis of multiple diseases 基于高度集成芯片的超高灵敏度槽波导生物传感器，可同时诊断多种疾病
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607824
D. Hill
{"title":"Ultrahigh sensitivity slot-waveguide biosensor on a highly integrated chip for simultaneous diagnosis of multiple diseases","authors":"D. Hill","doi":"10.1109/OMEMS.2008.4607824","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607824","url":null,"abstract":"SABIO is a multidisciplinary project involving the emerging fields of micro-nano technology, photonics, fluidics and bio-chemistry, targeting a contribution to the development of intelligent diagnostic equipment through the demonstration of a compact polymer based and silicon-based CMOS-compatible micro-nano system. It integrates optical biosensors for label-free biomolecular recognition based on a novel photonic structure named slot-waveguide with immobilised biomolecular receptors on its surface. The slot-waveguides provide high optical intensity in a subwavelength-size low refractive index region (slot-region) sandwiched between two high refractive index strips (rails) [Almeida, V., et al., 2004] leading to an enhanced interaction between the optical probe and biomolecular complexes (antibody-antigen). As such a biosensor is predicted to exhibit a surface concentration detection-limit lower than 1 pg/mm2, state-of-the-art in label-free integrated optical biosensors, as well as the possibility of multiplexed assay, which, together with reduced reaction volumes, leads to the ability to perform rapid multi-analyte sensing and comprehensive tests. This offers the further advantageous possibility of assaying several parameters simultaneously and consequently, statistical analysis of these results can potentially increase the reliability and reduce the measurement uncertainty of a diagnostic over single-parameter assays. In addition, the SABIO micro-nano system device applied to its novel protein-based diagnostic technology has the potential to be fast and easy to use, making routine screening or monitoring of diseases more cost-effective.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126871829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The torque-enhancement design for magnetostatic scanner 静磁扫描仪的转矩增强设计
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607880
Tsung-Lin Tang, Wen-Chien Chen, Rongshun Chen, W. Fang
{"title":"The torque-enhancement design for magnetostatic scanner","authors":"Tsung-Lin Tang, Wen-Chien Chen, Rongshun Chen, W. Fang","doi":"10.1109/OMEMS.2008.4607880","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607880","url":null,"abstract":"This study presents two designs to enhance the magnetostatic torque to drive the scanner, (1) the lever arm, and (2) the ferromagnetic material pattern with higher length to width ratio.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114784018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging 基于MEMS的双轴共聚焦临床内窥镜实时体内成像
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607819
W. Piyawattanametha, M. Mandella, H. Ra, J.T.C. Liu, E. Garai, G. Kino, O. Solgaard, C. Contag
{"title":"MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging","authors":"W. Piyawattanametha, M. Mandella, H. Ra, J.T.C. Liu, E. Garai, G. Kino, O. Solgaard, C. Contag","doi":"10.1109/OMEMS.2008.4607819","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607819","url":null,"abstract":"We demonstrate a dual-axes confocal endoscope in a 5.5 mm diameter package for clinical use. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional MEMS scanner that is actuated by self-aligned, vertical-comb actuators. The maximum DC optical scan angles are plusmn2.6deg on the inner axis and plusmn0.8deg on the outer axis, and the corresponding resonance frequencies are 3.1 kHz and 1.1 KHz. The maximum imaging rate is 10 frames/second, and the microscope achieves full-width-half-maximum transverse and axial resolutions of 5 mum and 7 mum, respectively when operated in the near infrared wavelength (785 nm).","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114188254","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Low operation voltage non self-emissive MEMS color filter pixels 低工作电压非自发射MEMS彩色滤波像素
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607856
C. Lo, J. Hast, Olli‐Heikki Huttunen, J. Petaja, J. Hiitola-Keinanen, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi
{"title":"Low operation voltage non self-emissive MEMS color filter pixels","authors":"C. Lo, J. Hast, Olli‐Heikki Huttunen, J. Petaja, J. Hiitola-Keinanen, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMEMS.2008.4607856","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607856","url":null,"abstract":"A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117093898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A novel etching-oxidation fabrication method for 3D nano structures on silicon and its application to SOI symmetric waveguide and 3D taper spot size converter 一种新型的硅基三维纳米结构蚀刻氧化制备方法及其在SOI对称波导和三维锥形光斑尺寸变换器中的应用
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607811
Linghan Li, A. Higo, M. Kubota, M. Sugiyama, Y. Nakano
{"title":"A novel etching-oxidation fabrication method for 3D nano structures on silicon and its application to SOI symmetric waveguide and 3D taper spot size converter","authors":"Linghan Li, A. Higo, M. Kubota, M. Sugiyama, Y. Nakano","doi":"10.1109/OMEMS.2008.4607811","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607811","url":null,"abstract":"A novel etching and oxidation method utilizing space effect of dry etching for three dimensional silicon structure is presented. Testing devices of SOI symmetric waveguide with ultra thick SiO2 cladding and silicon waveguide structure integrated with 3D taper spot size converter are fabricated using this method.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116246554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Towards integration of glass microlens with silicon comb-drive X-Y microstage 玻璃微透镜与硅梳状驱动X-Y微台集成的研究
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607882
K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel
{"title":"Towards integration of glass microlens with silicon comb-drive X-Y microstage","authors":"K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel","doi":"10.1109/OMEMS.2008.4607882","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607882","url":null,"abstract":"We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127261010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
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